Working Group 5.13

Surface Metrology on Nanostructures

–  Nanotubes for dimensional measurements
–  Interaction probe-sample
–  Crystalline surfaces
–  Standards for nano-analytic intruments

| –  Contact persons
–  Publications
–  Measurement and calibration capabilities

Tasks and aims

The investigation of structures on surfaces with high resolution microscopes has two limits: On the one hand the resolution is limited by the finite size of the probes used, as for example with scanning force microscopes, the radius R of the apex and the diameter D of the probe as well as the interactions between probe and sample. The other limit is related to the traceability of small displacements by laser interferometer due to their limited resolution and their inherent non-linearities.
Carbon nanotubes could be a probe for the highest resolutions, however, have been investigated up to now only a few times for dimensional metrology purposes. On the other hand traceable crystalline surfaces would establish a better basis for the length metrology in the nanometer range than the wavelength of lasers.

• Providing data about carbon nanotubes (CNT) and their use for dimensional measurements
• Quantitative information about contributions of probe-sample interactions on the uncertainty budget
• Application of crystalline surfaces as standards for length and angle

Contact