Working Group 5.12
Hardness and Layer Thickness Measurement Technique
– Hardness testing methods
– Measurement uncertainty Hardness
Measurement Technique
– Traceability of hardness measurements
– Layer thickness measurements
– Measurement standards for
Layer thickness measurements
– Publications
– Measurement and calibration capabilities
Layer thickness measurements
The aim is the improvement of the measuring technique and traceability of layer thickness measurements to a dimensional quantity (length, area):- Layer thickness measurements with topographic measuring procedures
- Layer thickness measurements on cross-sections with the scanning electron microscope
- Preparation of samples for topographic measurements and measurements on cross-sections
Ellipsometric
layer thickness measurements at the PTB's Clean Room - Electromagnetic layer thickness measurements
- Thickness measurements of foils
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Physikalisch-Technische
Bundesanstalt (PTB)
Page created: 2004-04-26, last update: 2007-08-31, S. Hube
Page created: 2004-04-26, last update: 2007-08-31, S. Hube
