Nesterov, V.: Facility and methods for the measurement of micro and nano forces in the range below 10-5 N with a resolution of 10-12 N (development concept). Meas. Sci. Technol. 18, 360–366

2006

Nesterov, Vladimir; Brand, Uwe (2005): Modelling and Investigation of the Mechanical and Electrical Characteristics of the Silicon 3D-boss Micro Probe for Force and Deflection Measurements. J. Micromech. Microeng. 16 (2006) 1116-1127
Peiner E; Tibrewala A, Lüthje H, Bandorf R, Biehl R, Doering L (2006): Piezoresistive diamond-like carbon strain gauges for silicon MEMS Proc. MATERIALS CONGRESS 2006, 5-7 April 2006, Carlton House Terrace, London, UK
Bütefisch S, Weimann T, Brand U, Feldmann M, Waldschik A, Büttgenbach S (2006): Novel Characterisation Tool for Micro-Actuators and other Compliant Microstructures, Proc. ACTUATOR
Bütefisch S, Brand U, Leester-Schädel M, Hoxhold B, Büttgenbach S (2006): Characterisation of Pneumatic and SMA Micro-Actuators with Short Response Times and Large Exerted Forces and Deflections, Proc. ACTUATOR
Büttgenbach S, Krah T, Pharalaoha A, Tutsch R, Herbst C, Bütefisch S, Brand U (2006): Taktile Sensoren für die Mikromesstechnik, GMA-Fachtagung „Messtechnik für Mikro- und Nano-Engineering“, 29./30. Nov. 2006 Erlangen
Doering L, Peiner E, Balke M, Brand U (2006): Calibration of Low-Force Stylus Probes Proc XVIII IMEKO World Congress
Peiner E, Doering L, Brand U, Christ A, Isenberg G, Balke M (2006): Force Calibration of Micro Pipettes for Single-Cell Probing Proc XVIII IMEKO World Congress<
Peiner E, Tibrewala A, Lütje H, Bandorf R, Biehl S, Doering L (2006): Piezoresistive Diamond-Like Carbon Micro Strain Gauges Proc XVIII IMEKO World Congress<
Brand U, Schnädelbach H, Schödel R, Feist C, Hinzmann G (2006): New depth-setting standards with grooves up to 5 mm depth Proc. Euspen
Doering L, Brand U (2006): Calibration of V-shaped Cantilever for Micro Force Metrology in Biomedical Engineering Proc. Euspen

2005

Nesterov, Vladimir; Brand, Uwe: Modelling and Investigation of the Silicon Twin Design 3D Micro Probe, Journal of Micromechanics and Microengineering, , 15 (2005), 3, 514-520, dx.doi.org/10.1088/0960-1317/15/3/011
Peiner, Erwin [speaker]; Oehler, Martin; Mofor, Augustine Che; El-Shaer, H.; Waag, Andreas; Dreyer, Sebastian; Jooss, Christian; Doering, Lutz: Pezoresistive Cantilever Magnetic Field Sensor, SENSOR 2005, Nürnberg, Deutschland, 10-12 May 2005; Sensor 2005 12th international conference, Proceedings Volume 1, 1 (2005), 213-218
Doering, Lutz; Peiner, Erwin; Nesterov, Vladimir; Brand, Uwe: Low noise piezoresistive micro force sensor, Seminar NanoScale 2004 - 6th Seminar on Quantitative Microscopy (QM) and 2nd Seminar on Nanoscale Calibration Standards and Methods, Braunschweig, Germany, 25-26, March, 2004, Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range, (2005), 157-170
Peiner, Erwin [speaker]; Tibrewala, Arti; Bandorf, Ralf; Biehl, S.; Lüthje, Holger; Doering, Lutz: MICRO FORCE SENSOR WITH PIEZORESISTIVE AMORPHOUS CARBON STRAIN GAUGE, International Conference on Solid State Sensors, Actuators and Microsystems 2005, Seoul, Korea, 05-09, June, 2005 Transducers'05 : International Conference on Solid State Sensors, Actuators and Microsystems in Seoul, Korea, (2005), www.transducers05.org/
Peiner, Erwin; Doering, Lutz: Force calibration of stylus instruments using silicon microcantilevers, Sensors and Actuators A, (2005), www.elsevier.com
Brand, Uwe; Kirchhoff, Juergen: A Micro-CMM with Metrology Frame for Low Uncertainty Measurements, Measurement Science and Technology, (2005)
Nesterov, Vladimir; Brand, Uwe: Modelling and investigation of the mechanical and electrical characteristics of the silicon 3D-boss micro probe for force and deflection measurements, Journal of Micromechanics and Microengineering, (2005)
Brand, Uwe; Neugebauer, Michael; Neuschaefer-Rube, Ulrich; Wilkening, Günter: Micro-Standards – State of the Art, Prospects and Limits. 12. SENSOR Kongress, Nürnberg, 12-13, May, 2005, Sensor 2005, 2 (2005), 169-174
Nesterov, Vladimir; Doering, Lutz; Brand, Uwe [speaker]; Peiner, Erwin; Büttgenbach, Stephanus: Modelling and investigation of the temperature drift of tactile piezoresistive silicon force- and deflection nanosensors, Mikrosystemtechnik Kongress 2005, Germany, 10-12, October, 2005, Mikrosystemtechnik Kongress 2005, (2005), www.mikrosystemtechnik-kongress.de/
Balke, Michael; Peiner, Erwin; Doering, Lutz: TACTILE PROBES FOR MICRO METROLOGY, Joint International IMEKO TC1+ TC7 Symposium, Ilmenau, Germany, 21- 24, September, 2005, Joint International IMEKO TC1+ TC7 Symposium, (2005)

2004

Brand, U., Doering, L., Nesterov, V., Neuschaefer-Rube, U.: Dimensional Metrology for Components of Microsystem Technology, In Proc. of: 4th euspen International Conference. European Society for Precision Engineering and Nanotechnology Bedford: European Society for Precision Engineering and Nanotechnology, ISBN 1-861-94108-0, Glasgow, Scotland, (2004) 3-4
Doering, L., Peiner, E., Nesterov, V., Brand, U.: Low noise piezoresistive micro force sensor, In Proc. of: Seminar NanoScale 2004; 6th Seminar on Quantitative Microscopy (QM) and 2nd Seminar on Nanoscale Calibration Standards and Methods Dimensional and related measurements in the micro- and nanometre range, Braunschweig Germany, (2004)
Frühauf, J., Gärtner, E., Brand, U., Doering, L.: Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers, In Proc. of: 4th euspen International Conference. European Society for Precision Engineering and Nanotechnology, ISBN 1-861-94108-0, Nanotechnology, Bedford: European Society for Precision Engineering and (Ed.), Glasgow, Scotland, (2004) 362-363
Frühauf, J., Krönert, S., Brand, U., Krüger-Sehm, R.: Reachable precision of silicon dimensional standards, In Proc. of: 4th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN) Bedford: European Society for Precision Engineering and Nanotechnology, ISBN 1-861-94108-0, Nanotechnology, European Society for Precision Engineering and (Ed.), Glasgow Scotland, (2004) 217-218
Hahn, M., Bedenbecker, M., Brand, U., Gatzen, H. H.: Evaluation of a linear Hybrid Micro Step Motor, In Proc. of: 8th International Symposium on Magnetic Materials, Processes and Devices as part of the 206th Meeting of the Electrochemical Society, Honolulu, Hawaii, (2004)
Krüger-Sehm, R., Brand, U., Greve, M.: Depth setting standard and interference microscope for depth of profile until 100 µm, In Proc. of: 9th International Conference on Metrology and Properties of Engineering Surfaces, Halmstadt Sweden, (2004)
Nesterov, V., Brand, U.: The Nonlinear Mechanical and Electrical Properties of Silicon 3D Micro Probes, In Proc. of: 4th euspen International Conference. European Society for Precision Engineering and Nanotechnology, Glasgow, Scotland, (2004) 242-243
Peiner, E., Doering, L., Nesterov, V.: Tactile Probes for High Aspect Ratio Micrometrology, mstnews international newsletter on MICROSYSTEMS and MEMS 4 (2004) 38-40

2003

Nesterov, V.; Pornnoppadol, P.; Brand, U.; Wilke, R.; Schmidt, M.; Büttgenbach, S.: A Novel Three-Axis Silicon Probe with Integrated Circuit on Chip for Microsystem Components, SPIE Conf. Smart Sensors, Actuators and MEMS, Vol. 5116, 844 – 849, 2003
Behrens, I.; Peiner, E.; Doering, L.; Brand U.: Piezoresistive Cantilever for Micro Force Calibration, Proc. Sensor 2003, 11th International Trade Fair for Sensors and Sensor Systems with Conference for Sensor Technology (2003), 243 – 248
Behrens, I.; Doering, L.; Peiner, E.: Piezoresistive Cantilever as Portable Micro Force Calibration Standard, J. Micromech. Microeng. 13 (2003), 171 – 177
Nesterov, V.; Pornnoppadol, P.; Brand, U.: Metrological characterization of a new three-axis piezoresistive micro probe, Proc. Euspen 2003, Aachen, 391 - 394 (Poster)
L. Doering, U. Brand, E. Peiner, J. Frühauf, E. Gärtner: Development of micro force setting standards for stylus instruments. Proc. International Topical Conference on precision Engineering, Micro Technology, Measurement Techniques and Equipment (Euspen), (2003), 407 - 410 (Poster)
Bütefisch, S., Solzbacher, F., Ziermann, R., Krause, P., Büttgenbach, S., Wilke, R., Cao, S., Pornnoppadol, P., Brand, U., Seitz, K., Roth, R.: New Micro Probe for Dimensional Metrology based on a Silicon Microstructure, In Proc. of: 11 th International Conference of Sensor, Vol. 2 AMA Fachverband für Sensorik e.V., Nürnberg, Germany, (2003) 75-80
Bütefisch, S.; Solzbacher, F.; Ziermann, V.; Krause,P.; Büttgenbach, S.; Wilke, R.; Cao, S.; Pornnoppadol, P.; Brand, U.; Seitz, K.; Roth,R.: Mikrotaster für Anwendungen in der taktilen Wegmesstechnik, Technisches Messen 5, 2003, 238 – 243
Brand, U.; Büttgenbach, S.; Nesterov, Dr. V.; Pornnoppadol, P.; Wilke, R.: 3D-Mikrotaster, VDI-Bericht 1669 (2003), GMA-Fachtagung „Metrologie in Mikro- und Nanotechnik“ vom 12. – 13. Februar 2003 in Stuttgart, 117 ff
Doering, L.; Brand, U.; Peiner, E.; Behrens, I.: Calibration of micro force setting standards using a new nano force calibration device: Proc. of Micro System Technologies MST 2003, S. 492 494, 2003
Cao, S.; Brand, U.; Büttgenbach, S.: A Calibration System for 3D Micro Probes, Proc. MICRO.tec, München, 13.-15. Oktober, S. 619 – 623, 2003

2002

Cao, S.; Brand, U.; Kleine-Besten, T.; Hoffmann, W.; Schwenke, H.; Bütefisch, S.; Büttgenbach, S.: Recent Developments in Dimensional Metrology for Microsystem Components, J. Microsystem Technologies 8 (2002), 3 - 6
Büttgenbach, S.; Bütefisch, S.; Schmidt, M.; Brand, U.; Cao, S.; P. Pornnoppadol, P.: Micro Mechanical Three-Axial Tactile Sensor and Application to the Characterization of Micro Components, Proc. Sensor Conf., Ludwigsburg, Germany, 11. - 12. March 2002
Brand, U.; Yu, L.; Chang, C.; Lüllmann, H.; Schwenke, H.: Beginning of Operation and Optimisation of a 3D Micro Measuring Device, Proc. Euspen Conf., Eindhoven (2002), 561 - 564
Pornnoppadol, P.; Cao, S.; Schmidt, M.; Wilke, R.;Bütefisch, S.; Nesterov, V.; Brand, U.: Three-dimensional microprobe with reduced probing forces, Proc. Euspen Conf., Eindhoven (2002), 737 - 740
Yu, Liandong; Brand, U.; Münchenhagen, R.; Chang, C.: Microsystem Metrology - the PTB special CMM, Int. Symp. on Prec. Mech. Meas. (ISPMM), 12. - 16. August 2002, Hefei, China
Doering, L.; Frühauf, J.; Brand, U.: Micro Force Transfer Standards, Joint Int. Conf. IMEKO TC3/TC5/TC20, Proc. Int. Conf. on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization, Celle (Germany) 24th ? 26th September 2002, VDI-Berichte 1685, VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, 83 - 88
Cao, S.; Häßler-Grohne, W.; Brand, U., Gao, S.; Wilke, R.; Büttgenbach, S.: A three dimensional measurement system with micro tactile sensor, Proc. Proc. SPIE's Int. Conf. Optomechatronic Systems III, 12th - 14th November 2002,Stuttgart
Brand, U.; Büttgenbach, S.: Taktile dimensionelle Messtechnik für Komponenten der Mikrosystemtechnik, Technisches Messen 12 (2002), 542 - 549
Behrens, I.; Herold, B., Doering, L.; Peiner, E.: Piezoresistive cantilever as portable micro force calibration standard, In: Proc. of MME 2002, Sinaia, 06-08 October, Romania, S. 31-34, 2002

2001

Frühauf, J.; Krönert, S.; Brand, U.: Tiefen- und Längennormale aus Silizium, Technisches Messen 7/8 (2001), 326-332
Brand, U; Kleine-Besten, T; Cao, S; Hoffmann, W; Schwenke, H: Three-dimensional metrology for microsystem components, Proc. Micro System Technologies 2001, Düsseldorf 27th - 29 th March 2001, 193 - 198 (Vortrag)
Brand, U; Cao,S; Hoffmann, W; Kleine-Besten, T; Pornnoppadol, P; Büttgenbach, S: A Micro-Probing System for Dimensional Metrology on Microsystem Components, Proc. of 2nd euspen International Conference, Turin, Italy, May 27th - 31st, 2001, 266 - 269 (Poster)
Doering, L; Brand, U: Si-cantilevers with integrated piezo resistive elements as micro force transfer standards, Proc. Nanoscale 2001, Bergisch-Gladbach, 15./16.11.2001 (Poster)
Bütefisch, S., Büttgenbach, S., Kleine-Besten, T., Brand, U.: Micromechanical three-axial tactile force sensor for micromaterial characterisation, Microsystem Technologies 7, 2001, S. 171-174

2000

Brand, U.; Krüger-Sehm, R.; Stuht, P.; Koenders, L.; Hinzmann, G.; Feist, C.; Jäger, V.: Depth setting standards for profilometers and interference microscopes, Proc. of the 10th Int. Colloquium on Surfaces. 31st January to 2nd February 2000, Chemnitz (Germany), 367 - 376 (Poster)
Kleine-Besten, T.; Brand, U.; Schlachetzki, A.; Bütefisch, S.; Büttgenbach, S.: Entwicklung und Untersuchung von 3D-Tastsensoren, VDI Bericht 1530, Sensoren und Messsysteme 2000, Ludwigsburg, 921-926 (Poster)
Bütefisch, S.; Büttgenbach, S.; Kleine-Besten, Brand, U.: Silicon three-axial tactile sensor for micromaterial characterization, MicroMaterials Conference "MicroMat 2000", Berlin, April 17 - 19 , 420 - 425
Hoffmann, W; Loheide, S; Kleine-Besten, T; Brand, U; Schlachetzki, A: Methods of characterising micro mechanical beams and its calibration for the application in micro force measurement systems, Proc. MicroTec 2000 in Hannover, (Poster)
Kleine-Besten, T; Cao, S; Hoffmann, W; Brand, U; Schlachetzki, A; Bütefisch, S; Schmidt, M; Büttgenbach, S: 3D Tactile Probe for Dimensional Metrology on Microsystem Components, MicroTec Conf. Hannover 2000 (Poster)
Brand, U; Kleine-Besten, T; Schwenke, H: Development of a special CMM for dimensional metrology on microsystem components, ASPE Conf. in Scottsdale, Arizona, 22th-27th Oct. 2000, 542-546
Bütefisch, S., Büttgenbach, S., Kleine-Besten, T., Brand, U.: Silicon three-axial tactile sensor for micromaterial characterization, J. Micro System Technologies 2000
Frühauf, J; Krönert, S., Brand, U: Tiefen- und Längennormale aus Silizium, Technisches Messen 2000

1999

Kleine-Besten, T.; Loheide, S.;Brand, U.; Bütefisch, S.; Büttgenbach, S.: Development and characterization of new probes for dimensional metrology on microsystem components, First international conference and general meeting of the european society for precision engineering and nanotechnology, Bremen, 31st may - 4th june 1999, 387-390
Kleine-Besten, T.; Loheide, S.; Brand, U.; Schlachetzki, A.; Bütefisch, S.;Büttgenbach, S.: Miniaturisierter 3-D Tastsensor für die Metrologie an Mikrostrukturen, Technisches Messen 66, 12 (1999), 490-495
Brand, U.; Hinzmann, G.; Schnädelbach, H; Feist, C.; Stuht, C.; Krüger-Sehm, R.; Jäger, V.: Rückführbare Präzisions-Tiefen-Einstellnormale für Messbereiche von 1 µm bis 1 mm, Technisches Messen 66, 12 (1999), 496-503

1998

Brand, U., Flügge, J.: Measurement capabilities of optical 3D-sensors for MST applications, Microelectronic Engineering 41/42 (1998), 623-626
Brand, U.: Calibration of optical 3D-measuring instruments, Proc. SPIE Conference Micromachining and Microfabrication 3512, Materials and Device Characterization in Micromachining, 21-22 September 1998, Santa Clara, CA, 328 - 335
Brand, U., Wilkening, G.: Metrology for Microsystems, Tutorial on the 6th International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components "Micro System Technologies 98" , 1-3 December 1998, Potsdam