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Structure
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Division 5
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Department 5.1
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Working Group 5.11
Working Group 5.11
Nanoforce Metrology for Tactile Sensors
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3D-micor-measuring device
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Probing Methods for microstructures
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Collaborative research centre 516
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Micro- and nano-force metrology
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Standards for micro-metrology
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Standards and Guidelines
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Contact persons
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Publications
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Measurement and calibration capabilities
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Standards for micro-metrology
Overview over different standards used in working group 5.11:
Overview dimensional standards for micro structures
[270 kB]
Depth-Setting standards for measurement ranges from 1 µm to 5 mm
Micro-force standards
İ Physikalisch-Technische Bundesanstalt (PTB)
Page created: 2004-04-26, last update: 2007-08-15,
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S. Hube
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