Working Group 5.11

Nanoforce Metrology for Tactile Sensors

–  3D-micor-measuring device
–  Probing Methods for microstructures
–  Collaborative research centre 516
–  Micro- and nano-force metrology
–  Standards for micro-metrology
–  Standards and Guidelines

| –  Contact persons
–  Publications
–  Measurement and calibration capabilities

Tasks and aims

It is the intention of the working group to develop measuring techniques for microsystem technology. The increased industrial use of micro components leads to novel requirements for quality assurance in microsystem technology. This applies mainly to the manufacture-oriented dimensional metrology.

Main focus of the research:

• 3D Micro Measuring Device
• Probing Methods for Micro Structures
  • 3D-Micro Probe
  • Si-Cantilever Sensors
  • 3D-Calibration Device for Dynamical Calibration of Micro Probes
• Collaborative Research Centre 516 "Design and Manufacturing of active microsystems"
• Micro- and Nano-force metrology
• Standards
  • Overview of dimensional standards  [270 kB]
  • Depth Setting Standards from 1 µm to 5 mm
  • Micro Force Setting Standards
• Standards and guidelines

Contact