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| PTB > | Structure > Division 5 > Department 5.1 > Working Group 5.11

Working Group 5.11

Nanoforce Metrology for Tactile Sensors

Symbol der Arbeitsgruppe

– 3D-micor-measuring device
– Probing Methods for microstructures
– Collaborative research centre 516
– Micro- and nano-force metrology
– Standards for micro-metrology
– Standards and Guidelines

| – Contact persons
– Publications
– Measurement and calibration capabilities

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Probing methods for micro structures

Overview over different probing methods for micro structures used in working group 5.11:

© Physikalisch-Technische Bundesanstalt (PTB)
Page created: 2004-04-26, last update: 2007-08-13, | S. Hube

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