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Research & development in non-invasive, analytical measurements for
microtechnologies (microelectronics, microsystem technology, biotechnology).
Aim: Spatially resolved information about physical and chemical properties
in the micron & submicron range using optical methods (Photoluminescence-,
Raman- and Infraredspectrometry).
Tasks
- Microstructural analytics of new materials
- New spatially resolved analytical methods
Contact
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