PTB > Structure > Division 2 > Department 2.4 > Working Group 2.45 > Fabrication > Lithography with STEM
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Macroscopic Quantum Objects



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Fabrication of metallic
sub-µm devices


Lithography with the Scanning-Transmission-Electronmicroscope (STEM)

By use of the STEM very narrow lines with lateral dimensions < 10 nm can be fabricated. A disadvatage is the difficult preparation of the necessary membran substrates.

 

Transmission-Electronmicroscope
micrograph of an 8 nm wide metallic line



Transmission-Electronmicroscope
micrograph of a SET-transistor



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Page created: 09. July 2007, last update: 09. July 2007, Ralf Dolata