PTB > Structure > Division 2 > Department 2.4 > Technology > Optical Lithography
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Quantum Electronics



- Optical Lithography
- Electron Beam Lithography
- Thin Film Deposition Equipment
- Etching Systems


Fabrication Technology

Optical Lithography

A contact printer is used for the optical exposure of photoresists:


Contact printer

With the contact printer a Cr-mask is aligned with respect to the sample and then pressed against the resit layer. The pattern of the mask is transfered to the resist by ultra-violet light.
 



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Page created: 05. April 2004, last update: 04. September 2007, Ralf Dolata