PTB > Structure > Division 2 > Department 2.4 > Technology
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Quantum Electronics



- Optical Lithography
- Electron Beam Lithography
- Thin Film Deposition Equipment
- Etching Systems


Fabrication Technology
in the Clean-room Facility


For the production of quantum devices, the department "Quantum Electronics" operates the clean-room facility of PTB containing the required thin film technology and the lithographic equipment for the fabrication of highly integrated metallic devices based on superconductors and normal conductors with structural dimensions down to 10 nm. Different technological equipment is needed for the fabrication of these micro and nanoelectronic structures.


Two dilution refrigerators are additionally available for the realisation of low temperature investigations of the fabricated devices.



All working groups of the department "Quantum Electronics" are using the technolgoy: 



Contact

Head of Department Dr. Alexander Zorin
Phone: ++ 49-531-592-2400
E-Mail: Alexander Zorin

Secretariat Sabine Heine
Phone: ++ 49-531-592-2401
Fax: ++ 49-531-592-2405
E-Mail: Sabine Heine

Address Physikalisch-Technische Bundesanstalt
Fachbereich 2.4
Bundesallee 100
38116 Braunschweig
GERMANY


© Physikalisch-Technische Bundesanstalt
Page created: 27. Juni 2007, last update: 04. September 2007, Johannes Kohlmann