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Title:

Picometre displacement measurements using a differential Fabry-Perot optical interferometer and an x-ray interferometer

Author(s): M. Celik, R. Hamid, U. Kuetgens and A. Yacoot
Journal: Meas. Sci. Technol.
Year: 2012
Volume: 23
Pages: 085901 (6pp)
DOI: 10.1088/0957-0233/23/8/085901

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