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Title:

Sub-atomic dimensional metrology: developments in the control of x-ray interferometers

Author(s): A. Yacoot and U. Kuetgens
Journal: Meas. Sci. Technol.
Year: 2012
Volume: 23
Pages: 074003 (7pp)
DOI: 10.1088/0957-0233/23/7/074003

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