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Title:

A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry

Author(s): G. N. Peggs and A. Yacoot
Journal: Phil. Trans. R. Soc. Lond. A
Year: 2002
Volume: 360
Pages: 953-968
DOI: 10.1098/rsta.2001.0976

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