Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry.

Author(s): M. A. Henn, S. Heidenreich, H. Gross, A. Rathsfeld, F. Scholze and M. Bär
Journal: Opt. Lett.
Year: 2012
Volume: 37
Issue: 24
Pages: 5229-5231
DOI: 10.1364/OL.37.005229

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