Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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Alternative methods for uncertainty evaluations in EUV scatterometry.

Author(s): S. Heidenreich, H. Gross and M. Bär
Journal: Proc. SPIE: Modeling aspects in Optical metrology IV
Year: 2013
Month: May
Volume: 8789
Pages: 87890T-1 (8pp)
Event place: Munich
Event date: May 2013
DOI: 10.1117/12.2020677

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