Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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Modelling line edge roughness in periodic-line space structures by Fourier optics to improve scatterometry.

Author(s): H. Gross, S. Heidenreich, M.-A. Henn, G. Dai, F. Scholze and M. Bär
Journal: JEOS
Year: 2014
Volume: 9
Pages: 14003 (10pp)
DOI: 10.2971/jeos.2014.14003

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