Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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A surrogate model enables a Bayesian approach to the inverse problem of scatterometry.

Author(s): S. Heidenreich, H. Gross, M. A. Henn, C. Elster and M. Bär
Journal: J. Phys.: Conf. Ser.
Year: 2014
Volume: 490
Pages: 012007(4pp)
DOI: 10.1088/1742-6596/490/1/012007

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