Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates.

Author(s): H. Gross, A. Rathsfeld, F. Scholze and M. Bär
Journal: Meas. Sci. Technol.
Year: 2009
Volume: 20
Pages: 105102-105112
DOI: 10.1088/0957-0233/20/10/105102

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