Our publications

The following publications contain results from the work in this project. Some of them represent key deliverables of the project including good practice guides for each of the three technical workpackages and case studies for selected applications.

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Title:

The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors

Author(s): S. Heidenreich, H. Gross, M. Wurm, B. Bodermann and M. Bär
Journal: SPIE Proceedings
Year: 2015
Pages: 95260U
DOI: 10.1117/12.2185707

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