Industrial micro-fabrication processes are happening on ever smaller scale, bringing new challenges regarding environmental control, especially cleanliness.  Airborne molecular contamination (AMC) is chemical contamination in the form of gases, vapours or aerosols that has adverse effects on products, processes or instruments in clean room manufacturing environments.

The MetAMC project (05/2013 - 04/2016) has developed field-deployable optical instruments for online measurement of AMCs in clean rooms and AMC reference materials for instrument calibration. High technology manufacturing industries such as semiconductor, nanotechnology and photovoltaics will now be able to define critical AMC sources, optimise microfabrication processes and enable fast corrective actions in production. As a result, product quality will be improved, yield losses and process shut down times will be decreased and competitiveness will be increased.

Please download the final publishable summary or the final project report to learn more!