MetAMC - Metrology for airborne molecular contamination in manufacturing environments

Industrial micro-fabrication processes are happening on ever smaller scale, bringing new challenges regarding environmental control, especially cleanliness. This project aims at providing the metrological basis for monitoring and controlling airborne molecular contamination (AMC) in clean room manufacturing environments. Key tasks are the development and evaluation of laser-based monitoring techniques (e.g. Opens internal link in current windowphotoacoustic and Opens internal link in current windowcavity ring-down spectroscopy) and sampling techniques, as well as the generation of reference material.


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Previous Events

MetAMC workshop

Our workshop on Airborne Molecular Contamination: Sampling, generation & measurement was held on Monday, 26 October 2015 prior to the Opens external link in new windowCleanzone 2015 at Messe Frankfurt. In this workshop we addressed ultra-sensitive optical techniques for AMC measurements, traceable reference material generation, reliable and practical sampling of AMCs and results from laboratory and field tests (follow this link to download the workshop flyer).

We kindly thank all participants for their interest, helpfull feedback, and fruitful discussions!

Laser Applications to Chemical, Security and Environmental Analysis (LACSEA)

25 - 28 July 2016
Heidelberg, Germany 

17th International Congress of Metrology

Paris, France

8th International Gas Analysis Symposium & Exhibition (GAS2015)

Beurs-WTC Rotterdam, the Netherlands

Pittcon 2015 Conference & Expo

Ernest N. Morial Convention Center
New Orleans, LA USA

DGaO 2014

Karlsruhe, Germany


Frankfurt, Germany


DGaO 2013

Braunschweig, Germany

Laser World of Photonics

Munich, Germany

flyer, Opens external link in new windowlink

5. Gassensor Workshop

Fraunhofer IPM, Freiburg, Germany

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