MetAMC - Metrology for airborne molecular contamination in manufacturing environments

Industrial micro-fabrication processes are happening on ever smaller scale, bringing new challenges regarding environmental control, especially cleanliness. This project aims at providing the metrological basis for monitoring and controlling airborne molecular contamination (AMC) in clean room manufacturing environments. Key tasks are the development and evaluation of laser-based monitoring techniques (e.g. Opens internal link in current windowphotoacoustic and Opens internal link in current windowcavity ring-down spectroscopy) and sampling techniques, as well as the generation of reference material.

 

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Upcoming Events


Meet us at:

Laser Applications to Chemical, Security and Environmental Analysis (LACSEA)

25 - 28 July 2016
Heidelberg, Germany 

Previous Events


MetAMC workshop

Our workshop on Airborne Molecular Contamination: Sampling, generation & measurement was held on Monday, 26 October 2015 prior to the Opens external link in new windowCleanzone 2015 at Messe Frankfurt. In this workshop we addressed ultra-sensitive optical techniques for AMC measurements, traceable reference material generation, reliable and practical sampling of AMCs and results from laboratory and field tests (follow this link to download the workshop flyer).

We kindly thank all participants for their interest, helpfull feedback, and fruitful discussions!

17th International Congress of Metrology

21.-24.09.2015
Paris, France

8th International Gas Analysis Symposium & Exhibition (GAS2015)

10.-12.06.15
Beurs-WTC Rotterdam, the Netherlands

Pittcon 2015 Conference & Expo

08.-12.03.2015
Ernest N. Morial Convention Center
New Orleans, LA USA

DGaO 2014

10.-14.06.2014
Karlsruhe, Germany

12. OPTATEC

20.–22.05.2014
Frankfurt, Germany

flyer

DGaO 2013

21.-25.05.2013
Braunschweig, Germany

Laser World of Photonics

13.-16.05.2013
Munich, Germany

flyer, Opens external link in new windowlink

5. Gassensor Workshop

14.03.2013
Fraunhofer IPM, Freiburg, Germany

Opens external link in new windowlink