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Correlated Diffuse X-ray Scattering from Periodically Nano-Structured Surfaces

Author(s): V. Soltwisch, A. Haase, J. Wernecke, J. Probst, M. Schoengen, S. Burger, M. Krumrey and F. Scholze
Journal: Phys. Rev. Lett.
Year: 2015
Month: October
Day: 21
Web URL:
Abstract: Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. Different contributions to the diffuse X-ray scattering pattern were identified: A palm-like structure of scattering sheets caused by resonant diffuse scattering which is correlated to the grating line shape, the so-called Yoneda band caused by a resonant scatter enhancement at the critical angle of total reflection and higher-order Yoneda bands caused by a subsequent diffraction of the Yoneda enhanced surface scattering at the grating. In order to enable the reconstruction of nano-structured surface geometries, the dynamic scatter contributions were modeled using a solver for the time-harmonic Maxwell's equations based on the finite-element method.

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