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Title:

hp-finite element method for simulating light scattering from complex 3D structures

Author(s): S. Burger, L. Zschiedrich, J. Pomplun, S. Herrmann and F. Schmidt
Journal: Proc. SPIE 9424
Year: 2015
Month: March
Day: 19
Event name: Metrology, Inspection, and Process Control for Microlithography XXIX
Event place: San Jose, California, United States
Event date: February 22, 2015
DOI: 10.1117/12.2085795
Abstract: Methods for solving Maxwell’s equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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