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Comparison of DUV scatterometry for CD and edge profile metrology on EUV masks

Author(s): J. Endres, B. Bodermann, G. Dai, H. Gross, M. Wurm, M.-A. Henn and F. Scholze
Journal: Proc SPIE
Year: 2013
Event name: FRINGE 2013
Event place: NĂ¼rtingen, Germany
Event date: 8 - 11 September 2013
DOI: 10.1007/978-3-642-36359-7_128
ISBN: 978-3-642-36358-0

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