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Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

Author(s): P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S.F. Pereira, S. Burger and H.P. Urbach
Journal: JEOS
Year: 2015
Volume: 10
DOI: 10.2971/jeos.2015.15002
Abstract: An extension of Fourier scatterometry is presented, aiming at increasing the sensitivity by measuring the phase difference between the reflections polarized parallel and perpendicular to the plane of incidence. The ellipsometric approach requires no additional hardware elements compared with conventional Fourier scatterometry. Furthermore, incoherent illumination is also sufficient, which enables spectroscopy using standard low-cost light sources.

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