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Phase retrieval between overlapping orders in Coherent Fourier Scatterometry using scanning

Author(s): N. Kumar, O. El Gawhary, S. Roy, S.E. Pereira and H.P. Urbach
Journal: JEOS
Year: 2013
Volume: 8
DOI: 10.2971/jeos.2013.13048
Abstract: Non-interferometric phase retrieval from the intensity measurements in Coherent Fourier Scatterometry (CFS) is presented using a scanningfocused spot. Formulae to determine the state of polarization of the scattered light and to retrieve the phase difference between overlappingscattered orders are given. The scattered far field is rigorously computed and the functionality of the method is proved with experimentalresults.

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