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Investigation of microstructured fiber geometries by scatterometry

Author(s): P. E. Hansen and S. Burger
Journal: Proc. SPIE
Year: 2013
Month: May
Day: 13
Volume: 8789
Issue: Modeling Aspects in Optical Metrology IV
DOI: 10.1117/12.2020526
Abstract: Hollow-core photonic bandgap fibers guide light using diffraction rather than total internal reflection as is the case with normal single- mode communications fibers. The fibers consist of a hollow capillary (~19 micrometers in diameter) surrounded by capillary (~4 micrometers in diameter) arranged in a honey-comb like structure. The honey-comb structure scatters light in the core such that light within the bandgap wavelengths cannot escape from the core. However, the bandgap properties greatly depend on the accuracy with which the microstructures can be controlled during the fabrication process. For measuring the geometrical properties of hollow core photonic crystal fibers with a honeycomb cladding structure we use an angular scatterometric setup. For analyzing the experimentally obtained data we rigorously compute the scattering signal by solving Maxwell's equations with finite-element methods. This contribution focuses on the numerical analysis of the problem. A convergence analysis demonstrates that we reach highly accurate solutions. Our results show very good qualitative agreement between experimental and numerical results. We furthermore demonstrate concepts for accurately monitoring dimensional parameters in the fiber manufacturing process. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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