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Fast simulation method for parameter reconstruction in optical metrology

Author(s): S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt and B. Bodermann
Journal: Proc. SPIE
Year: 2013
Month: February
Day: 24
Volume: 8681
Issue: Metrology, Inspection, and Process Control for Microlithography XXVII
DOI: 10.1117/12.2011154
Abstract: A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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