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Numerical investigations of the influence of different commonly applied approximations in scatterometry

Author(s): J. Endres, S. Burger, M. Wurm and B. Bodermann
Journal: Proc. SPIE
Editor: J. Endres, S. Burger, M. Wurm and B. Bodermann
Year: 2013
Month: May
Day: 13
Volume: 8789
DOI: 10.1117/12.2022108
Abstract: At PTB we investigate the prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures. Commonly applied approximations and simplifications may lead to contributions to the measurement uncertainty or even to systematic measurement errors. Here we present a short overview about the main effects connected with these simplifications. In particular we present numerical investigations of the influence of a finite beam size on the scatterometry results. The results indicate, that an impact of the finite beam size becomes significant only for tightly focused beams with a beam waist radius wo smaller than 10 μm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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