References
default
P. E. Hansen and S. Burger
Proc. SPIE 8789 (Modeling Aspects in Optical Metrology IV) (2013)
default
V. Soltwisch, S. Burger and F. Scholze
Proc. SPIE 8789 (Modeling Aspects in Optical Metrology IV) (2013)
default
J. Endres, S. Burger, M. Wurm and B. Bodermann
Proc. SPIE 8789 (2013)
default
S. Heidenreich, M.-A. Henn, H. Gross, B. Bodermann and M. Baer
Modeling Aspects in Optical Metrology IV
Munich, Germany, May 13, 2013
May 2013
default
M.-A. Henn, S. Heidenreich, H. Gross, B. Bodermann and M. Baer
Modeling Aspects in Optical Metrology IV
Munich, Germany, May 13, 2013
May 2013
default
S. Burger, L. Zschiedrich, J. Pomplun, M. Blome and F. Schmidt
Emerging Liquid Crystal Technologies VIII
San Francisco, California, USA, February 02, 2013
March 2013
default
S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt and B. Bodermann
Proc. SPIE 8681 (Metrology, Inspection, and Process Control for Microlithography XXVII) (2013)
default
N. Kumar, O. El Gawhary, S. Roy, S.E. Pereira and H.P. Urbach
JEOS 8 (2013)
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J. Endres, B. Bodermann, G. Dai, H. Gross, M. Wurm, M.-A. Henn and F. Scholze
FRINGE 2013
NĂ¼rtingen, Germany, 8 - 11 September 2013
2013
978-3-642-36358-0
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H. Gross, M.-A. Henn, S. Heidenreich, A. Rathsfeld and M. Baer
Optical Systems Design 2012
Barcelona, Spain, November 26, 2012
December 2012
default
M.A. Henn, S. Heidenreich, H. Gross, A. Rathsfeld, F. Scholze and M. Baer
Opt Lett 37 (24), 5229-31 (2012)
default
H. Gross, M.-A. Henn, S. Heidenreich, A. Rathsfeld and M. Baer
Applied Optics 51, 7384-7394 (2012)
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