Work Packages

No.

Name

Leader / Contact

WP1

Development of advanced Scatterometry

PTB / Frank Scholze

WP2

High resolution AFM and SEM methods

VSL / Marijn van Veghel

WP3

Diffractive optical elements and curved surface structures

DFM / Poul Erik Hansen

WP4

Improved data evaluation and numerical modelling of the inverse problem

CMI / Petr Klapetek

WP5

Scatterometry standard

PTB / Bernd Bodermann

WP6

Creating impact

NPL / Andrew Yacoot

WP7

JRP management and coordination

PTB / Bernd Bodermann

  

JRP Partners

Partner 1 PTB, Germany 

Partner 2 http://www.cmi.cz, CMI, Czech Republic

Partner 3 www.dfm.dtu.dk, DFM, Denmark

Partner 4 www.mikes.fi, MIKES, Finland

Partner 5 www.npl.co.uk, NPL, UK

Partner 6 www.vsl.nl, VSL, Netherlands

Partner 7 www.nanocomp.fi, Nanocomp, Finland

 

 

JRP REGs

REG1 www.jcmwave.com JCM, Germany 

REG2 www.uef.fi UEF, Finland