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290th PTB-Seminar "VUV and EUV Metrology"

04.12.2015

The 290th PTB Seminar "VUV and EUV Metrology" took place in the Hermann von Helmholtz Building on 5 and 6 November 2015. This year's seminar, which was the third in a series on this topic which started back in 2011, also provided a platform for interdisciplinary exchange between the more than 115 participants. With 26 presentations and a poster session, the participants presented the latest results from the application of EUV radiation in industry for lithography and metrology as well as developments for space-based VUV spectrometry. This seminar was organized with the support of numerous industrial enterprises along with the Helmholtz Fund.

Contact:

F. Scholze, 7.12, e-mail: Opens window for sending emailFrank.Scholze(at)ptb.de
A. Gottwald, 7.13, e-mail: Opens window for sending emailAlexander.Gottwald(at)ptb.de