Physikalisch-Technische Bundesanstalt

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2012

C. Braig, L. Fritzsch, T. Käsebier, E.-B. Kley, C. Laubis, Y. Liu, F. Scholze, and A. Tünnermann

An EUV beamsplitter based on conical grazing incidence diffraction

Optics Express 20, 1825-1838 (2012);   http://dx.doi.org/10.1364/OE.20.001825

A. Gottwald, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

Current capabilities at the Metrology Light Source

Metrologia 49, S146-S151 (2012);   http://dx.doi.org/10.1088/0026-1394/49/2/S146

P. Hönicke, Y. Kayser, B. Beckhoff, M. Müller, J.-Cl. Dousse, J. Hoszowska and S. Nowak

Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy

J. Anal. At. Spectrom. 27, 1432–1438 (2012);   http://dx.doi.org/10.1039/c2ja10385k

T.L. Hopman, C.M. Heirwegh, J.L. Campbell, M. Krumrey, and F. Scholze

An accurate determination of the K-shell X-ray fluorescence yield of silicon

X-Ray Spectrometry 41, 164-171 (2012);   http://dx.doi.org/10.1002/xrs.2378

M. Kato, T. Tanaka, T. Kurosawa, N. Saito, M. Richter, A. A. Sorokin, K. Tiedtke, T. Kudo, K. Tono, M. Yabashi, and T. Ishikawa

Pulse energy measurement at the hard x-ray laser in Japan

Appl. Phys. Lett. 101, 023503 (2012);   http://dx.doi.org/10.1063/1.4733354

A. Kato, S. Burger, and F. Scholze

Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry

Appl. Opt. 51, 6457 (2012)

C. Laubis, A. Fischer, and F. Scholze

Extension of PTB's EUV metrology facilities

Proc. SPIE 8322, 832236-1 (2012);   http://dx.doi.org/10.1117/12.916414

M. Martins, M. Meyer, M. Richter, A. A. Sorokin, and K. Tiedtke

Atomic Physics Using Ultra-Intense X-Ray Pulses

Atomic Processes in Basic and Applied Physics 68, 307-330 (2012);   http://www.springerlink.com/content/t105442526228897/

I. Müller, R. M. Klein, J. Hollandt, G. Ulm, and L. Werner

Traceable calibration of Si avalanche photodiodes using synchrotron radiation

Metrologia 49, S152-S155 (2012);   http://stacks.iop.org/Met/49/S152

M. Müller, A. Nutsch, R. Altmann, G. Borionetti, T. Holz, C. Mantler, P. Hönicke, M. Kolbe, and B. Beckhoff

Reliable quantification of inorganic contamination by TXRF

Solid State Phenomena 187, 291-294 (2012);   http://dx.doi.org/10.4028/www.scientific.net/SSP.187.291

R. Müller, A. Hoehl, A. Matschulat, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, and G. Wüstefeld

Status of the IR and THz beamlines at the Metrology Light Source

J. Phys. Conf. Series 359, 012004 (2012);   http://dx.doi.org/10.1088/1742-6596/359/1/012004

A. Nutsch, B. Beckhoff, G. Borionetti, D. Codegoni, S. Grasso, P. Hoenicke, A. Leibold, M. Müller, M. Otto, L. Pfitzner, M.-L. Polignano

Reference Samples for Ultra Trace Analysis of Organic Compounds on Substrate Surfaces

Solid State Phenomena 187, 295-298 (2012); Trans Tech Publications;   http://dx.doi.org/10.4028/www.scientific.net/SSP.187.295

P. Probst, A. Semenov, M. Ries, A. Hoehl, P. Rieger, A. Scheuring, V. Judin, S. Wünsch, K. Il'in, N. Smale, Y.-L. Mathis, R. Müller, G. Ulm, G. Wüstefeld, H.-W. Hübers, J. Hänisch, B. Holzapfel, M. Siegel, and A.-S. Müller

Non-thermal response of YBa₂CU₃O_7-δ thin films to picosecond THz pulses

Phys. Rev. B 85, 174511-1 (2012);   http://dx.doi.org/10.1103/PhysRevB.85.174511

T. Seuthe, M. Höfner, F. Reinhardt, W. J. Tsai, J. Bonse, M. Eberstein, H. J. Eichler and M. Grehn

Femtosecond laser-induced modification of potassium-magnesium silicate glasses: An analysis of structural changes by near edge x-ray absorption spectroscopy

APPLIED PHYSICS LETTERS 100, 224101-1 (2012); American Institute of Physics, ISSN: 0003-6951;   http://dx.doi.org/10.1063/1.4723718

L. Shi, S. Nihitianov, S. Xia, L.K. Nanver, A. Gottwald, and F. Scholze

Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction p⁺-n VUV/EUV Photodiodes

IEEE Transactions on Instrumentation and Measurement 61, 1268-1277 (2012);   http://dx.doi.org/10.1109/TIM.2012.2187029

S. Sioncke, C. Fleischmann, D. Lin, E. Vrancken, M. Caymax, M. Meuris, K. Temst, A. Vantomme, M. Müller, M. Kolbe, and B. Beckhoff

S-passivation of the Ge gate stack using (NH4)2S

Solid State Phenomena 187, 23-26 (2012);   http://dx.doi.org/10.4028/www.scientific.net/SSP.187.23

T. Tanaka, M. Kato, T. Kurosawa, Y. Morishita, N. Saito, I.H. Suzuki, M. Krumrey, and F. Scholze

First comparison of spectral responsivity in the soft x-ray region

Metrologia 49, 501-506 (2012);   http://dx.doi.org/10.1088/0026-1394/49/4/501

Ph. Troussel, D. Dennetiere, A. Rousseau, S. Darbon, P. Høghøj, S. Hedacq, and M. Krumrey

Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV

Rev. Sci. Instrum. 83, 10E533-1 (2012);   http://dx.doi.org/10.1063/1.4738661

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2011

B. Andreas, Y. Azuma, G. Bartl, P. Becker, H. Bettin, M. Borys, I. Busch, M. Gray, P. Fuchs, K. Fujii, H. Fujimoto, E. Kessler, M. Krumrey, U. Kuetgens, N. Kuramoto, G. Mana, P. Manson, E. Massa, S. Mizushima, A. Nicolaus, A. Picard, A. Pramann, O. Rienitz, D. Schiel, S. Valkiers and A. Waseda

A determination of the Avogadro constant by counting the atoms in a ²⁸Si crystal

Phys. Rev. Lett. 106, 030801 (2011)

B. Andreas, Y. Azuma, G. Bartl, P. Becker, H. Bettin, M. Borys, I. Busch, P. Fuchs, K. Fujii, H. Fujimoto, E. Kessler, M. Krumrey, U. Kuetgens, N. Kuramoto, G. Mana, E. Massa, S. Mizushima, A. Nicolaus, A. Picard, A. Pramann, O. Rienitz, D. Schiel, S. Valkiers, A. Waseda and S. Zakel

Counting the atoms in a ²⁸Si crystal for a new kilogram definition

Metrologia 48, S1 (2011)

U. Arp, R. Klein, Z. Li, W. Paustian, M. Richter, P.-S. Shaw, and R. Thornagel

Synchrotron radiation-based bilateral intercomparison of ultraviolet source calibrations

Metrologia 48, 261-267 (2011)

M. Bavdaz, N. Rando, E. Wille, K. Wallace, B. Shortt, M. Collon, C. van Baren, G. Pareschi, F. Christensen, M. Krumrey and M. Freyberg

ESA-led ATHENA/IXO Optics Development Status

SPIE 8147, 81470C (2011)

B. Beckhoff, Ph. Hönicke, M. Kolbe, M. Müller, B. Pollakowski, F. Reinhardt, J. Weser, U. Brand, K. Herrmann, V. Nesterov

Materialspezifische Messverfahren für die Nanotechnologie

PTB-Mitteilungen 121, 165-169 (2011)

B. Bodermann, J. Flügge, H. Groß, A. Kato, F. Scholze

Charakterisierung von Nanostrukturen auf Substraten der Halbleiterindustrie

PTB-Mitteilungen 121, 152-164 (2011)

B. Bodermann, E. Buhr, H.-U. Danzebrink, M. Bär, F. Scholze, M. Krumrey, M. Wurm, P. Klapetek, P.-E. Hansen, V. Korpelainen, M. van Veghel, A. Yacoot, S. Siitonen, O. El Gawhary, S. Burger, T. Saastamoinen

Joint Research on Scatterometry and AFM Wafer

AIP Conference Proceedings 1395, 319-323 (2011)

F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, A. Gottwald, U. Kroth, M. Richter

Polarizing and non-polarizing mirrors for the hydrogen Lyman-α radiation at 121.6 nm

Appl. Phys. A 102, 641-649 (2011)

S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, A. Kato, C. Laubis, F. Scholze

Investigation of 3D patterns on EUV masks by means of scatterometry and comparison to numerical simulation

SPIE 8186, 81661Q (2011)

I. Busch, Y. Azuma, H. Bettin, L. Cibik, P. Fuchs, K. Fujii, M. Krumrey, U. Kuetgens, N. Kuramoto and S. Mizushima

Surface layer determination for the Si spheres of the Avogadro project

Metrologia 48, S62 (2011)

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, K. Wallace, E. Wille, M. Olde Riekerink, J. Haneveld, A. Koelewijn, C. van Baren, P. Müller, M. Krumrey, M. Freyberg, A.C. Jakobsen and F. Christensen

Design, Fabrication, and Characterization of Silicon Pore Optics for ATHENA/IXO

SPIE 8147, 81470D (2011)

P. Cuony, D.T.L. Alexander, L. Löfgren, M. Krumrey, M. Marending, M. Despeisse, C. Ballif

Mixed phase silicon oxide layers for thin-film silicon solar cells

Mater. Res. Soc. Symp. Proc. 1321, a12-02 (2011)

A. Delabie, S. Sioncke, J. Rip, S. van Elshocht, G. Pourtois, M. Mueller, B. Beckhoff and K. Pierloot

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

American Vacuum Society 30, 01A127-1 (2011); J. Vac. Sci. Technol. A., ISSN: 0734-2101;   http://dx.doi.org/10.1116/1.3664090

J. Feikes, M. von Hartrott, M. Ries, P. Schmidt, G. Wüstefeld, A. Hoehl, R. Klein, R. Müller, and G. Ulm

Metrology Light Source: The first electron storage ring optimized for generating coherent THz radiation

Phys. Rev. STAB 14, 030705 (2011)

J. Feikes, T. Birke, K. Bürkmann-Gehrlein, O. Dressler, V. Dürr, D. Engel, F. Falkenstern, B. Franksen, H. Glass, A. Heugel, H.-G. Hoberg, F. Hoffmann, J. Kuszynski, J. Rahn, M. Ries, G. Schindhelm, P. Schmid, T. Schneegans, D. Schüler, G. Wüstefeld, R. Klein

Recent developments at the Metrology Light Source

Proc. of IPAC2011, 2927 (2011)

C. Fleischmann, S. Sioncke, S. Couet, K. Schouteden, B. Beckhoff, M. Müller, P. Hönicke, M. Kolbe, C. Van Haesendonck, M. Meuris, K. Temst, and A. Vantomme

Towards Passivation of Ge(100) Surfaces by Sulfur Adsorption from a (NH₄)₂S Solution: A Combined NEXAFS, STM and LEED Study

J. ECS 158, H589-H594 (2011)

C. Fleischmann, M. Houssa, S. Sioncke, B. Beckhoff, M. Müller, P. Hönicke, M. Meuris, K. Temst, A. Vantomme

Self-Affine Surface Roughness of Chemically and Thermally Cleaned Ge(100) Surfaces

JECS 158 (2011)

A. Gottwald, M. Richter, P.-S. Shaw, Z. Li, U. Arp

Bilateral NIST–PTB comparison of spectral responsivity in the VUV

Metrologia 48, 02001 (2011)

S. Granato, R. Andritschke, J. Elbs, N. Meidinger, L. Striider, G. Weidenspointner, M. Krumrey and F. Scholze

The spectral redistribution function of eROSITA PNCCDs

IEEE Nuclear Science Symposium Conference Record N8-2, 122-128 (2011)

M.-A. Henn, H. Gross, F. Scholze, C. Elster, M. Bär

Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelyhood estimation

SPIE 8083, 80830N (2011)

A. Jordan-Gehrkes, E. Buhr, T. Klein, C.G. Frase, M. Krumrey, Th. Dziomba, A. Nowak, V. Ebert

Messverfahren für Größe und Anzahl von Nanopartikeln

PTB-Mitteilungen 121, 109-117 (2011)

A. Kato, F. Scholze

Effect of line roughness on the diffraction intensities in angular resolved scatterometry

Appl. Opt. 49, 6102-6110 (2011)

A. Kato and F. Scholze

The effect of line roughness on the diffraction intensities in angular resolved scatterometry

SPIE 8083, 80830K (2011)

R. Klein, A. Gottwald, G. Brandt, R. Fliegauf, A. Hoehl, U. Kroth, H. Kaser, M. Richter, R. Thornagel and G. Ulm

Radiometric comparison of the primary source standard "Metrology Light Source" to a primary detector standard

Metrologia 48, 219-225 (2011)

R. Klein, R. Thornagel, G. Ulm, J. Feikes, G. Wüstefeld

Status of the Metrology Light Source

Elspec 184, 331-334 (2011)

R. Klein, G. Brandt, R. Thornagel, J. Feikes, M. Ries, G. Wüstefeld

Accurate electron beam size measurement at the Metrology Light Source

Proc. IPA2011, 1165 (2011)

M. Krämer, R. Dietsch, Th. Holz, D. Weißbach, G. Falkenberg, R. Simon, U. Fittschen, T. Krugmann, M. Kolbe, M. Müller , B. Beckhoff

Ultrathin layer depositions - a new type of reference samples for high performance XRF analysis

Adv X Ray Anal [CD-ROM] 54, 299-304 (2011)

M. Krumrey, G. Gleber, F. Scholze and J. Wernecke

Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology

Meas. Sci. Technol. 22, 094032 (6pp) (2011)

T. Leitner, A.A. Sorokin, J. Gaudin, H. Kaser, U. Kroth, K. Tiedtke, M. Richter, Ph. Wernet

Shot-to-shot and average absolute photon flux measurements of a femtosecond laser high-order harmonic photon source

New J. Phys. 13, 093003 (2011)

L. Lobo, B. Fernandez, R. Pereiro, N. Bordel, E. Demenev, D. Giubertoni, M. Bersani, P. Hönicke, B. Beckhoff, A. Sanz-Medel

Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS

J. Anal. At. Spectrom. 26, 542-549 (2011)

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, G. Wüstefeld

The Metrology Light Source of PTB - a Source for THz Radiation

J Infrared Milli Terahz Waves 32, 742-753 (2011)

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, G. Wüstefeld

THz studies at a dedicated beamline at the MLS

Proc. of IPAC2011, 2933 (2011)

P. Probst, A. Scheuring, S. Wünsch, K. Il’in, M. Siegel, A. Semenov, H.-W. Hübers, V. Judin, A.-S. Müller, A. Hoehl, R. Müller, G. Ulm

YBa₂Cu₃O_7-δ hot-electron bolometers for fast time-domain analysis of THz synchrotron radiation

Appl. Phys. Lett 98, 043504 (2011)

F. Reinhardt, J. Osán, S. Török, A. E. Pap, M. Kolbe and B. Beckhoff

Reference-free quantification of particle-like surface contaminations by grazing incidence X-ray fluorescence analysis

The Royal Society of Chemistry 2011 (2011), ISSN: 0267-9477 (print); 1364-5544 (online);   http://pubs.rsc.org | doi:10.1039/C2JA10286B

M. Richter

Atomic plasma excitations in the field of a soft x-ray laser

J. Phys. B 44, 075601 (2011)

F. Scholze, B. Bodermann, H. Groß, A. Kato, M. Wurm

First step towards traceability in scatterometry

Proc. SPIE 7985, 7985G-1 (2011)

F. Scholze, A. Kato, C. Laubis

Characterization of nano-structured surfaces by EUV scatterometry

J. Phys. Conf. Ser. 311, 012006 (2011)

F. Scholze, A. Kato, J. Wernecke and M. Krumrey

EUV and X-ray scattering methods for CD and roughness measurement

SPIE 8166, 81661P (2011)

L. Shi, S. Nihtianov, F. Scholze, A. Gottwald, L.K. Nanver

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

SPIE 8145, 81450N (2011)

S. Sioncke, H. C. Lin, L. Nyns, G. Brammertz, A. Delabie, T. Conard, A. Franquet, J. Rip, H. Struyf, S. De Gendt, M. Müller, B. Beckhoff, and M. Caymax

S-passivation of the Ge gate stack: Tuning the gate stack properties by changing the atomic layer deposition oxidant precursor

J. Appl. Phys. 110, 084907-1 (2011); American Institute of Physics, ISSN: 0021-8979;   http://dx.doi.org/10.1063/1.3622514

D. Sokaras, A. G. Kochur, M. Müller, M. Kolbe, B. Beckhoff, M. Mantler, Ch. Zarkadas, M. Andrianis, A. Lagoyannis, and A. G. Karydas

Cascade L-shell soft-x-ray emission as incident x-ray photons are tuned across the 1s ionization threshold

Physical Review 83, 052511-1 (2011); American Physical Society, ISSN: 1050-2947;   http://dx.doi.org/10.1103/PhysRevA.83.052511

R. Unterumsberger, B. Pollakowski, M. Müller, B. Beckhoff

Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions

Anal. Chem. 83, 8623-8628 (2011)

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2010

M.D. Ackermann, M.J. Collon, C.P. Jensen, F.E. Christensen, M. Krumrey, L. Cibik, S. Marggraf, M. Bavdaz, D. Lumb, B. Shortt

Performance of multilayer coated silicon pore optics

Proc. SPIE 7732, 77323U (2010)

O. Baake, P.S. Hoffmann, M.L. Kosinova, A. Klein, B. Pollakowski, B. Beckhoff , N.I. Fainer, V.A. Trunova, W. Ensinger

Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane

Anal. Bioanal. Chem. (2010)

P. Becker, H. Bettin, M. Borys, I. Busch, K. Fujii, M. Gray, M. Krumrey, U. Kuetgens, G. Mana, P. Manson, E. Massa, A. Nicolaus, A. Picard, D. Schiel and S.Valkiers

Status of the N_A determination by counting atoms in silicon crystals

Proc. CPEM, 107-108 (2010)

B. Beckhoff, M. Kolbe, M. Müller, J. Weser, M. Mantler, D. Rammlmair, A. Wittenberg

Reference-Free XRF - soft X-ray experiments and grain size effects

Proc. ESA Workshop (CD) ESA SP-687 (2010)

N. Berrah, J. Bozek, J.T. Costell, S. Düsterer, L. Fang, J. Feldhaus, H. Fukuzawa, M. Hoener, Y.H. Jiang, P. Johnsson, E.T. Kennedy, M. Meyer, R. Moshammer, P. Radcliffe, M. Richter, A. Rouzée, A. Rudenko, A.A. Sorokin, K. Tiedtke, K. Ueda, J. Ullrich and M.J.J. Vrakking

Non-linear processes in the interaction of atoms and molecules with intense EUV and X-ray fields from SASE free electron lasers (FELs)

Journal of Modern Optics 57, 1015-1040 (2010)

F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, M. Richter, U. Kroth, A. Gottwald

Experimental determination of optical constants of MgF₂ and AlF₃ thin films in the vacuum ultra-violet wavelength region (60–124 nm), and its application to optical designs

Opt. Commun. 283, 1351-1358 (2010)

I. Busch, P. Fuchs, M. Krumrey and U. Kuetgens

Comparative surface investigations at spherical Si surfaces using optical and X-ray techniques

Proc. CPEM, 494-495 (2010)

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, E. Wille, K. Wallace, M.O. Riekerink, B. Lansdorp, L. de Vrede, C. van Baren, P. Müller, M. Krumrey, M. Freyberg

Silicon Pore X-ray Optics for IXO

Proc. SPIE 7732, 77321F (2010)

S. Ebermayer, R. Andritschke, J. Elbs, N. Meidinger, L. Strüder, R. Hartmann, A. Gottwald, M. Krumrey and F. Scholze

Quantum efficiency measurements of eROSITA pnCCDs

Proc. SPIE 7742, 77420U (2010)

D. Giubertoni, E. Iacob, P. Hönicke, B. Beckhoff, G. Pepponi, S. Gennaro, M. Bersani

Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence

J. Vac. Sci. Technol. B 28, C1C84-89 (2010)

G. Gleber, L. Cibik, S. Haas, A. Hoell, P. Müller and M. Krumrey

Traceable size determination of PMMA nanoparticles based on Small Angle X-ray Scattering (SAXS)

J. Phys. Conf. Ser. 247, 012027 (2010)

A. Gottwald, U. Kroth, M. Richter, H. Schöppe, G. Ulm

Ultraviolet and vacuum-ultraviolet detector-based radiometry at the Metrology Light Source

Meas. Sci. Technol. 21, 125101 (2010)

P. Hönicke, B. Beckhoff, M. Kolbe, D. Giubertoni, J. van den Berg, G. Pepponi

Depth profile characterisation of ultra shallow junction implants

Anal. Bioanal. Chem. 396, 2825-2832 (2010)

A. Kato, F. Scholze

The effect of line roughness on the reconstruction of line profiles for EUV masks from EUV scatterometry

Proc. SPIE 7636, 763621 (2010)

M. Kato, N. Saito, K. Tiedtke, P.e N Juranic, A.A. Sorokin, M. Richter, Y. Morishita, T. Tanaka, U. Jastrow, U. Kroth, H. Schöppe, M. Nagasono, M. Yabashi, K. Tono, T. Togashi, H. Kimura, H. Ohashi and T. Ishikawa

Measurement of the single-shot pulse energy of a free electron laser using a cryogenic radiometer

Metrologia 47, 518-521 (2010)

R. Klein, G. Ulm, J. Feikes, M. v. Hartrott and G. Wüstefeld

Status of the Metrology Light Source

AIP Conf. Proc. 1234, 543-546 (2010)

R. Klein, R. Thornagel and G. Ulm

From single photons to milliwatt radiant power - electron storage rings as radiation sources with a high dynamic range

Metrologia 47, R33 (2010)

M. Kolbe, B. Beckhoff, M. Mantler

Reference-Free XRF - principle, calibrated instrumentation and spectra deconvolution

Proc. ESA Workshop (CD) ESA SP-687 (2010)

C. Koschitzki, A. Hoehl, R. Klein, R. Thornagel, J. Feikes, M. Hartrott, G. Wüstefeld

Highly sensitive beam size monitor for pA currents at the MLS electron storage ring

Proc. IPAC10, 894-896 (2010)

M. Krämer, K. Roodenko, B. Pollakowski, K. Hinrichs, J. Rappich, N. Esser, A. v. Bohlen, R. Hergenröder

Combined ellipsometry and X-ray related techniques for studies of ultrathin organic nanocomposite films

Thin Solid Films 518, 5509 (2010)

M. Krumrey, L. Cibik and P. Müller

High-accuracy X-ray detector calibration based on cryogenic radiometry

AIP Conf. Proc. 1234, 826-829 (2010)

M. Krumrey, L. Cibik, P. Müller, M. Bavdaz, E. Wille, M. Ackermann, M.J. Collon

X-ray pencil beam facility for optics characterization

Proc. SPIE 7732, 77324O (2010)

C. Laubis, A. Kampe, C. Buchholz, A. Fischer, J. Puls, C. Stadelhoff, F. Scholze

Characterization of the polarization properties of PTB’s EUV reflectometry system

Proc. SPIE 7636, 76362R (2010)

M. Letz, A. Gottwald, M. Richter, V. Libermann, L. Parthier

Temperature-dependent Urbach tail measurements of luthetium aluminum garnet single crystals

Phys. Rev. B 81, 155109 (2010)

M. Mantler, B. Beckhoff, M. Kolbe & D. Sokaras.

Reference-Free XRF: Mathematical models of quantitative analysis

Proc. ESA Workshop (CD) ESA SP-687 (2010)

R. Mitzner, B. Siemer, S. Roling, M. Wöstmann, T. Noll, F. Siewert, A.A. Sorokin, M. Richter, K. Tiedtke and H. Zacharias

A new soft x-ray autocorrelator - direct evaluation of the temporal properties of FEL pulses at 24 nm

AIP Conf. Proc. 1234, 19-22 (2010)

M. Müller

Hochauflösende Röntgenemissionsspektrometrie im Spektralbereich weicher Röntgenstrahlung

Dissertation (2010)

R. Müller, A. Hoehl, R. Klein, A. Serdyukov, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, G. Wüstefeld

IR and THz activities at the Metrology Light Source

AIP Conf. Proc. 1214, 32-35 (2010)

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, G. Wüstefeld

THz activities at the MLS

Proc. of IRMMW-THz2010 (2010)

R. Müller, A. Hoehl, R. Klein, A. Serdyukov, G. Ulm, J. Feikes, M. v. Hartrott, G. Wüstefeld

THz-Strahlung an der MLS – dem Elektronenspeicherring der PTB

PTB-Mitt. 120, 229-235 (2010)

M. Pagels, F. Reinhardt, B. Pollakowski, M. Roczen, C. Becker, K. Lips, B. Rech, B. Kanngießer, B. Beckhoff

GIXRF–NEXAFS investigations on buried ZnO/Si interfaces: A first insight in changes of chemical states due to annealing of the specimen

Nucl. Instr. and Meth. B 268, 370-373 (2010)

G. Pepponi, D. Giubertoni, M. Bersani, F. Meirer, D. Ingerle, G. Steinhauser, C. Streli, P. Hönicke, B. Beckhoff

Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon

J. Vac. Sci. Technol. B 28, C1C59-64 (2010)

V. Richardson, J.T. Costello, D. Cubaynes, S. Düsterer, J. Feldhaus, H.W. van der Hart, P. Juranić, W.B. Li, M. Meyer, M. Richter, A.A. Sorokin, and K. Tiedke

Two-Photon Inner-Shell Ionization in the Extreme Ultraviolet

Phys. Rev. Lett. 105, 013001 (2010)

M. Richter, S.V. Bobashev, A.A. Sorokin, K. Tiedtke

Multiphoton ionization of atoms with soft x-ray pulses

J. Phys. B: At. Mol. Opt. Phys. 43, 194005 (2010)

M. Richter, E. Welter

Grundlagen der Absorptionsspektroskopie

Forschung mit Synchrotronstrahlung, 157-172 (2010), edited by: J. Falta, T. Möller; Vieweg und Teubner

Norio Saito, Pavle N Juranic, Masahiro Kato, Mathias Richter, Andrey A Sorokin, Kai Tiedtke, Ulf Jastrow, Udo Kroth, Hendrik Schöppe, Mitsuru Nagasono, Makina Yabashi, Kensuke Tono, Tadashi Togashi, Hiroaki Kimura, Haruhiko Ohashi and Tetsuya Ishikawa

Radiometric comparison for measuring the absolute radiant power of a free-electron laser in the extreme ultraviolet

Metrologia 47, 21-23 (2010)

F. Scholze, R. Vest and T. Saito

Report on the CCPR Pilot Comparison: Spectral Responsivity 10 nm to 20 nm

Metrologia 47, 02001 (2010)

S. Sioncke, H.C. Lin, C. Adelmann, G. Brammertz, A. Delabie, A. Conard, A. Franquet, M. Caymax, M. Meuris, H. Struyf, S. DeGendt, M. Heyns, C. Fleischmann, K. Temst, A. Vantomme, M. Müller, M. Kolbe, B. Beckhoff

ALD on high mobility channels: engineering the proper gate stack passivation

ECS Transactions 33, 9-23 (2010)

D. Sokaras, M. Müller, M. Kolbe, B. Beckhoff, Ch. Zarkadas, and A.G. Karydas

Resonant Raman scattering of polarized and unpolarized x-ray radiation from Mg, Al, and Si

Phys. Rev. A 81, 012703 (2010)

M. Störmer, C. Horstmann, F. Siewert, F. Scholze, M. Krumrey, F. Hertlein, M. Matiaske, J. Wiesmann and J. Gaudin

Single-layer and multilayer mirrors for advanced research light sources

AIP Conf. Proc. 1234, 756-759 (2010)

C. Streeck, B. Beckhoff, F. Reinhardt, M. Kolbe, B. Kanngießer, C.A. Kaufmann, H.W. Schock

Elemental depth profiling of Cu(In,Ga)Se₂ thin films by reference-free grazing incidence X-ray fluorescence analysis

Nucl. Instr. and Meth. B 268, 277-281 (2010)

G. Wüstefeld, J. Feikes, M. v. Hatrott, M. Ries, A. Hoehl, R. Klein, R. Müller, A. Serdyukov, G. Ulm

Coherent THz measurements at the Metrology Light Source

Proc. IPAC10, 2508 (2010)

J.C. Zwinkels, E. Ikonen, N.P. Fox, G. Ulm and M.L. Rastello

Photometry, radiometry and ‘the candela’: evolution in the classical and quantum world

Metrologia 47, R15 (2010)

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2009

M.D. Ackermann, M.J. Collon, R. Günther, R. Partpsing, G. Vacanti, E.-J. Buis, M. Krumrey, P. Müller, M.W. Beijersbergen, M. Bavdaz, K. Wallace

Performance prediction and measurement of Silicon Pore Optics

Proc. SPIE 7437, 74371N (2009)

O. Baake, N.I. Fainer, P. Hoffmann, M.L. Kosinova, Yu.M. Rumyantsev, V.A. Trunova, A. Klein, W. Ensinger, B. Pollakowski, B. Beckhoff, G. Ulm

Chemical characterization of SiC_xN_y nanolayers by FTIR- and Raman spectroscopy, XPS and TXRF-NEXAFS

Nucl. Instrum. Meth. A 603, 174-177 (2009)

Olaf Baake, Peter S. Hoffmann, Stefan Flege, Hugo M. Ortner, Sebastian Gottschalk, Wolfram Berky, Adam G. Balogh, Wolfgang Ensinger, Burkhard Beckhoff, Michael Kolbe, Martin Gerlach, Beatrix Pollakowski, Jan Weser, Gerhard Ulm, Michael Haschke, Elena Blokhina, Markus Peter, Dominique Porta, Martin Heck

Nondestructive characterization of nanoscale layered samples

Anal. Bioanal. Chem. 393, 623-634 (2009)

O. Baake, P.S. Hoffmann, A. Klein, B. Pollakowski, B. Beckhoff, W. Ensinger, M. Kosinova, N. Fainer, V.S. Sulyaeva and V. Trunova

Chemical character of BC_xN_y layers grown by CVD with trimethylamine borane

X-Ray Spectrom. 38, 68-73 (2009)

O. Baake, P.S. Hoffmann, A. Klein, B. Pollakowski, B. Beckhoff, M.L. Kosinova, N.I. Fainer, V.S. Sulyaeva, V.A. Trunova, W. Ensinger

Speciation of BCxNy films grown by PECVD with trimethylborazine precursor

Anal. Bioanal. Chem. 395, 1901 (2009)

J. Bahrdt, J. Feikes, W. Frentrup, A. Gaupp, M. v. Hartrott, M. Scheer, G. Wüstefeld, G. Ulm, J. Kuhnhenn

Cherenkov fibers for beam diagnostics at the Metrology Light Source

Proc. PAC09, 1159-1161 (2009)

B. Beckhoff, A. Nutsch, R. Altmann, G. Borionetti, C. Pello, M.L. Polgnano, D. Codegoni, S. Grasso, E. Cazzini, M. Bersani, P. Lazzeri, S. Gennaro, M. Kolbe, M. Müller, P. Kregsamer, F. Posch

Highly sensitive detection of inorganic contamination

Solid State Phenomena 145-146, 101-104 (2009)

B. Beckhoff, A. Gottwald, R. Klein, M. Krumrey, R. Müller, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

A quarter-century of metrology using synchrotron radiation by PTB in Berlin

Phys. Status Solidi B 246, 1415-1434 (2009)

B. Beckhoff, A. Nutsch, R. Altmann, G. Borionetti, C. Pello, M.L. Polignano, D. Codegoni, S. Grasso, E. Cazzini, M. Bersani, S. Gennaro, M. Kolbe, M. Müller, P. Kregsamer, F. Posch

Assessing various analytical techniques with different lateral resolution by investigating Spin-coated inorganic contamination on Si wafer surfaces

ECS Transactions 25, 311-323 (2009)

B. Beckhoff, P. Hönicke, D. Giubertoni, G. Pepponi, M. Bersani

GIXRF in the soft X-ray range used for the characterization of ultra shallow junctions

AIP Conf. Proc. 1173, 29-33 (2009)

B. Beckhoff, R. Fliegauf, P. Hönicke, M. Kolbe, M. Müller, B. Pollakowski, F. Reinhardt, J. Weser, and G. Ulm

Reference-free characterizazion of semiconductor surface contamination and nanolayers by X-ray spectrometry

AIP Conf. Proc. 1173, 198-202 (2009)

A. BenMoussa, A. Soltani, U. Schühle, K. Haenen, Y.M. Chong, W.J. Zang, R. Dahal, J.Y. Lin, H.X. Jiang, H.A. Barkad, B. BenMoussa, D. Bolsee, C. Hermans, U. Kroth, C. Laubis, V. Mortet, J.C. De Jaeger, B. Giordanengo, M. Richter, F. Scholze, J.F. Hochedez

Recent developments of wide-bandgap semiconductor based UV sensors

Diamond & Related Materials 18, 860-864 (2009)

A. BenMoussa, I.E. Dammasch, J.-F. Hochedez, U. Schuehle, S. Koller, Y. Stockman, F. Scholze, M. Richter, U. Kroth, C. Laubis, M. Dominique, M. Kretzschmar, S. Mekaoui, S. Gissot, A. Theissen, B. Giordanengo, D. Bolsee, C. Hermans, D. Gillotay, J.-M. Defise, and W. Schmutz

Pre-flight calibration of LYRA, the solar VUV radiometer on board PROBA2

Astronomy & Astrophysics 508, 1085-1094 (2009)

J.A. van den Berg, M.A. Reading, A. Parisini, M. Kolbe, B. Beckhoff, S. Ladas, M. Fried, P. Petrik, P. Bailey, T. Noakes, T. Conard and S. de Gendt

High resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

ECS Transactions 25, 349-361 (2009)

E. Bissaldi, A. von Kienlin, G. Lichti, H. Steinle, P.N. Bhat, M.S. Briggs, G.J. Fishman, A.S. Hoover, R.M. Kippen, M. Krumrey, M. Gerlach, V. Connaughton, R. Diehl, J. Greiner, A.J. van der Horst, C. Kouveliotou, S. McBreen, C.A. Meegan, W.S. Paciesas, R.D. Preece, C.A. Wilson-Hodge

Ground-based calibration and characterization of the Fermi gamma-ray burst monitor detectors

Exp Astron 24, 47-88 (2009)

B. Bodermann, M. Wurm, A. Diener, F. Scholze, H. Groß

EUV and DUV scatterometry for CD and edge profile metrology on EUV masks

GMM-Fachbericht [CD-ROM] 59 (2009)

B. Bodermann, M. Wurm, A. Diener, F. Scholze, H. Groß

EUV and DUV scatterometry for CD and edge profile metrology on EUV

Proc. SPIE 7470, 74700F-1 (2009)

Christoph Bostedt, Henry N. Chapman, John T. Costello, José R. CrespoLópez-Urrutia, Stefan Düsterer, Sascha W. Epp, Josef Feldhaus, Alexander Föhlisch, Michael Meyer, Thomas Möller, Robert Moshammer, Mathias Richter, Klaus Sokolowski-Tinten, Andrei Sorokin, Kai Tiedtke, Joachim Ullrich, Wilfried Wurth

Experiments at FLASH

Nucl. Instrum. Meth. A 601, 108-122 (2009)

Ingo Busch, Hans Danzebrink, Michael Krumrey, Michael Borys, Horst Bettin

Oxide layer mass determination at the silicon shere of the Avogadro project

IEEE Transactions on Instrumentation and Measurement 58, 891-896 (2009)

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, C. Kelly, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M.O. Riekerink, P. Müller, M. Krumrey

Stacking of Silicon Pore Optics for IXO

Proc. SPIE 7437, 74371A (2009)

B. Ewers, A. Kupsch, A. Lange, B.R. Müller, A. Hoehl, R. Müller, G. Ulm

Terahertz Spectral Computed Tomography

Proc. of the 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2, 138-139 (2009)

J. Feikes, M. v. Hartrott, A. Hoehl, R. Klein, R. Müller, G. Ulm, G. Wüstefeld

Low Alpha Operation at the MLS Storage Ring

Proc. of PAC09, 1093-1095 (2009)

C. Fleischmann, S. Sioncke, K. Schouteden, K. Paredis, B. Beckhoff, M. Müller, M. Kolbe, M. Meuris, C. Van Haesendonck, K. Temst, and A. Vantomme

Investigations of the Surface Composition and Atomic Structure of ex-situ Sulfur Passivated Ge(100)

ECS Transactions 25, 421-432 (2009)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, G. Ulm

Comparison of scattering experiments using synchrotron radiation with Monte Carlo simulations using Geant4

Nucl. Instrum. Meth. A 608, 339-343 (2009)

D. Giubertoni, G. Pepponi, B. Beckhoff, P. Hoenicke, S. Gennaro, F. Meirer, D. Ingerle, G. Steinhauser, M. Fried, P. Petrik, A. Parisini, M.A. Reading, C. Streli, J.A. van den Berg and M. Bersani

Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium

AIP Conf. Proc. 1173, 45-49 (2009)

H. Gross, F. Scholze, A. Rathsfeld and M. Bär

Evaluation of measurement uncertainties in EUV scatterometry

Proc. SPIE 7390, 73900T (2009)

H. Gross, A. Rathsfeld, F. Scholze, M. Bär

Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates

Meas. Sci. Technol. 20, 105102 (2009)

H. Gross, A. Rathsfeld, F. Scholze, M. Bär

Impact of model uncertainties to the reconstruction of surface profiles in scatterometry

Proc. XIX IMEKO World Congress, Fundamental and Applied Metrology [online], 2453-2456 (2009)

C.P. Jensen, M. Ackermann, F.E. Christensen, M.J. Collon, M. Krumrey

Coating of silicon pore optics

Proc. SPIE 7437, 743713 (2009)

G. Jost, T. Mensing, S. Golfier, R. Lawaczeck, H. Pietsch, J. Hütter, L. Cibik, M. Gerlach, M. Krumrey, D. Fratzscher, V. Arkadiev, R. Wedell, M. Haschke, N. Langhoff, P. Wust, L. Lüdemann

Photoelectric-enhanced radiation therapy with quasi-monochromatic computed tomography

Med. Phys. 36, 2107-2117 (2009)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, G. Ulm

The Metrology Light Source operated as a primary source standard

Metrologia 46, S266-S271 (2009)

R. Klein, D. Raubert, R. Thornagel, J. Hollandt and G. Ulm

Radiometric comparison of the primary synchrotron radiation source standard Metrology Light Source with calibrated filter radiometers in the visible and NIR spectral range

Metrologia 46, 359-366 (2009)

M. Kolbe, B. Beckhoff, M. Krumrey, M. Reading, J. van den Berg, T. Conard and S. De Gendt

Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

ECS Transactions 25, 293-300 (2009)

M. Krumrey

Comments on Determination of X-ray flux using silicon pin diodes by R. L. Owen et al. (2009)

Journal of Synchrotron Radiation 16, 690 (2009)

C. Laubis, F. Scholze, C. Buchholz, A. Fischer, S. Hesse, A. Kampe, J. Puls, C. Stadelhoff and G. Ulm

High accuracy EUV reflectometry at large optical components and oblique incidence

Proc. SPIE 7271, 72713Y-1 (2009)

T. Lauf, F. Aschauer, S. Herrmann, M. Hilchenbach, M. Krumrey, P. Lechner, G. Lutz, P. Majewski, M. Porro, R.H. Richter, F. Scholze, L. Strueder, J. Treis, G. de Vita

Performance and spectroscopic behaviour of DePFET macropixels

IEEE Nuclear Science Symposium Conference Record N24-5, 1202 (2009)

H. Legall, H. Stiel, M. Schnürer, M. Pagels, B. Kanngießer, M. Müller, B. Beckhoff, I. Grigorieva, A. Antonov, V. Arkadiev and A. Bjeoumikhov

An efficient X-ray spectrometer based on thin mosaic crystal films and its application in various fields of X-ray spectroscopy

J. Appl. Cryst. 42, 572-579 (2009)

M. Letz, A. Gottwald, M. Richter, and L. Parthier

Temperatur-dependent Urbach tail measurements of CaF₂ single crystals

Phys. Rev. B 79, 195112 (2009)

Martin Lommel, Philipp Hönicke, Michael Kolbe, Matthias Müller, Falk Reinhardt, Pit Möbus, Eric Mankel, Burkhard Beckhoff, Bernd O. Kolbesen

Preparation and characterization of self-assembled monolayers on germanium surfaces

Solid State Phenomena 145-146, 169-172 (2009)

M. Lommel, F. Reinhardt, P. Hönicke, M. Kolbe, M. Müller, B. Beckhoff, B.O. Kolbesen

A comparison between self-assembled monolayers on gold and germanium employing grazing incidence X-ray absorption spectrometry GIXRF-NEXAFS

ECS Transactions 25, 433-439 (2009)

M. Lommel, F. Reinhardt, M. Kolbe, B. Beckhoff, M. Müller, P. Hönicke

Characterisation of Self-Assembled Monolayers on Germanium Surfaces via NEXAFS

ECS Transactions 19, 227-234 (2009)

M. Martins, M. Wellhöfer, A.A. Sorokin, M. Richter, K. Tiedtke, W. Wurth

Resonant multiphoton processes in the soft x-ray regime

Phys. Rev. A 80, 023411 (2009)

B. Michel, M. Giza, M. Krumrey, M. Eichler, G. Grundmeier, and C.-P. Klages

Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning and oxidation

J. Appl. Phys. 105, 073302-1 (2009)

R. Mitzner, A.A. Sorokin, B. Siemer, S. Roling, M. Rutkowski, H. Zacharias, M. Neeb, T. Noll, F. Siewert, W. Eberhardt, M. Richter, P. Juranic, K. Tiedtke, J. Feldhaus

Direct autocorrelation of soft-x-ray free-electron-laser pulses by time-resolved two-photon double ionization of He

Phys. Rev. A 80, 025402 (2009)

M. Müller, B. Beckhoff, R. Fliegauf, and B. Kanngießer

Nickel LIII fluorescence and satellite transition probabilities determined with an alternative methodology for soft-x-ray emission spectrometry

Phys. Rev. A 79, 032503 (2009)

R. Müller, A. Bawagan, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, G. Wüstefeld

First results in the IR and THz spectral range at the Metrology Light Source

OPTO 2009 Proc., 93-97 (2009)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, G. Wüstefeld

First measurements at the new dedicated THz beamline at the MLS

Proc. of the 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2, 158-160 (2009)

R. Müller, A. Bawagan, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, G. Wüstefeld

Characterization of MLS THz radiation at a dedicated beamline

Proc. of PAC09, 2288-2290 (2009)

A.-S. Müller, I. Birkel, E. Huttel, Y.-L. Mathis, N. Smale, H.-W. Hübers, A. Semenov, J. Feikes, M. v. Hartrott, G. Wüstefeld, R. Klein, R. Müller, G. Ulm, E. Bründermann, T. Bückle, M. Fitterer, S. Hillenbrand, N. Hiller, A. Hofmann, V. Judin, M. Klein, S. Marsching, K.G. Sonnad

Observation of coherent THz radiation from the ANKA and MLS storage rings with a Hot Electron Bolometer

Proc. of PAC09, 1153-1155 (2009)

A. Nutsch, B. Beckhoff, R. Altmann, J.A. Van Den Berg, D. Guibertoni, P. Hönicke, M. Bersani, A. Leibold, F. Meirer, M. Müller, G. Pepponi, M. Otto, P. Petrik, M. Reading, L. Pfitzner, H. Ryssel

Complementary metrology within a European joint laboratory

Solid State Phenomena 145-146, 97-100 (2009)

A. Nutsch, B. Beckhoff, R. Altmann, M.L. Polignano, E. Cazzini, D. Codegoni, G. Borionetti, M. Kolbe, M. Müller, C. Mantler, C. Streli, P. Kregsamer

Comparability of TXRF Systems at Different Laboratories

ECS Transactions 25, 325-335 (2009)

A. Nutsch, B. Beckhoff, G. Bedana, G. Borionetti, D. Codegoni, S. Grasso, G. Guerinoni, A. Leibold, M. Müller, M. Otto, L. Pfitzner, M.-L. Poligano, D. De Simone, L. Frey

Characterization of organic contamination in Semiconductor Manufactoring Processes

AIP Conf. Proc. 1173, 23-28 (2009)

J. Osan, F. Reinhardt, B. Beckhoff, A.E. Pap, and S. Török

Probing Patterned Wafer Structures by Means of Grazing Incidence X-ray

ECS Transactions 25, 441-451 (2009)

F. Reinhardt, B. Beckhoff, H. Eba, B. Kanngießer, M. Kolbe, M. Mizusawa, M. Müller, B. Pollakowski, K. Sakurai, and G. Ulm

Evaluation of High-Resolution X-ray Absorption and Emission Spectroscopy for the Chemical Speciation of Binary Titanum Compounds

Anal. Chem. 81, 1770-1776 (2009)

M. Richter, M.Ya. Amusia, S.V. Bobashev, T. Feigl, P.N. Juranic, M. Martins, A.A. Sorokin, K. Tiedtke

Extreme Ultraviolet Laser Excites Atomic Giant Resonance

Phys. Rev. Lett. 102, 163002 (2009)

F. Scholze and M. Procop

Modelling the response function of energy dispersive X-ray spectrometers with silicon detectors

X-Ray Spectrom. 38, 312-321 (2009)

M.P. Seah, W.E.S. Unger, Hai Wang, W. Jordaan, Th. Gross, J.A. Dura, Dae Won Moon, P. Totarong, M. Krumrey, R. Hauert and Mo Zhiquiang

Ultra-thin SiO₂ on Si IX: absolute measurements of the amount of silicon oxide as a thickness of SiO₂ on Si

Surf. Interface Anal. 41, 430-439 (2009)

L. Shi, F. Sarubbi, S. N. Nihtianov, L. K. Nanver, T. L. M. Scholtes and F. Scholze

High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application

Proc. IECON, 1891-1896 (2009)

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2008

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser and G. Ulm

X-ray spectrometry for wafer contamination analysis and speciation as well as for reference-free nanolayer characterization

Solid State Phenomena 134, 277-280 (2008)

B. Beckhoff

Reference-free X-ray spectrometry based on metrology using synchrotron radiation

J. Anal. At. Spectrom. 23, 845-853 (2008)

B. Beckhoff, M. Kolbe, O. Hahn, A.G. Karydas, Ch. Zarkadas, D. Sokaras and M. Mantler

Reference-free x-ray fluorescence analysis of an ancient Chinese ceramic

X-Ray Spectrom. 37, 462-465 (2008)

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser and G. Ulm

X-ray spectrometry for wafer contamination analysis and speciation as well as for reference-free nanolayer characterization

Solid State Phenomena 134, 277-280 (2008)

A. BenMoussa, J.F. Hochedez, R. Dehal, J. Li, J.Y. Li, H.X. Jiang, A. Soltani, J.-C. De Jaeger, U. Kroth, M. Richter

Characterization of AIN metal-semiconductor-metal diodes in the spectral range of 44-360 nm: Photoemission assessments

Appl. Phys. Lett. 92, 022108 (2008)

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H.A. Barkad, D. Bolsee, C. Hermans, M. Richter, J.C. De Jaeger and J.F. Hochedez

New developments on diamond photodetector for VUV solar observations

Semicond. Sci. Technol. 23, 035026 (2008)

B. Bodermann, E. Buhr, G. Ehret, F. Scholze, M. Wurm

Optical metrology of micro- and nanostructures at PTB: Status and future developments

Proc. SPIE 7155, 71550V-1 (2008)

M. J. Collon, R. Günther, M. Ackermann, E.J. Buis, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M. Freyberg and M. Krumrey

Performance of Silicon Pore Optics

Proc. SPIE 7011, 70111E (2008)

P. Colombi, D. K. Agnihotri, V.E. Asadchikov, E. Bontempi, D.K. Bowen, C.-H. Chang, L. E. Depero, M. Farnworth, T. Fujimoto, A. Gibaud, M. Jergel, M. Krumrey, T. A. Lafford, A. Lamperti, T. Ma, R. J. Matyi, M. Meduna, S. Milita, K. Sakurai, L. Shabelnikov, A. Ulyanenkov, A. Van der Lee and C. Wieme

Reproducibility in X-ray reflectometry: results from the first world-wide round robin experiment

J. Appl. Cryst. 41, 143-152 (2008)

T. Conard, S. List, M. Claes and B. Beckhoff

Advanced Metrologies for Cleans Characterization: ARXPS, GIXF and NEXAFS

Solid State Phenomena 134, 281-284 (2008)

J. Feikes, M. Abo-Bakr, K. Bürkmann-Gehrlein, M. v. Hartrott, J. Rahn, G. Wüstefeld, R. Klein, G. Ulm

Commissioning and Operation of the Metrology Light Source

Proc. of EPAC08, 2010-2012 (2008)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, H. Rabus and G. Ulm

Cryogenic radiometry in the hard x-ray range

Metrologia 45, 577-585 (2008)

H. Gross, A. Rathsfeld, F. Scholze, R. Model, M. Bär

Computational methods estimating uncertainties for profile reconstruction in scatterometry

Proc. SPIE 6995, 69950T-1 (2008)

P. Hönicke, B. Beckhoff, M. Kolbe, S. List, T. Conard, H. Struyff

Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence

Spectrochim. Acta B 63, 1359-1364 (2008)

G. Jost, S. Golfier, R. Lawaczeck, H. Pietsch, H.-J. Weinmann, L. Cibik, M. Gerlach M. Krumrey, V. Arkadiev, D. Fratzscher, M. Haschke, N. Langhoff, R. Wedell, L. Lüdemann and P. Wust

Imaging-Therapy Computed Tomograph with quasi-monochromatic x-rays

Eur. J. Radiol. 68S, S63-S68 (2008)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, G. Ulm, M. Abo-Bakr, K. Bürkmann-Gehrlein, J. Feikes, M. v. Hartrott, K. Holldack, J. Rahn, G. Wüstefeld

Absolute Measurement of the MLS Storage Ring Parameters

Proc. of EPAC08, 2055-2057 (2008)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, G. Ulm, M. Abo-Bakr, J. Feikes, M. v. Hartrott, K. Holldack, and G. Wüstefeld

Operation of the Metrology Light Source as a primary radiation source standard

Phys. Rev. ST Accel. Beams 11, 110701-1 (2008)

T. Kleine-Ostmann, T. Schrader, M. Bieler, U. Siegner, C. Monte, B. Gutschwager, J. Hollandt, A. Steiger, L. Werner, R. Müller, G. Ulm, I. Pupeza and M. Koch

THz Metrology

Frequenz 62, 137-148 (2008)

C. Laubis, F. Scholze, G. Ulm

Metrology in the soft x-ray range - from EUV to the water window

Proc. SPIE 7101, 71011U-1 (2008)

D.H. Lumb, C.P. Jensen, M. Krumrey, L. Cibik, F. Christensen,M. Collon and M. Bavdaz

Low atomic number coating for XEUS silicon pore optics

Proc. SPIE 7011, 70111D (2008)

R.J. Matyi, L.E. Depero, E. Bontempi, P. Colombi, A. Gibaud, M. Jergel, M. Krumrey, T.A. Lafford, A. Lamperti, M. Meduna, A. Van der Lee, C. Wiemer

The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin

Thin Solid Films 516, 7962-7966 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, M. Abo-Bakr, K. Bürkmann-Gehrlein, J. Feikes, M. v. Hartrott, J.S. Lee J. Rahn, U. Schade, G. Wüstefeld

Coherent Synchrotron Radiation at the Metrology Light Source

Proc. of EPAC08, 2058-2060 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, M. Abo-Bakr, J. Feikes, M.v. Hartrott, G. Wüstefeld

First commissioning results in the IR/THz range at the electron storage ring Metrology Light Source

Proc. of IRMMW-THz 2008, Pasadena, Sept 2008 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, G. Wüstefeld

THz radiation from the Metrology Light Source of the PTB

Proc. of the 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2, 278-279 (2008)

A. Owens, B. Beckhoff, G. Fraser, M. Kolbe, M. Krumrey, A. Mantero, M. Mantler, A. Peacock, M.-G. Pia, D. Pullan, U.G. Schneider and G. Ulm

Measuring and interpreting X-ray fluorescence from planetary surfaces

Anal. Chem. 80, 8398-8405 (2008)

B. Pollakowski, B. Beckhoff, F. Reinhardt, S. Braun, and P. Gawlitza

Speciation of deeply buried TiO_x nanolayers with grazing-incidence x-ray fluorescense combined with a near-edge x-ray absorption fine-structure investigation

Phys. Rev. B 77, 235408 (2008)

J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, U. Dersch

Metrology of EUV Masks by EUV Scatterometry and Finite Element Analysis

Proc. of SPIE 7028, 70280P-1 (2008)

M. Richter, S.V. Bobashev, A.A. Sorokin, K. Tiedtke

Nonlinear photoionization in the soft X-ray regime

Appl. Phys. A 92, 473-478 (2008)

M. Richter, S.V. Bobashev, A.A. Sorokin and K. Tiedtke

Photon-matter interaction at short wavelengths and ultra-high intensity - Gas-phase experiments at FLASH

J. Phys. Conf. Series 141, 012014 (2008)

F. Sarubbi, L.K. Nanver, T. Scholtes, S.N. Nihtianov, F. Scholze

Pure boron-doped photodiodes: A solution for radiation detection in EUV lithography

IEEE, 278-281 (2008)

F. Scholze, M. Krumrey

Characterization of nanostructured surfaces using EUV- and X-ray reflectometry

VDI-Berichte 2027, 175-178 (2008)

F. Scholze and C. Laubis

Use of EUV scatterometry for the characterization of line profiles and line roughness on photomasks

EMLC 2008, 374-382 (2008)

F. Scholze, C. Laubis, G. Ulm, U. Dersch, J. Pomplun, S. Burger, F. Schmidt

Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-Simulation

Proc. of SPIE 6921, 69213R-1 (2008)

F. Scholze and C. Laubis

Use of EUV scatterometry for the characterization of line profiles and line roughness on photomasks

SPIE 6792, 67920U (2008)

M. Störmer, C. Horstmann, D. Häussler, E. Spiecker, F. Siewert, F. Scholze, F. Hertlein, W. Jäger, and R. Bormann

Single-layer and multilayer mirrors for current and next-generation light sources

Proc. SPIE 7077, 707705-1 (2008)

K. Tiedtke, J. Feldhaus, U. Hahn, U. Jastrow, T. Nunez, T. Tschentscher, S.V. Bobashev, A.A. Sorokin, J.B. Haastings, S. Müller, L. Cibik, A. Gottwald, A. Hoehl, U. Kroth, M. Krumrey, H. Schöppe, G. Ulm, and M. Richter

Gas detectors for x-ray lasers

J. Appl. Phys. 103, 094511 (2008)

M. Wellhöfer, J.T. Hoeft, M. Martins, W. Wurth, M. Braune, J. Viefhaus, K. Tiedtke and M. Richter

Photoelectron spectroscopy as a non-invasive method to monitor SASE-FEL spectra

JINST 3, P02003 (2008)

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2007

M. Abo-Bakr, P. Budz, K. Bürkmann, I. Churkin, V. Dürr, R.M. Klein, J. Kolbe, D. Krämer, E. Semenov, S. Sinyatkin, A. Steshov, J. Rahn, E. Rouvinskiy, G. Ulm, G. Wüstefeld

The magnets of the Metrology Light Source in Berlin-Adlershof

Nucl. Instr. and Meth. A 575, 42-45 (2007)

M. Abo-Bakr et al.

Commissioning of the Metrology Light Source

Proc. PAC07, 947-949 (2007), ISBN: 1-4244-0917-9

W. Ackermann et al.

Operation of a free-electron laser from the extreme ultraviolet to the water window

Nature Photonics 1, 336-342 (2007)

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, J. Weser, G. Ulm

Reference-free TXRF analysis of semiconductor surfaces with synchrotron radiation

Anal. Chem. 79, 7873-782 (2007)

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser, and G. Ulm

Wafer Contamination Analysis, Speciation and Reference-free Nanolayer Characterization using Synchrotron Radiation based X-Ray Spectrometry

ECS Transactions 10 (1), 51-56 (2007)

B. Beckhoff, R. Fliegauf, P. Hönicke, M. Kolbe, M. Müler, B. Pollakowski, J. Weser, and G. Ulm

Advanced Metrologies for Wafer Contamination and Nanolayer Characterization using XRF Methods

ECS Transactions 11 (3), 273-279 (2007)

G. Brandt, J. Eden, R. Fliegauf, A. Gottwald, A. Hoehl, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, G. Ulm, K. Bürkmann, J. Rahn, G. Wüstefeld

The Metrology Light Source - the new dedicated electron storage ring of PTB

Nucl. Instr. and Meth. B 258, 445-452 (2007)

P. Budz, M. Abo-Bakr, W. Anders, K. Bürkmann, O. Dressler, V. Dürr, J. Feikes, H.G. Hoberg, P. Kuske, R. Lange, J. Rahn, T. Schneegans, D. Schüler, E. Weihreter, G. Wüstefeld, D. Krämer, R. Klein, G. Ulm

Status of the New Metrology Light Source

Proc. of RuPAC 2006, 144-146 (2007)

P. Budz, M. Abo-Bakr, K. Bürkmann, V. Dürr, J. Kolbe, D. Krämer, J. Rahn, G. Wüstefeld, R. Klein, G. Ulm, A. Batrakov, S. Belokrinitskiy, I. Churkin, N. Nefedov, A. Philipchenko, E. Rouvinski, E. Semenov, D. Shichov, S. Sinyatkin, P. Vagin

Multipole Magnets for the Metrology Light Source (PTB, Berlin)

Proc. of RuPAC 2006, 295-297 (2007)

K. Bürkmann, T. Birke, J. Borninkhof, P. Budz, R. Daum, V. Duerr, J. Feikes, W. Gericke, H. Glass, H.G. Hoberg, J. Kolbe, R. Lange, G. Mielczarek, I. Müller, K. Ott, J. Rahn, G. Schindhelm, T. Schneegans, T. Schroeter, D. Schüler, D. Simmering, T. Westphal, R. Klein, G. Ulm

Commissioning of the 100 MeV Racetrack Microtron of the Metrology Light Source

Proc. PAC07, 944-946 (2007), ISBN: 1-4244-0917-9

J.-Ph. Champeaux, Ph. Troussel, B. Villier, V. Vidal, T. Khachroum, B. Vidal and M. Krumrey

Development and realization of non-periodic W/Si multilayer mirrors for 5-14 keV X-ray plasma diagnostic

Nucl. Instr. and Meth. A 581, 687-694 (2007)

M.J. Collon, M.W. Beijersbergen, K. Wallace, M. Bavdaz, R. Fairbend, J. Séguy, E. Schyns, M. Krumrey and M. Freyberg

X-ray imaging glass micro-pore optics

Proc. of SPIE 6688, 668812 (2007)

M.J. Collon, R. Günther, S. Kraft, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M. Krumrey and M. Freyberg

Silicon pore optics for astrophysical X-ray missions

Proc. of SPIE 6688, 668813 (2007)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, G. Ulm

A cryogenic electrical substitution radiometer for hard X-rays

Nucl. Instr. and Meth. A 580, 218-221 (2007)

A. Gottwald, F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, S. Kroth, U. Kroth, W. Paustian, M. Richter, H. Schöppe, and R. Thornagel

Polarization-dependent vacuum-ultraviolet reflectometry using elliptically polarized synchrotron radiation

Appl. Opt. 46, 7797-7804 (2007)

H. Gross, A. Rathsfeld, F. Scholze, M. Bär, U. Dersch

Optimal sets of measurement data for profile reconstruction in scatterometry

Proc. of SPIE 6617, 66171B-1 (2007)

P. Hoffmann, O. Baake, B. Beckhoff, W. Ensinger, N. Fainer, A. Klein, M. Kosinova, B. Pollakowski, V. Trunova, G. Ulm, J. Weser

Chemical bonding in carbonitride nanolayers

Nucl. Instr. and Meth. A 575, 78-84 (2007)

J. John, P. Malinowski, P. Aparicio, G. Hellings, A. Lorenz, M. Germain, F. Semond, J.-Y. Duboz, A. BenMoussa, J.-F. Hochedez, U. Kroth, M. Richter

AlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength range

Proc. of SPIE 6585, 658505 (2007)

A. von Kienlin, E. Bissaldi, G.G. Lichti, H. Steinle, M. Krumrey, M. Gerlach, G.J. Fishman, Ch. Meegan, N. Bhat, M.S. Briggs, R. Diehl, V. Connaughton, J. Greiner, R.M. Kippen, Ch. Kouveliotou, W. Paciesas, R. Preece and C. Wilson-Hodge

Calibration of the GLAST Burst Monitor detectors

AIP Conf. Proc. 921, 578-579 (2007)

R. Klein, G. Brandt, L. Cibik, M. Gerlach, M. Krumrey, P. Müller, G. Ulm, M. Scheer

A superconducting wavelength shifter as primary source standard in the X-ray range

Nucl. Instr. and Meth. 580, 1536-1543 (2007)

M. Krumrey, M. Gerlach, M. Hoffmann and P. Müller

Thin transmission photodiodes as monitor detectors in the X-ray range

AIP Conf. Proc. 879, 1145-1147 (2007)

M. Krumrey

X-ray radiometry

Opt. and Prec. Engineering 15, 1829-1837 (2007)

D.H. Lumb, F.E. Christensen, C.P. Jensen, M. Krumrey

Influence of a carbon over-coat on the X-ray reflectance of XEUS mirrors

Opt. Commun. 279, 101-105 (2007)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, K. Bürkmann-Gehrlein, G. Wüstefeld

IR and THz radiation from the Metrology Light Source of the PTB

Proc. of IRMMW-THz2007, 632-633 (2007)

J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, U. Dersch

Finite element analysis of EUV lithography

Proc. of SPIE 6617, 661718 (2007)

F. Scholze, T. Böttger, H. Enkisch, C. Laubis, L. van Loyen, F. Macco, S. Schädlich

Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics

Meas. Sci. Technol. 18, 126-130 (2007)

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, A. Kampe, S. Plöger, F. Scholz, and G. Ulm

Polarization dependence of multilayer reflectance in the EUV spectral range

Proc. of SPIE 6517, 65172 (2007)

F. Scholze, C. Laubis, U. Dersch, J. Pomplun, S. Burger, F. Schmidt

The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks

Proc. of SPIE 6617, 66171 (2007)

A.A. Sorokin, M. Wellhöfer, S.V. Bobashev, K. Tiedtke, M. Richter

X-ray-laser interaction with matter and the role of multiphoton ionization: Free-electron-laser studies on neon and helium

Phys. Rev. A 75, 051402 (R) (2007)

A.A. Sorokin, S.V. Bobashev, T. Feigl, K. Tiedtke, H. Wabnitz, M. Richter

Photoelectric effect at ultra-high intensities

Phys. Rev. Lett. 99, 213002 (2007)

G. Ulm, G. Brandt, J. Eden, R. Fliegauf, A. Gottwald, A. Hoehl, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, W. Anders, P. Budz, K. Bürkmann-Gehrlein, O. Dressler, V. Dürr, J. Feikes, H.-G. Hoberg, R. Lange, P. Kuske, D. Krämer, J. Rahn, T. Schneegans, E. Weihreter, G. Wüstefeld

The Metrology Light Source - the New Dedicated Electron Storage Ring of PTB

AIP Conf. Proc. 879, 167-170 (2007)

G. Ulm, G. Brandt, R. Fliegauf, A. Hoehl, R. Klein, R. Müller, T. Birke, J. Borninkhof, P. Budz, K. Bürkmann-Gehrlein, R. Daum, O. Dressler, V. Dürr, J. Feikes, H. Glass, H.G. Hoberg, J. Kolbe, R. Lange, I. Müller, J. Rahn, G. Schindhelm, T. Schneegans, T. Schroeter, D. Schüler, G. Wüstefeld

Status of Metrology Light Source

Nucl. Instr. and Meth. A 582, 26-30 (2007)

M. Wellhöfer, M. Martins, W. Wurth, A.A. Sorokin and M. Richter

Performance of the monochromator beamline at FLASH

J. Opt. A 9, 749-759 (2007)

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2006

M. Alvisi, M. Blome, M. Griepentrog, V.-D. Hodoroaba, P. Karduck, M. Mostert, M. Nacucchi, M. Procop, M. Rogde, F. Scholze, P. Statham, R. Terborg, J.-F. Thiot

The determination of the efficiency of energy-dispersive x-ray spectrometers by a new reference material

Microscopy and Microanalysis 12, 406-415 (2006)

A. Antonov, V. Arkadiev, B. Beckhoff, A. Erko, I. Grigorieva, B. Kanngießer, B. Vidal

Optics for Monochromators

in: Handbook of Practical X-Ray Fluorescence Analysis, 115-167 (2006), edited by: B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff; Springer, Heidelberg

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser and G. Ulm

Reference-free X-ray Spectrometry Wafer Employed for Contamination Analysis and Nanolayer Characterization

KEK Proceedings 2006-3, 126-129 (2006)

A. BenMoussa, U. Schühle, F. Scholze, U. Kroth, K. Haenen, T. Saito, J. Campos, S. Koizumi, C. Laubis, M. Richter, V. Mortet, A. Theissen and J.F. Hochedez

Radiometric characteristics of new diamond PIN photodiodes

Meas. Sci. and Technol. 17, 913-917 (2006)

A. BenMoussa, J.F. Hochedez, U. Schühle, W. Schmutz, K. Haenen, Y. Stockman, A. Soltani, F. Scholze, U. Kroth, V. Mortet, A. Theissen, C. Laubis, M. Richter, S. Koller, J.-M. Defise and S. Koizumi

Diamond detectors for LYRA, the solar VUV radiometer on board PROBA2

Diamond and Related Materials 15, 802-806 (2006)

A. BenMoussa, A. Theissen, F. Scholze, J.F. Hochedez, U. Schühle, W. Schmutz, K. Haene, Y. Stockmann, A. Soltani, D. McMullin, R.E. Vest, U. Kroth, C. Laubis, M. Richter, V. Mortet, S. Gissot, V. Delouille, M. Dominique, S. Koller, J.P. Halain, Z. Remes, R. Petersen, M. D'Olieslaeger, J.-M. Defise

Performance of diamond detectors for VUV applications

Nucl. Instr. and Meth. A 568, 398-405 (2006)

P. Budz, M. Abo-Bakr, K. Bürkmann, V. Dürr, J. Kolbe, D. Krämer, J. Rahn, G. Wüstefeld, I. Churkin, E. Semenov, S. Syniatkin, A. Steshov, E. Rouvinskiy, R. Klein, G. Ulm

The Magnets of the Metrology Light Source in Berlin-Adlershof

Proc. EPAC 2006, 3296-3298 (2006)

L. Büermann, B. Grosswendt, H.-M. Kramer, H.-J. Selbach, M. Gerlach, M. Hoffmann and M. Krumrey

Measurement of the x-ray mass energy-absorption coefficient of air using 3 keV to 10 keV synchrotron radiation

Phys. Med. Biol. 51, 5125-5150 (2006)

K. Bürkmann, M. Abo-Bakr, W. Anders, P. Budz, O. Dressler, V. Dürr, J. Feikes, HG. Hoberg, P. Kuske, R. Lange, J. Rahn, T. Schneegans, D. Schüler, E. Weihreter, G. Wüstefeld, D. Krämer, R. Klein, G. Ulm

Status of the Metrology Light Source

Proc. EPAC 2006, 3299-3301 (2006)

I. Busch, J. Stümpel and M. Krumrey

Influence of growth interruption on the formation of solid-state interfaces

Powder Diffr. 21, 122-124 (2006)

M.J. Collon, S. Kraft, R. Günther, R. Partapsing, M. Beijersbergen, C. v. Baren, M. Bavdaz, K. Wallace, D. Kampf, M. Krumrey, P. Müller

Metrology, integration and performance verification of silicon pore optics in Wolter-I configuration

Proc. SPIE 6266, 626618 (2006)

M.J. Collon, S. Kraft, R. Günther, E. Maddox, M. Beijersbergen, M. Bavdaz, D. Lumb, K. Wallace, M. Krumrey, L. Cibik, M. Freyberg

Performance characterization of silicon pore optics

Proc. SPIE 6266, 62661T (2006)

A. Gottwald, U. Kroth, M. Krumrey, M. Richter, F. Scholze, G. Ulm

The PTB High-Accuracy Spectral Responsivity Scale in the VUV and X-Ray Range

Metrologia 43, S125-S129 (2006)

R. Klein, C. Laubis, R. Müller, F. Scholze, G. Ulm

The EUV metrology program of PTB

Microelectronic Engineering 83, 707-709 (2006)

R. Klein, G. Ulm, P. Budz, K. Bürkmann-Gehrlein, J. Rahn, G. Wüstefeld

The Metrology Light Source - An Electron Storage Ring Dedicated to Metrology

Proc. EPAC 2006, 3314-3316 (2006)

S. Kraft, M. Collon, M.W. Beijersbergen, M. Bavdaz, D.H. Lumb, K. Wallace, A. Peacock, M. Krumrey, V. Lehmann

Programmatics of Large Scale Production of Silicon Pore Optics for Future X-Ray Telescopes

Proc.SPIE 6266, 626617 (2006)

M. Krumrey, M. Gerlach, F. Scholze, G. Ulm

Calibration and characterization of semiconductor X-ray detectors with synchrotron radiation

Nucl. Instr. and Meth. A 568, 364-368 (2006)

S. Kück, F. Brandt, H.-A. Kremling, A. Gottwald, A. Hoehl, M. Richter

Absolute measurement of F₂-laser power at 157 nm

Appl. Opt. 45, 3325-3330 (2006)

J. Lang, B. J. Kent, W. Paustian, C. Brown, C. Keyser, M.R. Anderson, G.C.R. Case, R. A. Chaudry, A.M. James, C.M. Korendyke, C.D. Pike, B.J. Probyn, D.J. Rippington, J.F. Seely, J.A. Tandy, and M.C.R Whillock

Laboratory calibration of the Extreme-Ultraviolet Imaging Spectrometer for the Solar-B satellite

Appl. Opt. 45, 8689-8705 (2006)

C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, F. Scholze, G. Ulm, H. Enkisch, S. Müllender, M. Wedowski, E. Louis, E. Zoethout

Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

Proc. SPIE 6151, 61510I (2006)

E. Louis, R.W.E. van de Kruijs, A.E. Yakshin, S. Alonso van der Westen, F. Bijkerk, M.M.J.W. van Herpen, D.J.W. Klunder, L. Bakker, H. Emkisch, S. Müllender, M. Richter, V. Banine

Multilayer optics with spectral purity layers for the EUV wavelength range

Proc. SPIE 6151, 615139-1-615139 (2006)

D.H. Lumb, M. Bavdaz, F.E. Christensen, A. Dariel, P. Hoghoj, C.P. Jensen, M. Krumrey, K.K. Madsen, E. Ziegler, B. Albertin, S. Hedacq, M. Collon, E.-J. Buis

Multi-layer Coating Development for XEUS

Proc. SPIE 6266, 626614 (2006)

M. Müller, B. Beckhoff, G. Ulm, B. Kanngießer

Absolute determination of cross sections for resonant Raman scattering on silicon

Phys. Rev. A 74, 012702-1-012702 (2006)

R. Müller, A. Hoehl, R. Klein, G. Ulm

Infrared radiation from the new electron storage ring "Metrology Light Source" of the Physikalisch-Technische Bundesanstalt

Proc. of the 9th International Conference on Infrared Sensors & Systems IRS² 2006, 223-228 (2006)

R. Müller, A. Hoehl, R. Klein, G. Ulm, U. Schade, K, Holldack, G. Wüstefeld

Planned infrared beamlines at the Metrology Light Source of PTB

Infrared Physics & Technology 49, 161-166 (2006)

J. Osán, S. Török, B. Beckhoff, G. Ulm, H. Hwang, C.-U. Ro, C. Abete, R. Fuoco

Nitrogen and sulfur compounds in coastal Antarctic fine aerosol particles - an insight using non-destructive X-ray microanalytical methods

Atmosph. Env. 40, 4691-4702 (2006)

J. Pomplun, S. Burger, F. Schmidt, L. Zschiedrich, F. Scholze, C. Laubis, U. Dersch

Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters

Proc. SPIE 6349, 63493D (2006)

M. Richter, A. Gottwald, F. Scholze, R. Thornagel, G. Ulm

Calibration of space instrumentation with synchrotron radiation

Advances in Space Research 37, 265-272 (2006)

F. Scholze

X-Ray Detectors and XRF Detection Channels

in: Handbook of Practical X-Ray Fluorescence Analysis, 199-203 (2006), edited by: B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff; Springer, Heidelberg

F. Scholze, R. Klein, R. Müller

Characterization of detectors for extreme UV radiation

Metrologia 43, S6-S10 (2006)

F. Scholze and G. Ulm

Calibration of Detectors and Tools for EUV- Source Metrology

in: EUV Sources for Lithography, 785-815 (2006), edited by: V. Bakshi; SPIE, Bellingham

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, G. Ulm

Polarization dependence of multilayer reflectance in the EUV spectral range

Proc. SPIE 6151, 615137 (2006)

F. Scholze, B. Beckhoff, M. Kolbe, M. Krumrey, M. Müller, G. Ulm

Detector Calibration and Measurement of Fundamental Parameters for X-Ray Spectrometry

Microchim. Acta 155, 275-278 (2006)

A.A. Sorokin, S.V. Bobashev, K. Tiedtke and M. Richter

Multi-photon ionization of molecular nitrogen by femtosecond soft x-ray FEL pulses

J. Phys. B 39, L299-L304 (2006)

A.A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S.V. Bobashev, I.V. Domracheva, D. N. Smimov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Hahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes and R. Treusch

Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams

Appl. Phys. Lett. 89, 221114 (2006)

C. Streli, P. Wobrauschek, L. Fabry, S. Pahlke, F. Comin, R. Barrett, P. Pianetta, K. Lüning, B. Beckhoff

Total-Reflection X-Ray Fluorescence TXRF Wafer Analysis

in: Handbook of Practical X-Ray Fluorescence Analysis, 199-203 (2006), edited by: B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff; Springer, Heidelberg

K. Wallace, M. Collon, M. Bavdaz, R. Fairbend, J. Serguy, M. Krumrey

Development in glass micro por optics for x-ray applications

Proc. SPIE 6266, 62661A (2006)

M. Wurm, B. Bodermann, F. Scholze, C. Laubis, H. Groß, A. Rathsfeld

Untersuchungen zur Eignung der EUV-Scatterometrie zur quantitativen Charakterisierung periodischer Strukturen auf Photolithographiemasken

DGaO-Proc. 2006 (2006);   http://www.dgao-proceedings.de

Ch. Zarkadas, A.G. Karydas, M. Müller, B. Beckhoff

X-Ray resonant Raman scattering on Ni employing polarized and unpolarized exciting radiation

Spectrochim. Acta B 61, 189-195 (2006)

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2005

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, J. Weser, G. Ulm

Röntgenspektrometrie mit Synchrotronstrahlung

PTB-Mitt. 115, 205-208 (2005)

L. Büermann, M. Krumrey, M. Haney, E. Schmid

Is there reliable experimental evidence for different dicentric yields in human lymphocytes produced by mammography X-rays free-in-air and within a phantom?

Radiation and Environmental Biophysics 44, 17 - 22 (2005)

L. Büermann, M. Krumrey

Röntgendosimetrie bei BESSY II

PTB-Mitt. 115, 209-211 (2005)

S. Friedrich, R. Fliegauf, M. Frank, M. Veldkamp, S. Labov, B. Beckhoff, G. Ulm

The spectral response of superconducting tunnel junction X-ray detectors

Nucl. Instr. Meth. A 551, 35-45 (2005)

A. Gottwald, M. Richter, G. Ulm, U. Schühle

Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source

Rev. Sci. Instrum. 76, 023101 (2005)

A. Gottwald, U. Kroth, M. Krumrey, P. Müller, M. Richter, F. Scholze, G. Ulm

Empfängergestützte Radiometrie mit Kryoradiometern und monochromatisierter Synchrotronstrahlung

PTB-Mitt. 115, 186-192 (2005)

J. Hollandt, J. Seidel, R. Klein, G. Ulm, A. Migdall, M. Ware

Primary Sources for Use in Radiometry

in: Optical Radiometry, 213-290 (2005), edited by: A.C. Parr, R.U. Datla, J.L. Gardner; Elsevier, Amsterdam

R. Klein, R. Thornagel, G. Ulm

Der Speicherring BESSY II als primäres Strahlernormal

PTB-Mitt. 115, 172-179 (2005)

R. Klein, G. Ulm, BESSY-MLS-Team

Die Metrology Light Source

PTB-Mitt. 115, 222-227 (2005)

M. Kolbe, B. Beckhoff, M. Krumrey, G. Ulm

Thickness determination for Cu and Ni nanolayers: Comparison of reference-free fundamental-parameter based X-ray fluorescence analysis and X-ray reflectometry

Spectrochimica Acta B 60, 505-510 (2005);   http://dx.doi.org/10.1016/j.sab.2005.03.018

M. Kolbe, B. Beckhoff, M. Krumrey and G. Ulm

Comparison of reference-free X-ray fluorescence analysis and X-ray reflectometry for thickness determination in the nanometer range

Applied Surface Science 252, 49-52 (2005);   http://dx.doi.org/10.1016/j.apsusc.2005.01.112

S. Kraft, M. Collon, R. Guenther, M.W. Beijersbergen, M. Bavdaz, D.H. Lumb, K. Wallace, A. Peacock, M. Krumrey, M. Hoffmann, P. Müller, V. Lehmann

Development of modular high-performance pore optics for the XEUS x-ray telescope

Proc. SPIE 5900, 151-162 (2005)

M. Krumrey, M. Hoffmann, M. Kolbe

Schichtdickenbestimmung mit Röntgenreflektometrie

PTB-Mitt. 115, 202-204 (2005)

M. Krumrey

Bestimmung der relativen biologischen Wirksamkeit von Röntgenstrahlung

PTB-Mitt. 115, 212-213 (2005)

R. Lawaczeck, V. Arkadiev, F. Diekmann, M. Krumrey

Monochromatic X-rays in Digital Mammography

Investigative Radiology 40, 33-39 (2005)

L. van Loyen, S. Böttger, S. Schädlich, S. Braun, Th. Folty, A. Leson, F. Scholze, S. Müllender

Laboratory LPP EUV Reflectometer working with Non-polarized Radiation

Applied Surface Science 252, 57-60 (2005)

R. Müller, F. Scholze, R. Klein, S. Plöger, G. Ulm

Linearity tests of silicon photodiodes for EUV radiation

Journal of Alloys and Compounds 401, 104-107 (2005)

W. Paustian, M. Richter, F. Scholze, R. Thornagel, G. Ulm

Quellengestützte Radiometrie mit Synchrotronstrahlung

PTB-Mitt. 115, 180-185 (2005)

M. Richter, A. Gottwald, U. Kroth, A. Sorokin

Messung gepulster VUV-Strahlung

PTB-Mitt. 115, 193-195 (2005)

M. Richter, A. Gottwald, M. Krumrey, W. Paustian, F. Scholze, R. Thornagel, G. Ulm

Radiometrie für die Astrophysik

PTB-Mitt. 115, 218-221 (2005)

H. Riesemeier, K. Ecker, W. Görner, B.R. Müller, M. Radtke, M. Krumrey

Layout and first XRF Applications of the BAMline at BESSY II

X-Ray Spectrom. 34, 160-163 (2005)

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, G. Ulm

Status of EUV Reflectometry at PTB

Proc. SPIE 5751, 749-758 (2005)

F. Scholze, M. Krumrey, M. Richter

Reflektometrie mit Synchrotronstrahlung

PTB-Mitt. 115, 196-201 (2005)

F. Scholze, C. Buchholz, A. Fischer, R. Klein, C. Laubis, S. Plöger, F. Scholz, G. Ulm, H. Wagner

Radiometrie für die EUV-Lithographie

PTB-Mitt. 115, 214-217 (2005)

F. Scholze and M. Procop

Detection efficiency of energy-dispersive detectors with low-energy windows

X-Ray Spectrom. 34, 473-476 (2005)

G. Ulm

Metrologie mit Synchrotronstrahlung

PTB-Mitt. 115, 167-171 (2005)

K. Wallace, M. Collon, M. Bavdaz, M. Beijersbergen, R. Fairbend, J. Seguy, M. Hoffmann, M. Krumrey

Development of micro-pore optics for x-ray applications

Proc. SPIE 5900, 163-172 (2005)

C. Wies, R. Lebert, B. Jaegle, L. Juschkin, F. Sobel, H. Seitz, R. Walter, C. Laubis, F. Scholze, W. Biel, O. Steffens

High speed reflectometer for EUV mask-blanks

Proc. SPIE 5752, 1069-1079 (2005)

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2004

S. Bechstein, B. Beckhoff, R. Fliegauf, J. Weser, G. Ulm

Characterization of an Nb/Al/AlO_x/Al/Nb superconducting tunnel junction detector with a very high spatial resolution in the soft X-ray range

Spectrochim. Acta B 59, 215-221 (2004)

F. Diekmann, S. Diekmann, K. Richter, U. Bick, T. Fischer, R. Lawaczeck, W.-R. Press, K. Schön, H.-J. Weinmann, V. Arkadiev, A. Bjeoumikhov, N. Langhoff, J. Rabe, P. Roth, J. Tilgner, R. Wedell, M. Krumrey, U. Linke, G. Ulm, B. Hamm

Near monochromatic X-rays for digital slot-scan mammography: initial findings

Eur. Radiol. 14, 1641-1646 (2004)

A. Gottwald, R. Müller, M. Richter, A. Sorokin and G. Ulm

Pulse energy measurements of extreme ultraviolet undulator radiation

Meas. Sci. Technol. 15, 437-443 (2004)

A. Gottwald, R. Klein, R. Müller, M. Richter, A.A. Sorokin, G. Ulm

Absolute measurement of EUV radiation from an undulator

AIP Conf. Proc. 705, 553-556 (2004)

A. Gottwald, S.V. Bobashev, U. Hahn, A. Hoehl, U. Jastrow, M. Richter, A.A. Sorokin, K.I. Tiedke

FEL beam metrology with a gas-monitor detector

Proc. SPIE 5534, 154-164 (2004)

A. Gottwald, U. Kroth, M. Letz, H. Schöppe, M. Richter

High-accuracy VUV reflectometry at selectable sample temperatures

Proc. SPIE 5538, 13-21 (2004)

O. Hahn, W. Malzer, B. Kanngießer, B. Beckhoff

Characterization of iron-gall inks in historical manuscripts and music compositions using x-ray fluorescence spectrometry

X-Ray Spectrometry 33, 234-239 (2004)

M. Huber, S. Bechstein, B. Beckhoff, F.v. Feilitzsch, J. Jochum, M. Krumrey, A. Rüdig, G. Ulm

Characterization of an Al-STJ-based X-ray detector with monochromatized synchrotron radiation

Nucl. Instr. and Meth. A 520, 234-236 (2004)

R. Klein, R. Thornagel, G.Ulm

BESSY II operated as a primary source standard

Proceedings of EPAC 2004, Lucerne, Switzerland, 273-275 (2004)

R. Klein, G.Ulm, M. Abo-Bakr, P. Budz, K. Bürkmann-Gehrlein, D. Krämer, J. Rahn, G. Wüstefeld

The Metrology Light Source of the Physikalisch-Technische Bundesanstalt in Berlin-Adlershof

Proceedings of EPAC 2004, Lucerne, Switzerland, 2290 - 2292 (2004)

M. Krumrey, G. Ulm, E. Schmid

Dicentric chromosomes in monolayers ofhuman lymphocytes produced by monochromatized synchrotron radiation with photon energies from 1.83 keV to 17.4 keV

Radiat. Environ. Biophys. 43, 1-6 (2004)

M. Krumrey, L. Büermann, M. Hoffmann, P. Müller, F. Scholze, G. Ulm

Absolute responsivity of silicon photodiodes in the X-ray range

AIP Conf. Proc. 705, 861-864 (2004)

M. Krumrey, M. Hoffmann, G. Ulm, K. Hasche, P. Thomsen-Schmidt

Thickness determination of SiO₂films on Si by X-ray reflectometry at the Si K edge

Thin Solid Films 459, 241-244 (2004)

M. Krumrey, F. Scholze, G. Ulm

High-accuracy X-ray detector calibration at PTB

Proc. SPIE 5501, 277-285 (2004)

R. Lebert, Ch. Wies, L. Juschkin, B. Jägle, M. Meisen, L. Aschke, F. Sobel, H. Seitz, F. Scholze, G. Ulm, K. Walter, W. Neff, K. Bergmann, W. Biel

High throughput EUV-reflectometer for EUV mask-blanks

Proc. SPIE 5374, 808-817 (2004)

H. Legall, H. Stiel, U. Vogt, H. Schönnagel, P.-V. Nickles, J. Tümmler, F. Scholz, F. Scholze

Spatial and spectral characterization of a laser produced plasma source for EUV metrology

Rev. Sci. Instrum. 75, 4981-4988 (2004)

B. Mertens, M. Weiss, H. Meiling, R. Klein, E. Louis, R. Kurt, M. Wedowski, H. Trenkler, B. Wolschrijn, R. Jansen, A. van de Runstraat, R. Moores, K. Spee, S. Plöger, R. van de Kruijs

Progress in EUV optics lifetime expectations

Microelectron. Eng. 73-74, 16-22 (2004)

T. Missalla, M.C. Schürmann, R. Lebert, C. Wies, L. Juschkin, R.M. Klein, F. Scholze, G. Ulm, A. Egbert, B. Tkachenko, B.N. Chichkov

Metrology tools for EUV-source characterization and optimization

Proc. SPIE 5374, 979-990 (2004)

J. Perlich, F.-M. Kamm, J. Rau, F. Scholze, G. Ulm

Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry

J. Vac. Sci. Technol. B 22, 3059-3062 (2004)

M. Procop, F. Scholze

Synchrotron Radiation for the Characterization of Energy Dispersive X-ray Spectrometers

Microsc. Microanal. (Suppl. 2) 10, 98-99 (2004)

F. Scholze, R. Klein, R. Müller

Linearity of silicon photodiodes for EUV radiation

Proc. SPIE 5374, 926-934 (2004)

U. Schühle, J.F. Hochedez, J.L. Pau, C. Rivera, E. Munoz, J. Alvarez, J.-P. Kleider, Ph. Lemaire, Th. Appourcheax, B. Fleck, A. Peacock, M. Richter, U. Kroth, A. Gottwald, M.-C. Castex, A. Deneuville, P. Muret, M. Nesladek, F. Omnes, J. John, C. Van Hoof

Development of imaging arrays for solar UV observations based on wide band gap materials

Proc. SPIE 5171, 231-238 (2004)

M. P. Seah, S. J. Spencer, F. Bensebaa, I. Vickridge, H. Danzebrink, M. Krumrey, T. Gross, W. Oesterle, E. Wendler, B. Rheinländer, Y. Azuma,1 I. Kojima,1 N. Suzuki, M. Suzuki, S. Tanuma, D. W. Moon, H. J. Lee, Hyun Mo Cho, H. Y. Chen, A. T. S. Wee, T. Osipowicz, J. S. Pan, W. A. Jordaan, R. Hauert, U. Klotz, C. van der Marel, M. Verheijen, Y. Tamminga, C. Jeynes, P. Bailey, S. Biswas, U. Falke, N. V. Nguyen, D. Chandler-Horowitz, J. R. Ehrstein, D. Muller and J. A. Dura

Critical review of the current status of thickness measurements for ultrathin SiO₂on Si Part V: Results of a CCQM pilot study

Surf. Interface Anal. 36, 1269 1303 (2004)

A.A. Sorokin, S. V. Bobashev, J. Feldhaus, Ch. Gerth, A. Gottwald, U. Hahn, U. Kroth, M. Richter, L. A. Shmaenok, B. Steeg, K. Tiedtke, R. Treusch

Gas-monitor detector for intense and pulsed VUV/EUV free-electron laser radiation

AIP Conf. Proc. 705, 557-560 (2004)

A.A. Sorokin, I.L. Beigman, S.V. Bobashev, M. Richter and L.A. Vainshtein

Total electron-impact ionization cross sections of helium

J. Phys. B 37, 3215-3226 (2004)

P. Thomsen-Schmidt, K. Hasche, G. Ulm, K. Herrmann, M. Krumrey, G. Ade, J. Stümpel, I. Busch, S. Schädlich, A. Schindler, W. Frank, D. Hirsch, M. Procop, U. Beck

Realisation and metrological characterisation of thickness standards below 100 nm

Appl. Phys. A 78, 645-649 (2004)

P. Thomsen-Schmidt, F. Pohlenz, G. Ulm, M. Krumrey, K. Hasche

Consistent standards for nanometrology or step height versus film thickness measurement

XI. International Colloquium on Surfaces, Chemnitz 2004, Proc. II, 108-116 (2004), edited by: M. Dietzsch

S. Török, J. Osán, B. Beckhoff, G. Ulm

Ultra-trace Speciation of Nitrogen Compounds in Aerosols Collected on Silicon Wafer Surfaces by means of TXRF-NEXAFS

Powder Diffraction 19, 81-86 (2004);   http://dx.doi.org/10.1154/1.1649327

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2003

B. Beckhoff, R. Fliegauf, J. Weser and G. Ulm

A Novel Instrumentation for Contamination and Deposited Control on 300 mm Silicon Wafers Employing Synchrotron Radiation Based TXRF and EDXRF Analysis

Solid State Phenomena 92, 89-92 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm, J. Weser, G. Pepponi, C. Streli, P. Wobrauschek, T. Ehmann, L. Fabry, S. Pahlke, B. Kanngießer, W. Malzer

TXRF Analysis of Low Z Elements and TXRF-NEXAFS Speciation of Organic Contaminants on Silicon Wafer Surfaces Excited by Monochromatized Undulator Radiation

Solid State Phenomena 92, 165-170 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm, J. Weser, G. Pepponi, C. Streli, P. Wobrauschek, T. Ehmann, L. Fabry, C. Mantler, S. Pahlke, B. Kanngießer, W. Malzer

Ultra-trace analysis of light elements and speciation of minute organic contaminants on silicon wafer surfaces by means of TXRF in combination with NEXAFS

Electrochem. Soc. Proc. 2003-03, 120-128 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm

Investigation of high-resolution superconducting tunnel junction detectors for low-energy X-ray fluorescence analysis

Spectrochim. Acta B 58, 615-626 (2003)

A. Benmoussa, J.-F. Hochedez, W.K. Schmutz, U. Schühle, M. Nesladek, Y. Stockmann, U. Kroth, M. Richter, A. Theissen, Z. Remes, K. Haenen, V. Mortert, S. Koller, J.P. Halain, R. Petersen, M. Dominique and M. D'Olieslaeger

Solar-Blind Diamond Detectors for Lyra, the Solar VUV Radiometer on Board Proba II

Experimental Astronomy 16, 141-148 (2003)

C. Buchholz

Präzisionsmessung des Probenwinkels im EUV-Reflektometer zur optischen Bestimmung von Schichtdicken

Diplomarbeit, TFH Wildau (2003)

A. Ehrmann, J. Rau, A. Wolter, F.M. Kamm, J. Mathuni, F. Scholze, J. Tümmler, G. Ulm

Mask CD characterization with EUV reflectometry at the electron storage ring BESSY II GMM-Fachbericht Band39, 19^thEuropean Mask Conference on Mask

Technology for Integrated Circuits and Mirco-Components, January 13-15, 2003, Sonthofen, Germany, p. 59-64 (2003) und Proc. SPIE 5148, 71-78 (2003)

K. Hasche, P. Thomsen-Schmidt, M. Krumrey, G. Ade, G. Ulm, J. Stuempel, S. Schaedlich, W. Frank, M. Procop, U. Beck

Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Proc. SPIE 5190, 165-172 (2003)

U. Kleineberg, Th. Westerwalbesloh, W. Hachmann, U. Heinzmann, J. Tümmler, F. Scholze, G. Ulm, S. Müllender

Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing

Thin Solid Films 433, 230-236 (2003)

M. Letz, L. Parthier, A. Gottwald, M. Richter

Spatial anisotropy of the exciton level in CaF₂ at 11.1 eV and its relation to the weak optical anisotropy at 157 nm

Phys. Rev. B 67, 233101 (2003)

M. Letz, A. Gottwald, M. Richter, M. Brinkmann, G. Wehrhan, L. Parthier

On the optical anisotropy in the cubic crystal of CaF₂: Scaling arguments and their relation to dispersing absorption

Proc. SPIE 5040, 662-666 (2003)

L. van Loyen, T. Böttger, S. Braun, H. Mai, A. Leson, F. Scholze, J. Tümmler, G. Ulm, H. Legall, P. V. Nickles, W. Sandner, H. Stiel, C. Rempel, M. Schulze, J. Brutscher, F. Macco, S. Müllender

A new laboratory EUV reflectometer for large optics using a laser plasma source

Proc. SPIE 5038, 12-21 (2003)

B. Mertens, B. Wolschrijn, R. Jansen, N. Koster, M. Weiss, M. Wedowski, R. Klein, T. Bock, R. Thornagel

EUV time resolved studies on carbon growth and cleaning

Proc. SPIE 5037, 95-102 (2003)

A. Owens, M. Bavdaz, G. Brammertz, V. Gostilo, H. Graafsma, A. Kozorezov, M. Krumrey, I. Lisjutin, A. Peacock, A. Puig, H. Sipila, S. Zatoloka

The X-ray response of TIBr

Nucl. Instr. and Meth. A 497, 370-380 (2003)

G. Pepponi, B. Beckhoff, T. Ehmann, G. Ulm, C. Streli, L. Fabry, S. Pahlke and P. Wobrauschek

Analysis of organic contaminants on Si wafers with TXRF-NEXAFS

Spectrochim. Acta B 58, 2245-2253 (2003);   http://dx.doi.org/10.1016/S0584-8547(03)00217-9

M. Richter, J. Hollandt, U. Kroth, W. Paustian, H. Rabus, R. Thornagel and G. Ulm

Source and detector calibration in the UV and VUV at BESSY II

Metrologia 40, S107-S110 (2003)

M. Richter, G. Ulm, C. Gerth, K. Tiedtke, J. Feldhaus, A.A. Sorokin, L.A. Shmaenok, S.V. Bobashev

Photoionization cross sections of Kr and Xe from threshold up to 1000 eV X-ray and inner-shell processes: 19^thinternational conference on X-ray and inner-shell processes

AIP Conf. Proc. 652, 165-171 (2003)

M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S.V. Bobashev, L.A. Shmaenok, J. Feldhaus, Ch. Gerth, B. Steeg, K. Tiedtke, R. Treusch

Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser

Appl. Phys. Lett. 83, 2970-2972 (2003)

E. Schmid, M. Krumrey, G. Ulm, H. Roos, D. Regulla

The maximum low-dose RBE of 17.4 and 40 keV monochromatic x rays for the induction of dicentric chromosomes in human peripheral lymphocytes

Radiat. Res. 160, 499-504 (2003)

H. Schoeppe

Untersuchung der Temperaturabhängigkeit optischer Eigenschaften von CaF2 im Spektralbereich von Vakuum - UV - Strahlung

Diplomarbeit, TFH Wildau (2003)

F. Scholze, J. Tümmler and G. Ulm

High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline

Metrologia 40, S224-S228 (2003)

F. Scholze, F. Scholz, J. Tümmler, G. Ulm, H. Legall, P.V. Nickles, W. Sandner, H. Stiel, L. van Loyen

Characterization of a laser produced plasma source for a laboratory EUV reflectometer

Proc. SPIE 5037, 670-681 (2003)

F. Scholze, J. Tümmler, E. Gullikson, A. Aquila

Comparison of extreme ultraviolet reflectance measurements

J. Microlith., Microfab., Microsyst. 2, 233-235 (2003)

F. Scholze, R. Klein, T. Bock

Irradiation stability of silicon photodiodes for exreme-ultraviolet radiation

Appl. Opt. 42, 5621-5626 (2003)

M. C. Schürmann, T. Missalla, K.R. Mann, S. Kranzusch, R.M. Klein, F. Scholze, G. Ulm, R. Lebert, L. Juschkin

Metrology tools for EUVL-source characterization and optimization

Proc. SPIE 5037, 378-388 (2003)

C. Streli, G. Pepponi, P. Wobrauschek, B. Beckhoff, G. Ulm, S. Pahlke, L. Fabry, Th. Ehmann, B. Kanngießer, W. Malzer and W. Jark

Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II

Spectrochimica Acta B 58, 2113-2121 (2003);   http://dx.doi.org/10.1016/j.sab.2003.05.008

J. Tümmler, H. Blume, G. Brandt, J. Eden, B. Meyer, H. Scherr, F. Scholz, F. Scholze, G. Ulm

Characterization of the PTB EUV reflectometry facility for large EUVL optical components

Proc. SPIE 5037, 265-273 (2003)

G. Ulm

Radiometry with synchrotron radiation

Metrologia 40, S101-S106 (2003)

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2002

P. Grübling, J. Hollandt, G. Ulm

Topography of an electron cyclotron resonance plasma in the vacuum-ultraviolet spectral range

Rev. Sci. Instrum. 73, 614-616 (2002)

R. den Hartog, A. Kozorezov, D. Martin, G. Brammertz, P. Verhoeve, A. Peacock, F. Scholze, D. J. Goldie

Large-Format Distributed Read-Out Imaging Devices for X-ray Imaging Spectroscopy

AIP Conf. Proc. 605, 11-14 (2002)

R. den Hartog, A. Kozorezov, D. Martin, G. Brammertz, P. Verhoeve, A. Peacock, F. Scholze, D. J. Goldie

Large-format distributed readout imaging devices for x-ray imaging spectroscopy

Proc. SPIE 4497, 50-60 (2002)

K. Hasche, G. Ulm, K. Herrmann, M. Krumrey, G. Ade, J. Stümpel, K. Busch, P. Thomsen-Schmidt, S. Schädlich, A. Schindler, W. Frank, M. Procop, U. Beck

About calibration of thickness standards on the nanometer scale

Proc. of 3rd euspen Internat. Conf., Eindhoven, 26-30 May, 549-552 (2002)

K. Hasche, G. Ulm, K. Hermann, M. Krumrey, G. Ade, J. Stümpel, I. Busch, P. Thomsen-Schmidt, S. Schädlich, A. Schindler, W. Frank, M. Procop, U. Beck

Film thickness standards on the nanometer scale

Proc. ASPE, annual meeting, 57-62 (2002)

J. Hollandt, M.C.E. Huber, M. Kühne, B. Wende

Source standards for the radiometric calibration of astronomical instruments in the VUV spectral range traceable to the primary standard BESSY

in: The Radiometric Calibration of SOHO, 51-68 (2002), edited by: A. Pauluhn, M.C.E. Huber, R. von Steiger; International Space Science Institute

N. Kawahara, T. Shoji, T. Yamada, Y. Kataoka, B. Beckhoff, G. Ulm, M. Mantler

Fundamental parameter method for the low energy  region including cascade effect and photoelectron excitation

Advances in X-ray Analysis 45, 511-516 (2002)

R. Klein, M. Krumrey, M. Richter, F. Scholze, R. Thornagel, G. Ulm

Radiometry with Synchrotron Radiation at the PTB Laboratory at BESSY II

Synchrotron Radiation News 15, 23-29 (2002)

R. Klein, P. Kuske, R. Thornagel, G. Brandt, R. Görgen, G. Ulm

Measurement of the BESSY II electron beam energy by Compton-backscattering of laser photons

Nucl. Instr. and Meth. A 486, 545-551 (2002)

R. Klein, F. Scholze, R. Thornagel, J. Tümmler, M. Wedowski, R. Jansen, B. Mertens, A. van de Runstraat, G. Ulm

Irradiation of EUV multilayer optics with synchrotron radiation of different time structure

Proc. SPIE 4782, 292-299 (2002)

R. Klein, F. Scholze, G. Ulm

High-Accuracy At-Wavelength Metrology for Extreme Ultraviolet Lithography at PTB

Lambda Highlights No 61, 4-6 (2002)

N. Koster, B. Mertens, R. Jansen, A. van de Runstraat, F. Stietz, M. Wedowski, H. Meiling, R. Klein, A. Gottwald, F. Scholze, M. Visser, R. Kurt, P. Zalm, E. Louis, A. Yakshin

Molecular contamination mitigation in EUVL by environmental control

Microelectron. Eng. 61-62, 65-76 (2002)

A. Owens, M. Bavdaz, A. Peacock, H. Andersson, S. Nenonen, M. Krumrey, A. Puig

High-resolution X-ray spectroscopy using a GaAs pixel detector

Nucl. Instr. and Meth. A 479, 531-534 (2002)

A. Owens, M. Bavdaz, G. Brammertz, M. Krumrey, D. Martin, A. Peacock, L. Tröger

The hard X-ray response of HgI₂

Nucl. Instr. and Meth. A 479, 535-547 (2002)

A. Owens, M. Bavdaz, H. Andersson, T. Gagliardi, M. Krumrey, S. Nenonen, A. Peacock, I. Taylor, L. Tröger

The X-ray response of CdZnTe

Nucl. Instr. and Meth. A 484, 242-250 (2002)

A. Owens, A. Peacock, M. Bavdaz, G. Brammertz, F. Dubecky, V. Gostilo, D. Gryaznov, N. Haack, M. Krumerey, A. Loupilov

The X-ray response of InP: Part B, synchrotron radiation measurements

Nucl. Instr. and Meth. A 491, 444-451 (2002)

A. Owens, H. Andersson, M. Bavdaz, C. Erd, T. Gagliardi, V. Gostilo, N. Haack, M. Krumrey, V. Nämsä, D. Lumb, I. Lisjutin, I. Major, S. Nenonen, A. Peacock, H. Sipila, S. Zatoloka

Development of compound semiconductor detectors for X- and gamma-ray spectroscopy

Proc. SPIE 4784, 244-258 (2002)

A. Paulhuhn, J. Lang, U. Schühle, S.K. Solanki, K. Wilhelm, W.T. Thompson, C.D. Pike, I. Rüedi, J. Hollandt, M.C.E. Huber

Intercalibration of CDS and SUMER

in: The radiometric calibration of SOHO, 235-247 (2002), edited by: A. Pauluhn, M.C.E. Huber, R. von Steiger; International space science institute

M. Procop, M. Radtke, M. Krumrey, K. Hasche, S. Schädlich, W. Frank

Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range

Anal Bioanal Chem 374, 631-634 (2002)

H. Rabus, R. Klein, F. Scholze, R. Thornagel, G. Ulm

Validation of the uncertainty budget for soft X-ray radiant power measurement using a cryogenic radiometer

Metrologia 39, 381-389 (2002)

M. Richter, U. Kroth, A. Gottwald, Ch. Gerth, K. Tiedtke, T. Saito, I. Tassy, K. Vogler

Metrology of pulsed radiation for 157-nm lithography

Appl. Opt. 41, 7167-7172 (2002)

F. Scholze, G. Brandt, P. Müller, B. Meyer, F. Scholz, J. Tümmler, K. Vogel, G. Ulm

High-accuracy detector calibration for EUV metrology at PTB

Proc. SPIE 4688, 680-689 (2002)

M. Schürmann, T. Mißalla, R. Klein, F. Scholze, G. Ulm, R. Lebert, L. Juschkin

Development of EUV Metrology: Spatial Resolved Absolute EUV Spectroscopy

Lambda Highlights No 61, 1-3 (2002)

R. Stuik, F. Scholze, J. Tümmler, F. Bijkerk

Absolute calibration of a multilayer-based XUV diagnostik

Nucl. Instr. and Meth. A 492, 305-316 (2002)

J. Tümmler, F. Scholze, G. Brandt, B. Meyer, F. Scholz, K. Vogel, G. Ulm, M. Poier, U. Klein, W. Diete

New PTB reflectometer for the characterization of large optics for the extreme ultraviolet spectral region

Proc. SPIE 4688, 338-347 (2002)

M. Veldkamp, B. Beckhoff, R. Fliegauf, G. Ulm, M. Frank, S. Friedrich, S.E. Labov

Characterization of superconducting tunnel junction X-ray detectors by means of monochromatized undulator radiation

Nucl. Instr. and Meth. A 487, 450-456 (2002)

K. Wilhelm, U. Schühle, W. Curdt, I.E. Dammasch, J. Hollandt, P. Lemaire, M.C.E. Huber

Solar Vacuum-ultraviolet radiometry with SUMER

in: The radiometric calibration of SOHO, 145-160 (2002), edited by: A. Pauluhn, M.C.E. Huber, R. von Steiger; International Space Science Institute

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2001

V. Arkadiev, A. Bjeoumikhov, N. Langhoff, J. Rabe, P. Roth, R. Wedell, B. Ham, F. Diekmann, K. Richter, M. Krumrey, U. Linke, G. Ulm, R. Lawaczeck, W.-R. Press, K. Schön und H.-J. Weinmann

Aufbau und Charakterisierung eines Röntgen-Monochromatormoduls für Mammographiegeräte

Medizinische Physik 2001, 123-124 (2001), edited by: K. Welker und K. Zink

B. Beckhoff, R. Fliegauf, G. Ulm, G. Pepponi, C. Streli, P. Wobrauschek, L. Fabry and S. Pahlke

Improvement of a total reflection X-ray fluorescence analysis of low Z elements on silicon wafer surfaces at the PTB monochromator beamline for undulator radiation at BESSY II

Spectrochimica Acta B 56, 2073-2083 (2001);   http://dx.doi.org/10.1016/S0584-8547(01)00320-2

B. Beckhoff and G. Ulm

Determination of Fluorescence Yields using Monochromatized Undulator Radiation of High Spectral Purity and Well-Known Flux

Advances in X-ray Analysis 44, 349-354 (2001)

M. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, R. Fairbend, J.-P. Boutot, S.O. Flyckt, A. Brunton, G. Price, G. Fraser, C. Herrmann, M. Krumrey, E. Ziegler and A. Freund

High-resolution micro-pore X-ray optics produced with micro-channel plate technology

Proc. SPIE 4145, 188-192 (2001)

W. Görner, M.P. Hentschel, B.R. Müller, H. Riesemeier, M. Krumrey, G. Ulm, W. Diete, U. Klein, R. Frahm

BAMline: the first hard X-ray beamline at BESSY II

Nucl. Instr. and Meth. A 467-468, 703-706 (2001)

P. Grübling

Untersuchung der Strahlungscharakteristik eines resonant mikrowellengeheizten Plasmas im Vakuum-UV

Dissertation an der Fakultät II Mathematik und Naturwissenschaften der Techn. Universität Berlin (2001)

K. Hasche, K. Herrmann, M. Krumrey, G. Ulm, S. Schädlich, W. Frank, M. Procop

Calibrated reference standards for films in the nanometer range

Proc. of 2nd euspen International Conference - Turin, Italy - May 27^th- 31^st, 396-399 (2001)

R. Klein, A. Gottwald, F. Scholze, R. Thornagel, J. Tümmler, G. Ulm, M. Wedowski, F. Stietz, B. Mertens, N. Koster, J.V. Elp

Lifetime testing of EUV optics using intense synchrotron radiation at the PTB radiometry laboratory

Proc. SPIE 4506, 105-112 (2001)

M. Krumrey, G. Ulm

High-accuracy detector calibration at the PTB four-crystal monochromator beamline

Nucl. Instr. and Meth. A 467-468, 1175-1178 (2001)

H. Meiling, B. Mertens, F. Stietz, M. Wedowski, R. Klein, R. Kurt, E. Louis, A. Yakshin

Prevention of MoSi multilayer reflection loss in EUVL tools

Proc. SPIE 4506, 93-104 (2001)

M. Richter, J. Hollandt, U. Kroth, W. Paustian, H. Rabus, R. Thornagel, G. Ulm

The two normal-incidence monochromator beam lines of PTB at BESSY II

Nucl. Instr. and Meth. A 467-468, 605-608 (2001)

F. Scholze, M. Procop

Measurement of detection efficiency and response functions for an Si(Li) x-ray spectrometer in the range 0.1 - 5 keV

X-Ray Spectrom. 30, 69-76 (2001)

F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, A. Gottwald, R. Klein, B. Meyer, U. Schwarz, R. Thornagel, J. Tümmler, K. Vogel, J. Weser, G. Ulm

High-Accuracy EUV Metrology of PTB Using Synchrotron Radiation

Proc. SPIE 4344, 402-413 (2001)

F. Scholze, R. Thornagel, G. Ulm

Calibration of energy-dispersive X-ray detectors at BESSY I and BESSY II

Metrologia 38, 391-395 (2001)

C. Streli, P. Wobrauschek, B. Beckhoff, G. Ulm, L. Fabry and S. Pahlke

First results of TXRF measurements of low-Z elements on Si wafer surfaces at the PTB plane grating monochromator beamline for undulator radiation at BESSY II

X-Ray Spectrom. 30, 24-31 (2001);   http://dx.doi.org/10.1002/xrs.463

R. Thornagel, R. Klein, G. Ulm

The electron storage ring BESSY II as a primary source standard from the visible to the X-ray range

Metrologia 38, 385-389 (2001)

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2000

M. Abo-Bakr, G. Wüstefeld, R. Klein, G. Ulm

Study of a small synchrotron radiation source for radiometry

Proc. EPAC, 601-603 (2000)

G. Angloher, B. Beckhoff, M. Bühler, F. v. Feilitzsch, T. Hertrich, P. Hettl, J. Höhne, M. Huber, J. Jochum, R.L. Mößbauer, J. Schnagl, F. Scholze, G. Ulm

Development of superconducting tunnel junction detectors for high-resolution X-ray spectroscopy

Nucl. Instr. and Meth. A 444, 214-219 (2000)

M.W. Bautz, M. J. Pivovaroff, S. E. Kissel, G. Y. Prigozhin, T. Isobe, S. E. Jones, G. R. Ricker, R. Thornagel, S. Kraft, F. Scholze, G. Ulm

Absolute Calibration of ACIS X-ray CCDs Using Calculable, Undispersed Synchrotron Radiation

Proc. SPIE 4012, 53-67 (2000)

B. Beckhoff, R. Klein, M. Krumrey, F. Scholze, R. Thornagel, G. Ulm

X-ray detector calibration in the PTB radiometry laboratory at the electron storage ring BESSY II

Nucl. Instr. and Meth. A 444, 480-483 (2000)

M.W. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, G. Fraser, A. Brunton, G. Price, M. Krumrey, C. Herrmann, A. Freund, E. Ziegler, A. Souvorov, R. Fairbend, J.-P. Boutot, S.O. Flyckt

Novel micro-pore X-ray optics produced with micro-channel plate technology

Proc. SPIE 4012, 218-224 (2000)

P. Grübling, J. Hollandt, G. Ulm

Electron cyclotron resonance light source assembly - A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma

Rev. Sci. Instrum. 71, 1200-1202 (2000)

R. den Hartog, A. Golubov, D. Martin, P. Verhoeve, A. Poelaert, A. Peacock, M. Krumrey

The lateral proximity effect and long-range energy-gap gradients in Ta/Al and Nb/Al Josephson junctions

Nucl. Instr. and Meth. A 444, 28-32 (2000)

R. den Hartog, P. Verhoeve, D. Martin, N. Rando, A. Peacock, M. Krumrey, D.J. Goldie

An X-ray photon-counting imaging spectrometer based on an Ta absorber with four superconducting tunnel junctions

Nucl. Instr. and Meth. A 444, 278-282 (2000)

R. den. Hartog, D. Martin, A. Kozorezov, P. Verhoeve, N. Rando, A. Peacock, G. Brammertz, M. Krumrey, D.J. Goldie, R. Venn

Distributed read-out imaging devices for X-ray imaging spectroscopy

Proc. SPIE 4012, 237-248 (2000)

H. Henneken, F. Scholze, G. Ulm

Lack of proportionality of total electron yield and soft x-ray absorption coefficient

J. Appl. Phys. 87, 257-268 (2000)

H. Henneken, F. Scholze, M. Krumrey and G. Ulm

Quantum efficiencies of gold and copper photocathodes in the VUV and X-ray range

Metrologia 37, 485-488 (2000)

J. Hollandt, U. Becker, W. Paustian, M. Richter and G. Ulm

New developments in the radiance calibration of deuterium lamps in the UV and VUV spectral range at the PTB

Metrologia 37, 563-566 (2000)

M. Krumrey, C. Herrmann, P. Müller and G. Ulm

Synchrotron-radiation-based cryogenic radiometry in the X-ray range

Metrologia 37, 361-364 (2000)

P. Kuschnerus

Quantenausbeute von kristallinem Silicium im Spektralbereich von 40 nm bis 400 nm

Dissertation Technische Universität Berlin (2000)

P. Kuske, R. Goergen, R. Klein, R. Thornagel, G. Ulm

High precision determination of the energy at BESSY II

Proc. of EPAC, 1771-1773 (2000)

R. P. Lambe, R. Saunders, C. Gibson, J. Hollandt, E. Tegeler

A CCPR international comparison of spectral radiance measurements in the air-ultraviolet

Metrologia 37, 51-54 (2000)

J. Lang, B. J. Kent, A. A. Breeveld, E. R. Breeveld, B. J. I. Bromage, J. Hollandt, J. Payne, C. D. Pike, W. T. Thompson

The laboratory calibration of the SOHO Coronal Diagnostic Spectrometer

J. Opt. A: Pure Appl. Opt. 2, 88-106 (2000)

E. Louis, A.E. Yakshin, P.C. Görts, S. Oestreich, R. Stuik, E.L.G. Maas, M.J.H. Kessels, F. Bijkerk, M. Haidl, S. Müllender, M. Mertin, D. Schmitz, F. Scholze, G. Ulm

Progress in Mo/Si multilayer coating technology for EUVL optics

Proc. SPIE, 3997, 406-411 (2000)

E. Louis, A.E. Yakshin, P.C. Görts, S. Oestreich, E.L.G. Maas, M.J.H. Kessels, D. Schmitz, F. Scholze, G. Ulm, S. Müllender, M. Haidl, F. Bijkerk

Mo/Si multilayer coating technology for EUVL, coating uniformity and time stability

Proc. SPIE, 4146, 60-63 (2000)

S. Oestreich, R. Klein, F. Scholze, J. Jonkers, E. Louis, A. Yakshin, P. Görts, G. Ulm, M. Haidl, F. Bijkerk

Multilayer reflectance during exposure to EUV radiation

Proc. SPIE, 4146, 64-71 (2000)

M. Richter, U. Johannsen, P. Kuschnerus, U. Kroth, H. Rabus, G. Ulm and L. Werner

The PTB high-accuracy spectral responsivity scale in the ultraviolet

Metrologia 37, 515-518 (2000)

M. Richter, F. Becker, K. Grützmacher, U. Kroth, H. Rabus, K. Vogler, E. Bergmann, U. Stamm

Metrology of Laser Radiation in the DUV for Lithography

Laser Beam and Optics Characterization, Technische Universität Berlin, 301-303 (2000), edited by: H. Weber, H. Laabs

F. Scholze, H. Henneken, P. Kuschnerus, H. Rabus, M. Richter, G. Ulm

Determination of the electron-hole pair creation energy for semiconductors from the spectral responsivity of photodiodes

Nucl. Instr. and Meth. A 439, 208-215 (2000)

F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, R. Klein, B. Meyer, D. Rost, D. Schmitz, M. Veldkamp, J. Weser, G. Ulm, E. Louis, A.E. Yakshin, S. Oestreich, F. Bijkerk

The new PTB beamlines for high-accuracy EUV reflectometry at BESSY II

Proc. SPIE, 4146, 72-82 (2000)

U. Schühle, W. Curdt, J. Hollandt, U. Feldman, P. Lemaire, K. Wilhelm

Radiometric calibration of the vacuum-ultraviolet spectrograph SUMER on the SOHO spacecraft with the B detector

Applied Optics 39, 418-425 (2000)

U. Schühle, A. Pauluhn, J. Hollandt, P. Lemaire, K. Wilhelm

Radiance Variations of Vacuum-Ultraviolet Emission Lines of the Quiet Sun Observed with SUMER on SOHO

Phys. Chem. Earth (C) 5-6, 429-432 (2000)

A. A. Sorokin, L. A. Shmaenok, S. V. Bobashev, B. Möbus, M. Richter, G. Ulm

Measurements of electron-impact ionization cross sections of argon, krypton, and xenon by comparison with photoionization

Phys. Rev. A 61, 022723 (2000)

K. Wilhelm, P. Lemaire, I.E. Dammasch, J. Hollandt, U. Schühle, W. Curdt, T. Kucera, D.M. Hassler, M.C.E. Huber

Solar Irradiances of Ultraviolet Emission Lines Measured During the Minimum of Sunspot Activity in 1996 and 1997

Phys. Chem. Earth 5-6, 389-392 (2000)

K. Wilhelm, U. Schühle, W. Curdt, I.E. Dammasch, J. Hollandt, P. Lemaire and M.C.E. Huber

Solar spectroradiometry with the telescope and spectrograph SUMER on the Solar and Heliosperic Observatory SOHO

Metrologia 37, 393-398 (2000)

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1999

M. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, G. Fraser, A. Brunton, E. Flyckt, M. Krumrey, A. Souvorov

Micro-channel plate based X-ray optics

Proc. SPIE 3765, 452-458 (1999)

R. Friedrich, J. Hollandt, H. Rabus, M. Richter, L. Werner

Progress in UV Radiometry

Proc. 9. Congrès International de Métrologie, 261-264 (1999)

A. Gottwald, Ch. Gerth, M. Richter

4d Photoionization of Free Singly Charged Xenon Ions

Phys. Rev. Lett. 82, 2068-2070 (1999)

P. Grübling, J. Hollandt, G. Ulm

Performance of the new monomode 10 GHz ECR radiation source ELISA

Nucl. Instr. and Meth. A 437, 152-162 (1999)

P. Grübling, J. Hollandt, G. Ulm

The Electron Cyclotron Resonance Light Source Assembly of PTB - ELISA

Proc. of the 14th Int. Workshop on ECR Sources, ECRIS99, CERN, Geneva, 54-57 (1999)

R. Hartmann, G. Hartner, U.G. Briel, K. Dennerl, F. Haberl, L. Strüder, J. Trümper, E. Bihler,E. Kendziorra, J.-F. Hochedez, E. Jourdain, P. Dhez, Ph. Salvetat, J. Auerhammer, D. Schmitz, F. Scholze, G. Ulm

The Quantum Efficiency of the XMM pn-CCD camera

Proc. SPIE 3765, 703-713 (1999)

H. Henneken

Totale Elektronenausbeute von Gold und Kupfer im Bereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1999)

H. Henneken, F. Scholze, G. Ulm

Absolute total electron yield of Au(111) and Cu(111) surfaces

J. Electron Spectr. Relat. Phenomena 101-103, 1019-1024 (1999)

S. Kraft, P. Verhoeve, A. Peacock, N. Rando, D.J. Goldie, R. Hart, D. Glowacka, F. Scholze, G. Ulm

On the factors governing the energy resolution of Ta-based superconducting tunnel junctions

J. Appl. Phys. 86, 7189-7191 (1999)

E. Louis, A.E. Yakshin, P.C. Görts, S. Abdali, E.L.G. Maas, R. Stuik, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, M. Haidl

Reflectivity of Mo/Si multilayer systems for EUVL

Proc. SPIE 3676, 844-845 (1999)

A. Owens, M. Bavdaz, S. Kraft, A. Peacock, S. Nenonen, A. Andersson, M.A. Gagliardi, T. Gagliardi, F. Scholze, G. Ulm

X-ray response of epitaxial GaAs

J. Appl. Phys. 85, 7522-7527 (1999)

A. Pauluhn, I. Rüedi, S. K. Solanki, J. Lang, C. D. Pike, U. Schühle, W. T. Thompson, J. Hollandt, M. C. E. Huber

Intercalibration of SUMER and CDS on SOHO. I. SUMER detector A and CDS NIS

Applied Optics. 38, 7035-7046 (1999)

H. Rabus, U. Kroth, M. Richter, G. Ulm, J. Friese, R. Gernhäuser, A. Kastenmüller, P. Maier-Komor, K. Zeitelhack

Quantum efficiency of cesium iodide photocathodes in the 120-220 nm spectral range traceable to a primary detector standard

Nucl. Instr. and Meth. A 438, 94-103 (1999)

M. Richter and G. Ulm

Radiometry using synchrotron radiation at PTB

J. Electron Spectr. Relat. Phenomena 101-103, 1013-1018 (1999)

S. Serej, E. Kellogg, R. Edgar, F. Scholze, G. Ulm

Absolute calibration of the Chandra X-ray Observatory: transfer standard solid state detectors

Proc. SPIE 3765, 777-788 (1999)

R. Stuik, E. Louis, A.E. Yakshin, P.C. Görts, E.L.G. Maas, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, M. Haidl

Peak and integrated reflectivity, wavelength and gamma optimization of Mo/Si and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography

J. Vac. Sci. Technol. B 17, 2998-3002 (1999)

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1998

J.M. Auerhammer, G. Brandt, F. Scholze, R. Thornagel, G. Ulm, B.J. Wargelin, W.C. McDermott, T.J. Norton, I.N. Evans, E.M. Kellogg

High-accuracy calibration of the HXDS flow proportional counter for AXAF at the PTB laboratory at BESSY

Proc. SPIE 3444, 19-29 (1998)

M. Bautz, M. Pivovaroff, F. Baganoff, T. Isobe, S. Jones, S. Kissel, B. LaMarr, H. Manning, G. Prigozhin, G. Ricker, J. Nousek, C. Grant, K. Nishikida, F. Scholze, R. Thornagel, G. Ulm

X-ray CCD Calibration for the AXAF CCD Imaging Spectrometer

Proc. SPIE 3444, 210-224 (1998)

M. Bavdaz, S. Kraft, A. Peacock, F. Scholze, M. Wedowski, G. Ulm, S. Nenonen, M.A. Gagliardi, T. Tuomi, K.T. Hjelt, M. Juvonen

Compound semiconductor detectors for X-ray astronomy: spectroscopic measurements and material characteristics

Mat. Res. Soc. Symp. Proc. 487, 565-572 (1998)

D. Fuchs, S. Kraft, F. Scholze, G. Ulm

Soft X-Ray Detector Calibration and Reflectometry Facilities of the PTB at BESSY

in: X-Ray Microscopy and Spectromicroscopy, I-187 to I-191 (1998), edited by: J. Thieme, G. Schmahl, D. Rudolph, E. Umbach; Berlin: Springer-Verlag

A. Gottwald, Ch. Gerth, M. Groen, M. Richter, P. Zimmermann

Photoelectron spectroscopy on atomic Pr and Nd in the 4d giant resonance region

J. Phys. B: At. Mol. Opt. Phys. 31, 3875-3884 (1998)

A. Gottwald

Wechselwirkung von Innerschalenanregung und Valenzkonfiguration: Elektronenspektroskopie an freien positiven Ionen

Dissertation TU Berlin (1998); Verlag Wissenschaft und Technik, Berlin, ISBN: 3-89685-306-6

J. Hollandt, H. Rabus, M. Richter, R. Thornagel, G. Ulm

The Laboratory for UV and VUV Radiometry of the Physikalisch-Technische Bundesanstalt at BESSY I

in: Proc. of The 8th Int. Symposium on the Science&Technology of Light Sources (LS-8), 366-367 (1998), edited by: G. Babucke; Greifswald: INP, ISBN: 3-00-003105-7

J. Hollandt, U. Schühle, W. Curdt, I.E. Dammasch, P. Lemaire and K. Wilhelm

Solar radiometry with the telescope and VUV spectrometer SUMER on the Solar and Heliospheric Observatory (SOHO)

Metrologia 35, 671-675 (1998)

R. Klein, T. Mayer, P. Kruske, R. Thornagel and G. Ulm

Measurement of the electron energy and energy spread at the electron storage ring BESSY I

J. Synchrotron Rad. 5, 392-394 (1998)

R. Klein, J. Bahrdt, D. Herzog, G. Ulm

The PTB electromagnetic undulator for BESSY II

J. Synchrotron Rad. 5, 451-452 (1998)

S. Kraft, M. Bavdaz, B. Castelletto, A. Peacock, F. Scholze, G. Ulm, M.-A. Gagliardi, S. Nenonen, T. Tuomi, M. Juvonen, R. Rantamäki

The X-ray response of CdZnTe detectors to be used as future spectroscopic detectors for X-ray astronomy

Nucl. Instr. and Meth. A 418, 337-347 (1998)

S. Kraft, A. Peacock, M. Bavdaz, A. Owens, M. A. Gagliardi, S. Nenonen, F. Scholze, G. Ulm, T. Tuomi, M. Juvonen, R. Rantamaki

Recent results on the factors govering the energy resolution in compound semiconductors to be used as future spectroscopic detectors for hard X-ray astronomy

Proc. SPIE 3445, 236-246 (1998)

M. Krumrey

Design of a four-crystal monochromator beamline for radiometry at BESSY II

J. Synchrotron Rad. 5, 6-9 (1998)

M. Krumrey, C. Herrmann, P. Müller and G. Ulm

Components for the X-Ray radiometry beamline at BESSY II

J. Synchrotron Rad. 5, 788-790 (1998)

P. Kuschnerus, H. Rabus, M. Richter, F. Scholze, L. Werner and G. Ulm

Characterization of photodiodes as transfer detector standards in the 120 nm to 600 nm spectral range

Metrologia 35, 355-362 (1998)

G. Prigozhin, J. Woo, J.A. Gregory, A.H. Loomis, M.W. Bautz, G.R. Ricker, S. Kraft

Quantum efficiency of X-ray CCDs

Proc. SPIE 3301, 108-115 (1998)

F. Scholze, H. Henneken, P. Kuschnerus, H. Rabus, M. Richter and G. Ulm

High-accuracy detector calibration in the 3-1500 eV spectral range at the PTB radiometry laboratory

J. Synchrotron Rad. 5, 866-868 (1998)

F. Scholze, H. Rabus, G. Ulm

Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV

J. Appl. Phys. 84, 2926-2939 (1998)

U. Schüle, P. Brekke, W. Curdt, J. Hollandt, P. Lemaire, K. Wilhelm

Radiometric calibration tracking of the vacuum-ultraviolet spectrometer SUMER during the first year of the SOHO mission

Appl. Opt. 37, 2646-2652 (1998)

F. Senf, U. Flechsig, F. Eggenstein, W. Gudat, R. Klein, H. Rabus and G. Ulm

A plane-grating monochromator beamline for the PTB undulators at BESSY II

J. Synchrotron Rad. 5, 780-782 (1998)

G. Sommerer, E. Mevel, J. Hollandt, D. Schulze, P.V. Nickles, G. Ulm, W. Sandner

Absolute photon number measurement of high-order harmonics in the extreme UV

Opt. Comm. 146, 347-355 (1998)

A.A. Sorokin, L.A. Shmaenok, S.V. Bobashev, B. Möbus, G. Ulm

Measurements of electron-impact ionization cross sections of neon by comparison with photoionization

Phys. Rev. A 58, 2900-2910 (1998)

H.-J. Stock, G. Haindl, F. Hamelmann, D. Menke, O. Wehmeyer, U. Kleineberg, U. Heinzmann, P. Bulicke, D. Fuchs, G. Ulm

Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Appl. Opt. 37, 6002-6005 (1998)

G. Ulm, B. Beckhoff, R. Klein, M. Krumrey, H. Rabus, R. Thornagel

The PTB radiometry laboratory at the BESSY II electron storage ring

Proc. SPIE 3444, 610-621 (1998)

K. Wilhelm, P. Lemaire, I.E. Dammasch, J. Hollandt, U. Schühle, W. Curdt, T. Kucera, D.M. Hassler, M.C.E. Huber

Solar irradiances and radiances of UV and EUV lines during the minimum of sunspot activity in 1996

Astron. Astrophys. 334, 685-702 (1998)

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1997

M. Bavdaz, A. Peacock, S. Nenonen, M.A. Jantunen, T. Gagliardi, T. Tuomi, K.T. Hjelt, M. Juvonen, R. Rantamäki, S. Kraft, M. Wedowski, F. Scholze, G. Ulm, P.J. McNally, J. Curley, A.N. Danilewsky

On the correlation between crystal morphology and X-ray performance of a CdZnTe detector

Proc. SPIE 3114, 322-332 (1997)

A. Gottwald, S. Anger, J.-M. Bizau, D. Rosenthal, M. Richter

Inner-shell resonances in metastable Ca⁺ions

Phys. Rev. A 55, 3941-3944 (1997)

J. Hollandt, W. Curdt, U. Schühle und K. Wilhelm

Sonnenradiometrie mit SUMER auf SOHO

Phys. Bl. 53, 1101-1105 (1997)

W. Jans, B. Möbus, M. Kühne, G. Ulm, A. Werner, K.-H. Schartner

Emission cross sections for electron-impact-induced line radiation in the VUV from Ne, Ar, and Kr: Measurements and comparison with theory

Phys. Rev. A 55, 1890-1898 (1997)

E. Kellogg, L. Cohen, R. Edgar, I. Evans, M. Freeman, T. Gaetz, D. Jerius, W.C. McDermott, P. McKinnon, S. Murray, W. Podgorski, D. Schwartz, L. Van Speybroeck, B. Wargelin, M. Zombeck, M. Weisskopf, R. Elsner, S. O\'Dell, A. Tennant, J. Kolodziejczak, G. Garmire, J. Nousek, S. Kraft, F. Scholze, R. Thornagel, G. Ulm, K. Flanagan, D. Dewey, M. Bautz, S. Texter, J. Arenberg, R. Carlson

Absolute Calibration of the AXAF Telescope Effective Area

Proc. SPIE 3113, 515-521 (1997)

R. Klein, T. Mayer, P. Kuske, R. Thornagel, G. Ulm

Beam diagnostics at the BESSY I electron storage ring with Compton backscattered laser photons: measurement of the electron energy and related quantities

Nucl. Instr. and Meth. A 384, 293-298 (1997)

U. Kleineberg, H.-J. Stock, D. Menke, O. Wehmeyer, U. Heinzmann, D. Fuchs, P. Bulicke, M. Wedowski, G. Ulm, K.F. Heidemann and K. Osterried

Multilayer-coated soft x-ray diffraction gratings for Synchrotron Radiation applications

Proc. SPIE 3150, 18-30 (1997)

S. Kraft, F. Scholze, R. Thornagel, G. Ulm, W.C. McDermott, E.M. Kellogg

High Accuracy Calibration of the HXDS HPGe Detector at the PTB Radiometry Laboratory at BESSY

Proc. SPIE 3114, 101-112 (1997)

W.C. McDermott, E.M. Kellogg, B.J. Wargelin, I.N. Evans, S.A. Vitek, E.Y. Tsiang, D.A. Schwartz, R. Edgar, S. Kraft, F. Scholze, R. Thornagel, G. Ulm, M. Weisskopf, S. Odell, A. Tennant, J. Kolodziej

The AXAF HXDS germanium solid state detectors

Proc. SPIE 3113, 535-543 (1997)

G. Prigozhin, M. Bautz, S. Kissel, G. Ricker, S. Kraft, F. Scholze, R. Thornagel, G. Ulm

Absolute Measurements of Oxygen Edge Structure in the Quantum Efficiency of X-ray CCDs

IEEE Trans. Nucl. Sci. 44, 970-974 (1997)

H. Rabus, V. Persch, G. Ulm

Synchrotron-Radiation Operated Cryogenic Electrical-Substitution Radiometer as High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum Ultraviolet and Soft X-ray Spectral Ranges

Appl. Opt. 36, 5421-5440 (1997)

F. Scholze

Quantenausbeute von Silicium für Photonen im Energiebereich von 50 eV bis 1500 eV

Dissertation Technische Universität Berlin (1997)

G. Schriever, R. Lebert, A. Naweed, S. Mager, W. Neff, S. Kraft, F. Scholze, G. Ulm

Calibration of charge coupled devices and a pinhole transmission grating to be used as elements of a soft x-ray spectrograph

Rev. Sci. Instrum. 68, 3301-3306 (1997)

K.-H. Stephan, C. Reppin, F. Haberl, M. Hirschinger, H.J. Maier, D. Frischke, M. Wedowski,P. Bulicke, G. Ulm, J. Friedrich, P. Gürtler

Optical filters for the EPIC CCD-camera on board the XMM astronomy satellite

Proc. SPIE 3114, 166-172 (1997)

T. Tikkanen, S. Kraft, F. Scholze, R. Thornagel, G. Ulm

Characterising a Si(Li) detector element for the SIXA X-ray spectrometer

Nucl. Instr. and Meth. A 390, 329-335 (1997)

G. Ulm and B. Wende

X-Ray Radiometry

in:Röntgen Centennial, 81-99 (1997), edited by: A. Haase, G. Landwehr, E. Umbach; World Scientific, Singapore, ISBN: 981-02-3085-0

P. Verhoeve, N. Rando, A. Peacock, A. van Dordrecht, M. Bavdaz, J. Verveer, D.J. Goldie, M. Richter, G. Ulm

Tantalum Based Superconducting Tunnel Junctions as Photon Counting Detectors in the UV to the Near Infrared

Proc. of the 7th Int. Workshop on Low Temperature Detectors(LTD-7), München (27. Juli - 2. August 1997), 97-100 (1997), edited by: S. Cooper, ISBN: 3-00-002266-x

K. Wilhelm, P. Lemaire, W. Curdt, U. Schühle, E. Marsch, A.I. Poland, S.D. Jordan, R.J. Thomas, D.M. Hassler, M.C.E. Huber, J.-C. Vial, M. Kühne, O.H.W. Sigmund, A. Gabriel, J.G. Timothy, M. Grewing, U. Feldman, J. Hollandt, P. Brekke

First Results of the SUMER Telescope and Spectrometer on SOHO

Solar Physics 170, 75-104 (1997)

K. Wilhelm, P. Lemaire, U. Feldman, J. Hollandt, U. Schühle, W. Curdt

Radiometric calibration of SUMER: refinement of the laboratory results under operational conditions on SOHO 

Appl. Opt. 36, 6416-6422 (1997)

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1996

M. Bavdaz, A. Peacock, R. den Hartog, A. Poelaert, P. Underwood, V.-P. Viitanen, D. Fuchs, P. Bulicke, S. Kraft, F. Scholze, G. Ulm, A.C. Wright

The Performance of Transmission Filters for EUV&Soft X-ray Astronomy

Proc. SPIE 2808, 301-312 (1996)

K.A. Flanagan, T.T. Fang, C. Baluta, J.E. Davis, D. Dewey, T.H. Markert, D.E. Graessle, J. Drake, J.E. Fitch, J.Z. Juda, J. Woo, S. Kraft, P. Bulicke, R. Fliegauf, F. Scholze, G. Ulm, J. Bauer

Modeling the Diffraction Efficiencies of the AXAF High Energy Transmission Gratings: II

Proc. SPIE 2808, 650-676 (1996)

D.P. Gaines, T.P. Daly, D.G. Stearns, B. LaFontaine, D.W. Sweeney, H.C. Chapman, D. Fuchs

Image degradation from surface scatter in EUV optics

OSA TOPS on Extreme Ultraviolet Lithography 4, 199-202 (1996), edited by: G.D. Kubiak and D. Kania

R. Hartmann, D. Hauff, P. Lechner, R. Richter, L. Strüder, J. Kemmer, S. Krisch, F. Scholze, G. Ulm

Low energy response of siliconpn-junction detectors

Nucl. Instr. and Meth. A 377, 191-196 (1996)

J. Hollandt, M. Kühne, M.C.E. Huber and B. Wende

Source standards for the radiometric calibration of astronomical telescopes in the VUV spectral range

Astron. Astrophys. Suppl. Ser. 115, 561-572 (1996)

J. Hollandt, U. Schühle, W. Paustian, W. Curdt, M. Kühne, B. Wende, K. Wilhelm

Radiometric Calibration of the Telescope and Ultraviolet Spectrometer SUMER on SOHO

Appl. Opt. 35, 5125 - 5133 (1996)

U. Kleineberg, H.-J. Stock, A. Kloidt, K. Osterried, D. Menke, B. Schmiedeskamp, U. Heinzmann, D. Fuchs, P. Müller, F. Scholze, G. Ulm, K.F. Heidemann, B. Nelles

Mo/Si Multilayer Coated Laminar Phase and Ruled Blaze Gratings for the Soft X-Ray Region

J. Electr. Spectr. Rel. Phen. 80, 389 - 392 (1996)

H. Rabus, F. Scholze, R. Thornagel, G. Ulm

Detector Calibration at the PTB Radiometry Laboratory at BESSY

Nucl. Instr. and Meth. A 377, 209-216 (1996)

F. Scholze, H. Rabus, G. Ulm

Measurement of the mean electron-hole pair creation energy in crystalline silicon for photons in the 50 - 1500 eV spectral range

Appl. Phys. Lett. 69, 2974-2976 (1996)

F. Scholze, H. Rabus, G. Ulm

Spectral responivity of silicon photodiodes: High-accuracy measurement and improved self calibration in the soft X-ray spectral range

Proc. SPIE 2808, 534-543 (1996)

K. Solt, H. Melchior, U. Kroth, P. Kuschnerus, V. Persch, H. Rabus, M. Richter, G. Ulm

PtSi-n-Si Schottky-barrier photodetectors with stable spectral responsivity in the 120 - 250 nm spectral range

Appl. Phys. Lett. 69, 3662-3664 (1996)

K.-H. Stephan, C. Reppin, M. Hirschinger, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, P. Gürtler

On the Performance of an Optical Filter for the XMM Focal Plane CCD-Camera EPIC

Proc. SPIE 2808, 421-437 (1996)

R. Thornagel, R. Fliegauf, R. Klein, F. Scholze, G. Ulm

Measurement and calculation of the spatial and spectral distribution of wavelength shifter radiation at BESSY

Rev. Sci. Instrum. 67, 653-657 (1996)

G. Ulm, B. Wende

Quantitative spectral radiation measurements in the VUV and soft x-ray region

Optical and Quantum Electronics 28, 299-307 (1996)

P. Verhoeve, N. Rando, J. Verveer, A. Peacock, A. van Dordrecht, P. Videler, M. Bavdaz, D.J. Goldie, T. Lederer, F. Scholze, G. Ulm

Response of niobium-based superconducting tunnel junctions in the soft x-ray region 0.15-6.5 keV

Phys. Rev. B 53, 809-817 (1996)

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1995

M. Bavdaz, A. Peacock, D. Fuchs, T. Lederer, P. Müller, F. Scholze, G. Ulm, V.-P. Viitanen, R. Mutkainen

The soft X-ray transmission properties of thin polyimide windows and their application to future detectors

Rev. Sci. Instrum. 66, 2570-2573 (1995)

C. Budtz-Jørgensen, C. Olesen, H.W. Schnopper, T. Lederer, F. Scholze, G. Ulm

The response functions of the HEPC/LEPC detector system measured at the Xe L edge region

Nucl. Instr. and Meth. A 367, 83-87 (1995)

D. Fuchs, M. Krumrey, P. Müller, F. Scholze, G. Ulm

High precision soft x-ray reflectometer

Rev. Sci. Instrum. 66, 2248-2250 (1995)

D.P. Gaines, S. P. Vernon, G.E. Sommargren, D. Fuchs

X-ray characterization of a four-bounce projection system Proc. on Extreme Ultraviolet Lithography

Optical Society of America, Washington D.C., 171-176 (1995), edited by: Frits Zernike and David T. Attwood

R.A. Harrison et al. mult (39 authors including M. Kühne and J. Hollandt, PTB)

The Coronal Diagnostic Spectrometer for the Solar and Heliospheric Observatory

Solar Physics 162, 233-290 (1995)

R.A. Harrison, B.J. Kent, E.C. Sawyer, J. Hollandt, M. Kühne, W. Paustian, B. Wende, M.C.E. Huber

The Coronal Diagnostic Spectrometer for the Solar and Heliospheric Observatory: Experiment description and calibration

Metrologia 32, 647-652 (1995)

R. Hartmann, P. Lechner, L. Strüder, F. Scholze, G. Ulm

The radiation entrance window of pn-junction detectors

Metrologia 32, 491-494 (1995)

W. Jans, B. Möbus, M. Kühne, G. Ulm, A. Werner, K.-H. Schartner

Determination of absolute emission cross sections for the electron impact-induced line radiation in the VUV

Appl. Opt. 34, 3671-3680 (1995)

B.J. Kent, R.A. Harrison, E.C. Sawyer, R.W. Hayes, A.G. Richards, J.L. Culhane, K. Norman, A.A. Breeveld, P.D. Thomas, A.I. Poland, R.J. Thomas, W.T. Thompson, B. Aschenbach, H. Bräuninger, O. Kjeldseth-Moe, M. Kühne, J. Hollandt, W. Paustian, B.J.I. Bromage

The Coronal Diagnostic Spectrometer: an extreme ultraviolet spectrometer for the Solar and Heliospheric Observatory

Proc. SPIE 2517, 12-28 (1995)

U. Kleineberg, K. Osterried, H.-J. Stock, D. Menke, B. Schmiedeskamp, D. Fuchs, P. Müller, F. Scholze, K.F. Heidemann, B. Nelles, U. Heinzmann

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region

Appl. Opt. 34, 6506 - 6512 (1995)

M. Krumrey, E. Tegeler, R. Goebel, R. Köhler

Self-calibration of the same silicon photodiode in the visible and soft x-ray ranges

Rev. Sci. Instrum. 66, 4736-4737 (1995)

A. Lau-Främbs

Entwicklung der Radiometrie mit Synchrotronstrahlung im Spektralbereich 170 bis 400 nm mit einem Kryoradiometer als Primärnormal und Halbleiter-Photodioden als Transfernormale

Dissertation Technische Universität Berlin (1995)

A. Lau-Främbs, U. Kroth, H. Rabus, E. Tegeler, G. Ulm

New detector calibration facility for the wavelength range 35 - 400 nm based on an electrical substitution radiometer

Rev. Sci. Instrum. 66, 2324-2326 (1995)

A. Lau-Främbs, U. Kroth, H. Rabus, E. Tegeler, G. Ulm, B. Wende

First results with the new PTB cryogenic radiometer for the vacuum ultraviolet spectral range

Metrologia 32, 571-574 (1995)

T. Lederer, H. Rabus, F. Scholze, R. Thornagel and G. Ulm

Detector Calibration at the Radiometry Laboratory of PTB in the VUV and Soft X-ray Spectral Ranges using Synchrotron Radiation

Proc. SPIE 2519, 92-107 (1995)

Fu Lei, W. Paustian, E. Tegeler

Determination of the spectral radiance of transfer standards in the spectral range 110 nm - 400 nm using BESSY as a primary source standard

Metrologia 32, 589-592 (1995)

K.-H. Stephan, C. Reppin, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, S. Moeller, P. Gürtler

On the performance of optical filters for the XMM focal plane CCD-camera EPIC

Nucl. Instr. and Meth.  A362, 178-182 (1995)

R. Thornagel, J. Fischer, R. Friedrich, M. Stock, G. Ulm, B. Wende

The electron storage ring BESSY as a primary standard source- a radiometric comparison against a cryogenic electrical substitution radiometer in the visible

Metrologia 32, 459-462 (1995)

G. Ulm, B. Wende

Radiometry laboratory of Physikalisch-Technische-Bundesanstalt at BESSY

Rev. Sci. Instrum. 66, 2244-2247 (1995)

J.H. Underwood, C. Khan Malek, E.M. Gullikson, M. Krumrey

Multilayer coated Echelle gratings for soft x-rays and extreme ultraviolet

Rev. Sci. Instrum. 66, 2147-2150 (1995)

B. Wende

Radiometry with synchrotron radiation

Metrologia 32, 419-424 (1995)

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1994

D. Arnold, G. Ulm

Determination of photon emission probabilities of radionuclides using a Si(Li) detector calibrated by the primary standard source, BESSY

Nucl. Instr. and Meth. A 339, 43 - 48 (1994)

M. Bavdaz, A. Peacock, A.N. Parmar, D. Fuchs, P. Müller, F. Scholze, G. Ulm, A.C. Wright

On the X-ray transmission properties of multilayer windows

Nucl. Instr. and Meth. A 345, 549 - 560 (1994)

D. Fuchs, M. Krumrey, T. Lederer, P. Müller, F. Scholze, G. Ulm

Soft x-ray reflectometer for large and complex samples using synchrotron radiation

Proc. SPIE 2279, 402-410 (1994)

C. Heise, J. Hollandt, R. Kling, M. Kock, M. Kühne

Radiometric characterization of a Penning discharge in the VUV

Appl. Opt. 33, 5111 - 5117 (1994)

J. Hollandt

Strahlungsnormale für die solare Spektroradiometrie im Vakuum-UV

Dissertation Technische Universität Berlin (1994)

J. Hollandt, M. Kühne, B. Wende

High-current hollow-cathode source as a radiant intensity standard in the 40 - 125 nm wavelength range

Appl. Opt. 33, 68-74 (1994)

U. Kleinberg, H.-J. Stock, D. Menke, K. Osterried, B. Schmiedeskamp, U. Heinzmann, D. Fuchs, P. Müller, F. Scholze, K.F. Heidemann, B. Nelles, J. Thieme

Multilayer Reflection Type Zone Plates and Blazed Gratings for the Normal Incidence Soft X-Ray Region

Proc. SPIE 2279, 269-282 (1994)

H. Rabus, E. Tegeler, G. Ulm, B. Wende

Empfängergestützte Radiometrie mit Kryoradiometern und monochromatisierter Synchrotronstrahlung

PTB-Mitt. 104, 343 - 347 (1994)

B. Schmiedeskamp, A. Kloidt, H.-J. Stock, U. Kleineberg, T. Döhring, M. Pröpper, S. Rahn, K. Hilgers, B. Heidemann, T. Tappe, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze, K.F. Heidemann

Electron-beam-deposited Mo/Si and Mo_xSi_y/Si multilayer X-ray mirrors and gratings

Optical Engineering 33, 1314 - 1321 (1994)

F. Scholze, G. Ulm

Characterization of a windowless Si(Li) detector in the photon energy range 0.1 - 5 keV

Nucl. Instr. and Meth. A 339, 49 - 54 (1994)

F. Scholze, M. Krumrey, P. Müller, D. Fuchs

Plane grating monochromator beamline for VUV radiometry

Rev. Sci. Instrum. 65, 3229 - 3232 (1994)

J.M. Slaughter, D.W. Schulze, C.R. Hills, A. Mirone, R. Stalio, R.N. Watts, C. Tarrio, T.B. Lucatorto, M. Krumrey, P. Müller, Ch. M. Falco

Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet

J. Appl. Phys. 76, 2144-2156 (1994)

K.-H. Stephan, C. Reppin, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, S. Möller, P. Gürtler

Transmittance performance of polypropylene, poly-xylylene and polycarbonate films in the photon energy range from 1 eV to 10 keV

Proc. SPIE 2279, 134-142 (1994)

H.-J. Stock, U. Kleineberg, B. Heidemann, K. Hilgers, A. Kloidt, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze

Thermal stability of Mo/Si multilayer soft-x-ray mirrors fabricated by electron- beam evaporation

Appl. Phys. A 58, 371-376 (1994)

R. Thornagel, G. Ulm, P. Kuske, Th. Mayer, K. Ott

Monitoring the beam depolarization with a dc current transformer at BESSY I

Proc. Fourth Europ. Particle Accel. Conf. EPAC 94, London 1994, World Scientific, Vol. 2, 1719-1721 (1994)

T. Wilhein, D. Rothweiler, A. Tusche, F. Scholze, W. Meyer-Ilse

Thinned, back-illuminated CCDs for x-ray microscopy

Proc. of the Int. Conf. X-Ray Microscopy IV, Chernogolovka, Russia, Sept. 1993, Inst. of Microelectronics Technology, 470-475 (1994), edited by: V.V. Aristov and A. I. Erko

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1993

N. Ahr

Elektrisch kalibrierbare Kryobolometer als primäre Empfängernormale im Spektralbereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1993)

D.P. Gaines, R.C. Spitzer, N.M. Ceglio, M. Krumrey, G. Ulm

Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

Appl. Opt. 32, 6991-6998 (1993)

J. Hollandt, M.C.E. Huber, M. Kühne

Hollow cathode transfer standards for the radiometric calibration of VUV telescopes of the solar and heliospheric observators (SOHO)

Metrologia 30, 381-388 (1993)

W. Jans

Messung absoluter Wirkungsquerschnitte der elektronenstoßinduzierten Linien- emission von Edelgasen und Stickstoff im Spektralbereich von 40 - 120 nm

Dissertation Technische Universität Berlin (1993)

E. Spiller, D. Stearns, M. Krumrey

Multilayer x-ray mirrors: Interfacial roughness, scattering, and image quality

J. Appl. Phys. 74, 107-118 (1993)

K.-H. Stephan, H. Bräuninger, C. Reppin, H.J. Maier, D. Frischke, M. Krumrey, P. Müller

Optical filter for X-ray astronomy CCDs

Nucl. Instr. and Meth. A 334, 229 - 233 (1993)

H.-J. Stock, U. Kleineberg, A. Kloidt, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze

Mo_0.5Si_0.5/Si multilayer soft x-ray mirrors, high thermal stability, and normal incidence reflectivity

Appl. Phys. Lett. 63, 2207 - 2209 (1993)

M. Stock, J. Fischer, R. Friedrich, H.J. Jung, R. Thornagel, G. Ulm, B. Wende

Present state of the comparison between radiometric scales based on three primary standards

Metrologia 30, 439 - 449 (1993)

E. Tegeler

Recommendations for future work in the air UV spectral radiometry: Results of a report to the CCPR

Metrologia 30, 373-374 (1993)

B. Wende

Photon Metrology with Electromagnetic Radiation from Accelerated Relativistic Electrons

PTB-Mitt. 103, 119-129 (1993)

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1992

N. Ahr, E. Tegeler

Electrically calibrated cryogenic bolometers as primary detectors in the soft X-ray region

Nucl. Instr.&Meth. A319, 387-392 (1992)

D. Arnold, G. Ulm

Electron storage ring BESSY as a source of calculable spectral photon flux in the x-ray region

Rev. Sci. Instrum. 63, 1539-1542 (1992)

P. Boher, Ph. Houdy, M. Kühne, P. Müller, R. Barchewitz, J.P. Delaboudiniere, D.J. Smith

Tungsten/Magnesium Silicide Multilayers for Soft X-Ray Optics

J. of X-Ray Sci. Technol. 3, 118-132 (1992)

P. Boher, Ph. Houdy, C. Khan Malek, F.R. Ladan, S. Bac, D. Schirmann, P. Troussel, M. Krumrey, P. Müller, F. Scholze

Fabrication and performance of linear multilayer gratings in the 44 - 130 Å wavelength range

Proc. SPIE 1742, 464-474 (1992)

K. Bürkmann, H. Huber, E. Jaeschke, D. Krämer, B. Kuske, P. Kuske, M. Martin, H. Oertel, M. Scheer, L. Schulz, G. Ulm, E. Weihreter, G. Wüstefeld

SC-Wavelength Shifter for Deep X-Ray Lithography at BESSY I

EPAC 92, Berlin March 1992, Editions Frontieres, 1699-1701 (1992)

J. Hollandt, M. Kühne, M.C.E. Huber

Radiometric Calibration of Solar Space Telescopes - The Development of a Vacuum-Ultraviolet Transfer Source Standard

ESA Bulletin 69 (1992)

J. Hollandt, W. Jans, M. Kühne, F. Lindenlauf, B. Wende

A beam line for radiant power measurements ofvacuum ultraviolet and ultraviolet sources in the wavelength range 40-400 nm

Rev. Sci. Instrum. 63, 1278-1281 (1992)

A. Kloidt, H.J. Stock, U. Kleineberg, T. Döhring, M. Pröpper, K. Nolting, B. Heidemann, T. Tappe, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze, S. Rahn, J. Hormes, K.F. Heidemann

Fabrication, thermal stability and reflectivity measurements of Mo/Si-multilayers as X-ray mirrors and other optical components

Proc. SPIE 1742, 593-603 (1992)

M. Krumrey, E. Tegeler

Self-calibration of semiconductor photodiodes in the soft x-ray region

Rev. Sci. Instrum. 63, 797-801 (1992)

M. Kühne, M. Krumrey, E. Tegeler

Characterization of Soft X-Ray Detectors

X-Ray Microscopy III, 321-328 (1992), edited by: A. Michette, G. Morrison, C. Buckley; Springer Verlag Berlin, Heidelberg

M. Kühne, R. Thornagel

Soft X-Ray Emission from a Laser-Produced Carbon Plasma

X-Ray Microscopy III, 39-42 (1992), edited by: A. Michette, G. Morrison, C. Buckley; Springer Verlag Berlin, Heidelberg

A.G. Michette, C.J. Buckley, M. Kühne, P. Müller

Characteristics of a Multilayer Schwarzschild Objective

X-Ray Microscopy III, 125-127 (1992), edited by: A. Michette, G. Morrison, C. Buckley; Springer Verlag Berlin, Heidelberg

A.G. Michette, M. Kühne

The Optical Constants of Materials at Soft X-Ray Wavelengths

X-Ray Microscopy III, 293-295 (1992), edited by: A. Michette, G. Morrison, C. Buckley; Springer Verlag Berlin, Heidelberg

K. Molter

Experimentelle Untersuchungen zur Berechenbarkeit von Undulatorstrahlung

Dissertation Technische Universität Berlin (1992)

K. Molter, G. Ulm

Absolute measurement of the spectral and angular properties of undulator radiation with a pinhole transmission grating spectrometer

Rev. Sci. Instrum. 63, 1296-1299 (1992)

Z.U. Rek, J. Wong, T. Tanaka, Y. Kamimura, F. Schäfers, B. Müller, M. Krumrey, P. Müller

Characterization of YB66 for use as a soft X-ray monochromator crystal

Proc. SPIE 1740, 173-180 (1992)

F. Scholze, C.J. Buckley

Design Considerations for a Si(Li) Detector Assembly for X-Ray Microscopy

X-Ray Microscopy III, 339-341 (1992), edited by: A. Michette, G. Morrison, C. Buckley; Springer Verlag Berlin, Heidelberg

Ch. Wang, K. Molter, J. Bahrdt, A. Gaupp, W.B. Peatman, G. Ulm, B. Wende

Calculation of Undulator Radiation from Measured Magnetic Fields and Comparison with Measured Spectra

EPAC 92, Berlin 1992, Editions Frontieres, 928-930 (1992)

B. Wende

Photonenmetrologie mit BESSY

Phys. Bl. 48, 913-916 (1992)

B. Wende

New developments in photon metrology by use of the BESSY synchrotron radiation

Proc. SPIE 1712, 14-23 (1992)

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1991

N. Ahr, E. Tegeler

Cryogenic Microbolometers as Detectors in the VUV

Metrologia 28, 189-192 (1991)

D. Arnold

Der Elektronenspeicherring BESSY als Strahlungsnormal im Röntgenbereich und die Bestimmung der Photonenemissionswahrscheinlichkeiten von Radionukliden

Dissertation Technische Universität Berlin (1991)

P. Boher, Ph. Houdy, L. Hennet, Z.G. Li, A. Modak, D.J. Smith, M. Idir, T. Moreno, R. Barchewitz, M. Kühne, P. Müller, J.P. Delaboudiniere

Magnesium silicide based multilayers for soft X-ray optics

Proc. SPIE 1546, 502 - 519 (1991)

P. Boher, Ph. Houdy, L. Hennet, M. Kühne, P. Müller, J.P. Frontier, P. Touslard, C. Senillou, J.C. Joud, P. Ruterana

Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft X-ray optics

Proc. SPIE 1547, 21 - 38 (1991)

P. Boher, Ph. Houdy, L. Hennet, J.P. Delaboudiniere, M. Kühne, P. Müller, Z.G. Li, D.J. Smith

Silicon/silicon oxide and silicon/silicon nitride multilayers for extreme ultraviolet optical applications

Opt. Engin. 30, 1049-1060 (1991)

F. Eggert, M. Maneck, F. Scholze, M. Krumrey, E. Tegeler

Calibration of a Si(Li) detector system with different radiation entrance windows

Rev. Sci. Instrum. 62, 741 - 743 (1991)

D.P. Gaines, N.M. Ceglio, S.P. Vernon, M. Krumrey, P. Müller

Repair of high performance multilayer coatings

Proc. SPIE 1547, 228-238 (1991)

A. Kloidt, K. Nolting, U. Kleineberg, B. Schmiedeskamp, U. Heinzmann, P. Müller, M. Kühne

Enhancement of the reflectivity of Mo/Si multilayer x-ray mirrors by thermal treatment

Appl. Phys. Lett. 58, 2601-2603 (1991)

M. Krumrey, M. Kühne, P. Müller, F. Scholze

Precision soft x-ray reflectometry of curved multilayer optics

Proc. SPIE 1547, 136-143 (1991)

F. Lindenlauf

Entwicklung und radiometrische Charakterisierung einer kompakten VUV- Strahlungsquelle auf der Basis lasererzeugter Plasmen im Spektralbereich 25 nm bis 125 nm

Dissertation Technische Universität Berlin (1991)

S.P. Vernon, D.G. Stearns, R.S. Rosen, N.M. Ceglio, D.P. Gaines, M. Krumrey, P. Müller

Multilayer coatings on figured optics

Proc. SPIE 1547, 39-46 (1991)

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1990

K. Eidmann, M. Kühne, P. Müller, G.D. Tsakiris

Characterization of pinhole transmission gratings

J. X-Ray Sci. Technol. 2, 259-273 (1990)

U. Kroth, T. Saito, E. Tegeler

Quantum efficiency of a semiconductor photodiode in the VUV determined by comparison with a proportional counter in monochromatized synchrotron radiation

Appl. Opt. 29, 2659-2661 (1990)

M. Krumrey

Halbleiter-Photodioden als radiometrische Empfängernormale im Bereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1990)

M. Krumrey, E. Tegeler

Empfängernormale im Spektralbereich des Vakuum-Ultraviolett

PTB-Mitt. 100, 9-15 (1990)

M. Krumrey, E. Tegeler

Semiconductor Photodiodes in the VUV: Determination of Layer Thicknesses and Design Criteria for Improved Devices

Nucl. Instr.&Meth. A288, 114-118 (1990)

H. Petersen, W. Braun, M. Krumrey, E. Tegeler, A. Goldmann, F. Lodders, D. Rudolph

Characteristics of a stigmatic SX 700 beamline for surface analysis at BESSY. Proc. of the 2nd Europ. Conf. on Progress in X-Ray Synchrotron Radiation

Research, SIF, Bologna 1990, 315-318 (1990)

B. Schmiedeskamp, B. Heidemann, U. Kleineberg, A. Kloidt, M. Kühne, H. Müller, P. Müller, K. Nolting, U. Heinzmann

Fabrication and characterization of Si-based soft x-ray mirrors

Proc. SPIE 1343, 64-72 (1990)

E. Tegeler

New Developments in VUV Radiometry

Physica Scripta T31, 215-222 (1990)

R. Thornagel

Entwicklung einer Methode zur quantitativen Bestimmung der Photonenemission von Röntgenquellen und ihre Anwendung auf lasererzeugte Kohlenstoff- und Eisen-Plasmen

Dissertation Technische Universität Berlin (1990)

J. Xu, E. Weihreter, L. Schulz, G. Ulm, N. Liu

Local improvement of the field homogeneity for a light source dipole magnet

Proc. 2nd European Particle Accelerator Conf. EPAC 90, Nice 1990, Editions Frontières 2, 1128-1130 (1990)

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1989

M. Krumrey, E. Tegeler, G. Ulm

Complete characterization of a Si(Li) detector in the photon energy range 0.9 - 5 keV

Rev. Sci. Instrum. 60, 2287-2290 (1989)

M. Krumrey, E. Tegeler, R. Thornagel, G. Ulm

Calibration of semiconductor photodiodes as soft x-ray detectors

Rev. Sci. Instrum. 60, 2291-2294 (1989)

M. Kühne

The electron storage ring BESSY as a primary radiometric standard

Inst. Phys. Conf. Ser. No. 92, 25-30 (1989)

M. Kühne and P. Müller

Characterization of X-ray optics by synchrotron radiation

Proc. SPIE 1140, 220-225 (1989)

M. Kühne and P. Müller

Higher order contributions in the synchrotron radiation spectrum of a toroidal grating monochromator determined by the use of a transmission grating

Rev. Sci. Instrum. 60, 2101-2104 (1989)

M. Kühne, E. Tegeler, G. Ulm, B. Wende

Radiometrie und Charakterisierung optischer Komponenten

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich, 2. Teil: Technische Studie, Berlin, 402-414 (1989)

A.G. Michette, E. Fill, T. Taguchi and M. Kühne

High-resolution transmission gratings for use in the spectroscopy of laser-produced plasmas

Proc. SPIE 1140, 247-252 (1989)

H.-C. Petzold, M. Kühne

Determination of soft X-ray emission of pulsed plasma sources by comparison with the calculable emission of an electron storage ring using X-ray lithographic exposures

Microelectr. Eng. 10, 41-47 (1989)

M. Sterzik, H. Bräuninger, P. Predehl, C. Reppin, K. Schuster, M. Krumrey

Characterization of fully depleted pn-CCD's for X-ray imaging

Proc. SPIE 1159, 588-594 (1989)

E. Tegeler

Determination of the spectral radiance of deuterium lamps using the storage ring BESSY as a primary radiometric standard

Nucl. Instr. and Meth. A282, 706-713 (1989)

E. Tegeler, M. Krumrey

Stability of semiconductor photodiodes as vuv detectors

Nucl. Instr. and Meth. A282, 701-705 (1989)

E. Tegeler, M. Krumrey

Semiconductor photodiodes as detectors in the VUV and soft x-ray range

Inst. Phys. Conf. Ser. No. 92, 55-62 (1989)

G. Ulm, W. Hänsel-Ziegler, S. Bernstorff, F.P. Wolf

Measuring devices at BESSY for stored beam currents ranging from 0.8 pA to 1 A

Rev. Sci. Instrum. 60, 1752-1755 (1989)

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1988

N.M. Ceglio, A.M. Hawryluk, D.G. Stearns, M. Kühne, P. Müller

Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths

Opt. Lett. 13, 267-269 (1988)

K. Danzmann, M. Günther, J. Fischer, M. Kock, M. Kühne

High current hollow cathode as a radiometric transfer standard source for the extreme vacuum ultraviolet

Appl. Opt. 27, 4947-4951 (1988)

M. Krumrey, E. Tegeler, J. Barth, M. Krisch, F. Schäfers, R. Wolf

Schottky type photodiodes as detectors in the VUV and soft x-ray range

Appl. Opt. 27, 4336-4341 (1988)

M. Kühne

VUV and soft X-ray radiometry at the laboratory of PTB at the Berlin storage ring BESSY

Proc. SPIE 982, 326-334 (1988)

D.H. Nettleton, E. Tegeler

Intercomparison of spectral radiance scales over the spectral range 115 nm to 350 nm

BCR Information EUR 11568 EN (1988)

P. Predehl, H. Bräuninger, W. Burkert, B. Aschenbach, J. Trümper, M. Kühne, P. Müller

The Transmission Grating Spectrometer Of Spektrosat

Proc. SPIE 982, 265-272 (1988)

F. Riehle, S. Bernstorff, R. Fröhling and F.P. Wolf

Determination of electron currents below 1 nA in the storage ring BESSY by measurement of the synchrotron radiation of single electrons

Nucl. Instr. and. Meth. A268, 262-269 (1988)

E. Tegeler and G. Ulm

Determination of the beam energy of an electron storage ring by using calibrated energy dispersive Si(Li)-Detectors

Nucl. Instr. and Meth. A266, 185-190 (1988)

B. Wende

Radiometry from the Infrared to the X-Ray Region: An Electron Storage Ring as a Primary Radiator Standard

The Art of Measurement, 233-248 (1988), edited by: B. Kramer; VCH Verlag. mbH. Weinheim

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1987

M. Kühne, J. Fischer, B. Wende

Laser-produced plasmas as radiometric source standards for the VUV and the soft X-ray region

Proc. SPIE 831, 95-100 (1987)

M. Kühne and H.-C. Petzold

Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography

Appl. Opt. 27, 3926-3932 (1987)

M. Kühne and E. Tegeler

On The Suitability Of Semiconductor Photodiodes As Standard Detectors In The VUV

Proc. IMEKO Braunschweig 1987, 56-63 (1987)

F. Riehle and B. Wende

Ein Elektronenspeicherring als primäres Strahlungsnormal zur Realisierung strahlungsoptischer Einheiten vom Infraroten bis in den Bereich weicher Röntgenstrahlung

Optik 75, 142-148 (1987)

B. Wende

Radiometrie 18. IFF-Ferienkurs "Synchrotronstrahlung in der Festkörperforschung"

KFA Jülich, 16. - 27. März 1987, 35.3-35.15 (1987)

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1986

J. Barth, E. Tegeler, M. Krisch and R. Wolf

Characteristics and applications of semiconductor photodiodes from the visible to the X-ray region

SPIE Vol. 733, 481-485 (1986)

N.M. Ceglio, D.G. Stearns, A.M. Hawryluk, T.W. Barbee, K. Danzmann, M. Kühne, P. Müller, B. Wende, M.B. Stearns, A.K. Petford-Long and C.-H. Chang

Soft X-Ray Laser Cavities

J. de Physique 47, C6-277 - C6-286 (1986)

K. Danzmann, J. Fischer, M. Kühne

Radiometric Transfer Standard Sources for the Vacuum-Ultraviolet and the Soft X-Ray Range

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1, 275-277 (1986)

K. Danzmann, M. Kühne, P. Müller, N.M. Ceglio, D.G. Stearns and A.M. Hawryluk

Characterization of VUV- and Soft X-Ray Optical Components

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1, 278-279 (1986)

J. Fischer, M. Kühne and B. Wende

Instrumentation For Spectral Radiant Power Measurements Of Sources in the Wavelength Range From 5 To 150 nm Using The Electron Storage Ring BESSY As A Radiometric Standard Source

Nucl. Instr. and Meth. A 246, 404-407 (1986)

J. Fischer, M. Kühne and B. Wende

Laser-Produced Plasmas as Radiometric Transfer-Standard Sources for the Vacuum-Ultraviolet and the Soft X-ray Range

Metrologia 23, 179-186 (1986)

N.P. Fox, P.J. Key, F. Riehle, B. Wende

Intercomparison between two independent primary radiometric standards in the visible and near infrared: a cryogenic radiometer and the electron storage ring BESSY

Appl. Opt. 25, 2409-2420 (1986)

A.M. Hawryluk, N.M. Ceglio, D.G. Stearns, K. Danzmann, M. Kühne, P. Müller, B. Wende

Soft x-ray beamsplitters and highly dispersive multilayer mirrors for use as soft x-ray laser cavity components

Proc. SPIE 688, 81-90 (1986)

M. Kühne

Soft X-Ray Radiometry

Proc. SPIE 733, 472-480 (1986)

M. Kühne, K. Danzmann, P. Müller, B. Wende

Characterization of multilayer structures for soft x-ray laser research

Proc. SPIE 688, 76-80 (1986)

M. Kühne, F. Riehle, E. Tegeler, B. Wende

Uncertainties of the Radiometric Primary Standard BESSY and the Calibration of Detector and Source Transfer Standards in the Radiometric Laboratory of PTB at BESSY

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1, 266-268 (1986)

M. Kühne, F. Riehle, E. Tegeler, B. Wende

Radiometrie

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich, Berlin, 311-321 (1986)

M. Kühne and E. Tegeler

Quantum Efficiency and Radiation Damage of Silicon Photodiodes in the Vicinity of the Si L-Absorption Edge

VUV 8, 4.-8.8.86 Lund, Abstracts 1, 281-284 (1986)

P. Müller, F. Riehle, E. Tegeler and B. Wende

Measurement Of The Spectral Efficiency Of Energy Dispersive Si(Li) Detectors Below 5 keV Photon Energy Using BESSY As A Standard Source

Nucl. Instr. and Meth. A246, 569-571 (1986)

F. Riehle

A Soft X-Ray Bragg Polarimeter For Synchrotron Radiation At The Storage Ring BESSY

Nucl. Instr. and Meth. A246, 385-388 (1986)

F. Riehle, R. Fröhling, F.-P. Wolf

Determination of Electron Currents Below 1 nA in the Storage Ring BESSY by Measurement of the VUV Synchrotron Radiation of Single Electrons

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1, 272-273 (1986)

F. Riehle and E. Tegeler

Simple method for the determination of the characteristic photon energy Ec of a storage ring by x-ray measurement at photon energies around 20 Ec.

Proc. SPIE 733, 86-91 (1986)

F. Riehle and B. Wende

Establishment of a Spectral Irradiance Scale in the Visible and Near Infrared Using the Electron Storage Ring BESSY

Metrologia 22, 75-85 (1986)

F. Riehle, E. Tegeler, B. Wende

Spectral Efficiency and Resolution of Si(Li)-Detectors for Photon Energies between 0.3 keV and 5 keV

Proc. SPIE 733, 80-85 (1986)

D.G. Stearns, N.M. Ceglio, A.M. Hawryluk, M.B. Stearns, A.K. Petford-Long, C.-H. Chang, K. Danzmann, M. Kühne, P. Müller, B. Wende

TEM and x-ray analysis of multilayer mirrors and beamsplitters

Proc. SPIE 688, 91-98 (1986)

E. Tegeler

A Compact Plane Crystal Spectrometer for the Energy Range between 500 eV and 5000 eV

Nucl. Instr. and Meth. A246, 488-490 (1986)

E. Tegeler

Charakterisierung des Strahlungsflusses aus Wigglern und Undulatoren

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich; Berlin, 470-478 (1986)

E. Tegeler

Transmissiongitteroptiken

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich; Berlin, 460-461 (1986)

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1985

K. Danzmann, J. Fischer and M. Kühne

A high-current hollow cathode as a source of intense line radiation in the vuv

J. Phys. D: Appl.Phys. 18, 1299-1305 (1985)

J. Fischer

Lasererzeugte Plasmen als radiometrische Transfernormale und ihre Kalibrierung mit dem Elektronenspeicherring BESSY als Strahlungsnormal im Wellenlängenbereich von 7 nm bis 100 nm

Dissertation Technische Universität Berlin (1985)

M. Kühne and H.-C. Petzold

Conversion Efficiency of Laser Radiation into Soft X-Ray Radiation of Laser Produced Plasmas for X-Ray Lithography

Microelectr. Eng. 3, 565-571 (1985)

M. Kühne and B. Wende

Vacuum uv and soft x-ray radiometry

J. Phys. E: Sci. Instrum. 18, 637-647 (1985)

M. Kühne und B. Wende

Radiometrie für Wellenlängen unterhalb 200 nm

Kohlrausch, Prakt. Physik, Band 1, 23. Auflage 1, 539-553 (1985)

F. Riehle and B. Wende

Electron storage ring BESSY as a radiometric source of calculable spectral radiant power between 0.5 and 1000 nm

Opt. Lett. 10, 365-367 (1985)

E. Tegeler

Polarisatoren für den UV- und Vakuum-UV-Spektralbereich

Kohlrausch, Prakt. Physik, Band 1, 23. Auflage 1, 688-690 (1985)

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1984

J. Fischer, M. Kühne, B. Wende

Spectral radiant power measurements of VUV and soft x-ray sources using the electron storage ring BESSY as a radiometric standard source

Appl. Opt. 23, 4252-4260 (1984)

J. Fischer, M. Kühne, B. Wende

Lasererzeugtes Wolframplasma als Gebrauchsnormal für Vakuum-UV- und weiche Röntgenstrahlung

PTB-Mitt. 94, 177 (1984)

J. Fischer, M. Kühne, F. Riehle, E. Tegeler, B.Wende

Strahlungsoptische Einstellung eines Einelektronenstroms und von Stromstufen im pA-Bereich mit einer Unsicherheit von<10^-5im Speicherring BESSY

PTB-Mitt. 94, 175 (1984)

M. Kühne, H.-C. Petzold

Soft x-ray generation in a helium environment using laser-produced plasmas

Opt. Lett. 9, 16-18 (1984)

M. Kühne, B. Wende

Spectral Radiant Power Measurements of VUV and Soft X-Ray Sources X-Ray Microscopy

in Optical Sciences, Springer 1984, 30-37 (1984), edited by: G. Schmahl and D. Rudolph; Springer Series

M. Kühne, B. Wende, A. Heuberger, H.-C. Petzold

Lasererzeugte Plasmen für die Röntgenlithographie

PTB-Mitt. 94, 255 (1984)

F. Riehle, B. Wende

Querschnitte und Divergenzen des Elektronenstrahls im Speicherring BESSY für radiometrische Anwendungen

PTB-Mitt. 94, 176 (1984)

E. Tegeler

Zeitabhängigkeit der spektralen Strahldichte von Deuteriumlampen mit Magnesiumfluoridfenster

PTB-Mitt. 94, 256 (1984)

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1983

J. Fischer and M. Kühne

Time Duration of VUV-Radiation Emission of a Laser Produced Plasma as Function of Laser Pulse Length and Wavelength of Observation

Appl. Phys. B32, 17-159 (1983)

J. Fischer, M. Kühne, B. Wende

Laser Produced Plasmas as Radiometric Transfer Standards in the VUV

Vacuum Ultraviolet Radiation Physics, A2.2 (1983), edited by: A. Weinreb und A. Ron; Adam Hilger, Bristol

M. Kühne, H.-C. Petzoldt

Laser Produced Plasma in High Pressure Helium as Radiation Source for X-Ray Lithography

Microcircuit Engineering 83, 255-260 (1983)

M. Kühne, F. Riehle, E. Tegeler, B. Wende

The Radiometric Laboratory of PTB at BESSY

Nucl. Instr. and Meth. 208, 399-403 (1983)

D.H. Nettleton and E. Tegeler

Time Dependence of Spectral Radiance of Magnesium Fluoride Windowed Deuterium Lamps

Vacuum Ultraviolet Radiation Physics, A1.4 (1983), edited by: A. Weinreb und A. Ron; Adam Hilger, Bristol

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1982

M. Kühne

Radiometric comparison of a laser-produced plasma and a BRV-source plasma at normal incidence

Appl. Opt. 21, 2124-2128 (1982)

M. Kühne, D. Stuck, E. Tegeler

BRV-continuum source as a radiometric transfer standard between 40 nm and 600 nm

Appl. Opt. 21, 3919-3922 (1982)

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1980

D. Einfeld and D. Stuck

Synchrotron Radiation as an Absolute Standard Source

Nucl. Instr. and Meth. 172, 101-106 (1980)

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1979

B. Wende

A Proposal for a Radiometric Program at an Electron Storage Ring

PTB-Bericht PTB-JB-7 (1979), ISSN: 0341-9053