Physikalisch-Technische Bundesanstalt

Publikationen

Zu Strichmaßstäben, inkrementellen Messsystemen und Laserinterferometern:

H. Kunzmann, T. Pfeifer, J. Flügge: Scales vs. Laserinterferometers. Performance and Comparison of two measurement systems. Annals of the CIRP Vol. 42/2/1993, p. 753 - 767.

J. Flügge, H. Kunzmann: Performance of laser interferometers and grating scales for high precision form manufacturing. Tagungsband UME 3, Aachen Mai 1994.

J. Flügge: Vergleichende Untersuchungen zur meßtechnischen Leistungsfähigkeit von Laserinterferometern und inkrementellen Maßstabmeßsystemen, PTB Bericht F-23, 1996

H. Bosse, W. Häßler-Grohne, J. Tschirnich, J. Flügge, G. Bönsch, P. Speckbacher, W. Israel: proceedings of the Euspen 2nd International Conference, European Society for Precision Engineering and Nanotechnology, Vol. 1: (2001), 302 - 305

H. Bosse, W. Häßler-Grohne, J. Flügge, R. Köning: Final report on CCL- S3 supplementary line scale comparison Nano3. Metrologia: 40 (2003), Tech. Suppl., 04002

H. Bosse, W. Häßler-Grohne, J. Flügge, R. Köning: Results of the international line scale comparison Nano3. Proceedings of the 4th euspen International Conference: May 31st - June 2nd 2004, Glasgow, Scotland, UK: (2004), 274 - 275

Zum Nanometerkomparator:

J. Flügge, H. Kunzmann: A vacuum interferometer for the comparison of laser interferometers in air and interferometric grating scales. VDI-Berichte 1118, March 1994.

U. Brand, J. Flügge: Measurement capabilities of optical 3D-Sensors for MST applications, Microelectronic Engineering 41/42 (1998) p. 623-626

J. Flügge, H. Dangschat, A. Spies, J. Tschirnich, H. Pieles: Concept of a interferometric length comparator with measurement uncertainties in the nanometer scale, Proceedings of the 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology (euspen), ISBN 3-8265-6085-X, Bremen: 2 (1999), 227-230

J. Flügge, G. Dai: Design of the temperature measurement and control system at the PTB nanometer comparator, Proceedings of the 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology: 2 (2000), 303 - 309

J. Flügge, G. Dai, R. Köning: Software and Control System of the PTB nanometer length comparator. proceedings of the 2nd International Conference, European Society for Precision Engineering and Nanotechnology, Vol. 2: (2001), 548 - 551

J. Flügge, R. Köning: Status of the nanometer comparator at the PTB, (Proceedings of SPIE: 4401): (2001), p. 275 - 283

J. Flügge, R. Köning: Design and first results of PTB's new nanometer comparator. Requirements and recent develoments in high precision length metrology: proceedings of the 159. PTB-Seminar; (PTB-Bericht PTB-F-45, Ed. H. Bosse, J. Flügge, ISBN 3-89701-841-1): (2001), 7 - 22

J. Flügge, R. Köning: Recent developments at the PTB nanometer comparator. Proceedings of the 3rd International Conference of the European Society for Precision Engineering and Nanotechnology: 2 (2002), ISBN 90-386-2883-8, 589 - 592

H. Bosse, J. Flügge, W. Häßler-Grohne, K. Wendt: High precision measurement of length and 2D-Coordinates at the PTB. The challenge of measurement interoperability: NCSL International annual workshop and symposium: Conference proceedings 2002.

J. Flügge, R. Köning, H. Bosse: Recent activities at PTB nanometer comparator. Recent developments in traceable dimensional measurements II; (Proceedings of SPIE: 5190, ISBN 0-8194-5063-4): (2003), p. 391 - 399

H. Bosse, W. Häßler-Grohne, J. Flügge, R. Köning: Line scale comparison Nano3. Recent developments in traceable dimensional measurements II; (Proceedings of SPIE: 5190, ISBN 0-8194-5063-4): (2003), p. 122 - 133

J. Flügge, R. Köning, H. Bosse: Measurement of line scales and linear encoders on the PTB Nanometer Comparator. Proceedings of the international topical conference on precision engineering, micro technology, measurement techniques and equipment: Vol. 2: (2003), ISBN 3-929832-30-4, p. 499 - 502

J. Flügge, R. Köning, W. Häßler-Grohne, T. Dziomba, H. Bosse: Messtechnik an mikro- und nanostrukturierten Längenteilungen, PTB-Mitteilungen: 114 (2004), 1, 25 - 35

J. Flügge, R. Köning, H. Bosse: Angle metrology and measurement of high resolution linear encoders on the PTB nanometre comparator. Proceedings of the 4th euspen International Conference: May 31st - June 2nd 2004, Glasgow, Scotland, UK: (2004), 272 - 273

R. Köning, J. Flügge, H. Bosse: Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders. Recent developments in traceable dimensional measurements III: 31 July - 1 August 2005; Proceedings of SPIE; 5879; ISBN 08194-5884-8, (2005), 5879 - 08

J. Flügge, R. Köning, H. Bosse: Measurement of high resolution interferential encoders using the PTB nanometer comparator. In Nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range. Ed.: G. Wilkening, L. Könders, Wiley-VCH, ISBN 3-527-40502-X; ISBN 978-3-527-40502-2 (2005), 404 - 409

J. Flügge, R. Köning, H. Bosse: Control system for guiding deviations on the PTB nanometer comparator. Proceedings of the 5th euspen International Conference: May 8th - May 11th 2005, Montpellier, France (2005), 233 - 236

J. Flügge, R. Köning, H. Bosse: Linear encoders used for investigations of length comparator capabilities and as length transfer standards. Proceedings of the 6th euspen International Conference: 28th May - 1st June 2006, Baden, Austria: (2006)

R. Köning, J. Flügge, H. Bosse: A method for the in situ determination of Abbe errors and their correction, Meas. Sci. Technol. 18 (2007) 476 - 481

Zum Alpha-Messplatz:

Suska, J. and Klopp, A.: A Device for Thermal Expansion Measurements, PTB-Bericht PTB-F17, Braunschweig, November 1994, S. 39-42

Pieles, H., Suska, J. and Tschirnich, J.: Interferometric Equipment for Precise Measurements of Line Standards and their Thermal Expansion., MAPAN-Journal of Metrology Society of India, Vol. 10, No. 2, 1995, pp. 65-73

Suska, J. and Tschirnich, J.: Thermal Expansion Measurements of Measures of Length and Test Pieces for Use in Dimensional Metrology., In: Advances in Metrology and its Role in Quality Improvement and Global Trade. B. S. Mathur, V. N. Ojha, P. C. Rothori (Eds). Copyright 1996 Narosa Publishing House, New Delhi, India

Zu Temperaturmessgeräten bei 20 °C

J. Flügge, H.-J. Schuster: A high precision temperature measurement system with Pt 100 for precision engineering. in PTB Bericht F-17: Temperature Measurements in Dimensional Metrology, 1993.

Schuster H.-J., Hora C.-J.: Prozeßperipherie PP2, Leistungsmerkmale und Anwendungshinweise, PTB-F-28 (1997)