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Mathematical Modelling and Data Analysis

Department 8.4

Projects

Quantifying uncertainties of machine learning models applied to photoplethysmography signals (QUMPHY)

Quantifying uncertainties of machine learning models applied to photoplethysmography signals (QUMPHY)

Period:07/2023 - 06/2026
Funding:    European Partnership on Metrology (Opens external link in new windowEPM)

At the core of this project stands the development of measures to quantify the uncertainties associated with ML algorithms applied to medical problems, in particular the analysis and processing of PPG signals. To achieve this the following tasks will be addressed: (i) benchmark datasets will be generated using publicly available in vivo, and synthetic data (ii) different ML models and uncertainty quantification (UQ) methods will be used to analyse the processing of the PPG signals and specify the associated uncertainty and (iii) a good practice guide with accompanying software repository showcasing the used models, methods and benchmarks will be developed and made publicly available.

For more Information, please visit our Opens external link in new windowwebsite.

Developing a Metrological framework for Assessment of Image-Based Artificial Intelligence systems for disease detection (MAIBAI)

Developing a Metrological framework for Assessment of Image-Based Artificial Intelligence systems for disease detection (MAIBAI)

 

Period:09/2023 - 08/2026
Funding:   European Partnership on Metrology (Opens external link in new windowEPM)
Partners:7 European national Metrology Institutes 
4 Research centres close to industry
1 University 

 

The aim of this project is to develop the metrology research necessary to support standardisation in image-based artificial intelligence (AI) systems for disease detection. Such systems are increasingly being developed, and it is vital that these tools are robust and effective in heterogeneous clinical settings. To date, performance has been assessed in an ad hoc manner as there are no approved guidelines for evaluation. Most studies have methodological weaknesses and results that are not comparable. In this project a standardised and impartial framework for performance, generalisability, and suitability assessment of AI tools will address these needs and enable more efficient, reliable, and reproducible validation of image-based AI systems for disease detection. This project will use breast cancer screening as the exemplar to inform the design of such a framework.

Trustworthy virtual experiments and digital twins

Trustworthy virtual experiments and digital twins

 

Period:05/2023 - 04/2026
Funding:   European Partnership on Metrology (Opens external link in new windowEPM)
Partners:8 European national Metrology Institutes 
2 Research centres close to industry
5 Universities 
6 Industrial partners

 

The use of virtual experiments and digital twins in metrological applications requires uncertainty evaluation methods, as well as reliable validation procedures, to make them fit, e.g. as substitutes or extensions, to certified measurement devices. This project will develop these methods and procedures to ensure the reliability and trustworthiness of virtual experiments and digital twins in metrology.

 

Further information can be found Opens external link in new windowhere.

Absolute form-interferometry for aspheres and freeform surfaces

Absolute form-interferometry for aspheres and freeform surfaces

 

Period:
01/2023 - 12/2025
Partners:
Funding:

 

The accurate measurement of aspheres or freeform surfaces is challenging. The so-called "reference-free" form interferometry is a measurement technique where no physical reference surface exists. It is far more demanding than classical reference surface-based form measurement techniques as used, e.g., for flatness or sphere measurements. While it has many advantages, the absolute form accuracy reached by “reference-free” form interferometry is still limited. In this project the tilted-wave interferometer (TWI) is considered which is a promising “reference-free” technique for optical form measurement. The goal is to explore if and how additional absolute methods can be used to improve the accuracy of the absolute form measurements of such measurement systems. Virtual modeling of the experimental scenarios to be considered plays a crucial role to find the optimal methods that are finally realized in the experimental setup and verified by means of special test objects.

 

Further information: here

MATHMET Activity MU Training

MATHMET Activity MU Training

 

Period:10/2021 - 09/2023
Partners:
  • 11 MATHMET members/partners: PTB (coordination), CEM, GUM, IMBIH, IMS SAS, INRIM, IPQ, LNE, METAS, NPL, SMD
  • 5 non-MATHMET members: ACCREDIA Ente Italiano di Accreditamento, Deutsche Akademie für Metrologie (DAM), National Standards Authority of Ireland (NSAI), Politecnico di Torino, University of Konstanz
  • PTB Working Group Data Analysis and Measurement Uncertainty (Opens external link in new windowPTB 8.42

 

MU Training - A MATHMET activity to improve quality, efficiency and dissemination of measurement uncertainty training

There is a documented need for a better understanding of measurement uncertainty and its evaluation in many communities. Recently this need was restated pointing to the importance of training on measurement uncertainty. MU Training is a MATHMET activity which will improve the quality, efficiency and dissemination of measurement uncertainty training. Based on a broad consortium, the project will

  1. develop new material for measurement uncertainty training and
  2. establish an active community for those involved in measurement uncertainty training.

More specifically, the new material (1.) will include an overview of existing courses, software and examples to guide trainees, as well as short videos explaining the need for, and a common difficulty in, evaluating measurement uncertainty. This material will be freely available on MATHMET’s website and will be actively disseminated to a large set of practitioners in metrology, academia and industry. The community (2.) will strengthen the capabilities of those teaching measurement uncertainty by opening courses and material within the consortium, as well as laying foundations for the development of new courses. A broader range and larger number of metrologists, researchers, university students and industrial audiences will receive good practice in training on measurement uncertainty during and well after the MATHMET activity. The MU Training activity is unfunded, and its results and impact will reflect on MATHMET and advance its network.

By creating new material for measurement uncertainty training at the beginners and at advanced levels, and by establishing an active community for those teaching measurement uncertainty at metrology institutes, universities, in accreditation and legal metrology, the activity will increase the understanding of measurement uncertainty and thus contribute to more reliable measurements from the highest scientific level down to the shop floor.

 

Weitere Informationen: Opens external link in new windowhier

Bayesian compressed sensing for nanoscale chemical mapping in the mid-infrared regime

Bayesian compressed sensing for nanoscale chemical mapping in the mid-infrared regime

 

Period:01/2020 - 06/2023
Funding:   Deutsche Forschungsgemeinschaft (Opens external link in new windowDFG)
Partners:FU Berlin (Opens external link in new windowProf. Dr. Eckart Rühl
PTB Working Group IR Spectrometry (Opens external link in new windowPTB 7.11, Dr. Bernd Kästner)

 

Functional nanomaterials provide the basis for novel forms of electronics, sensing or therapeutics. Their understanding and design require fabrication informed by nanoscale chemical mapping. Novel scanning probe-based spectroscopy using broadband infrared radiation emerged as a promising imaging technique at nanometer spatial resolution. However, the pixel-by-pixel data acquisition and conventional Fourier-transform schemes lead to prohibitive imaging times and enhanced radiation damage. This project aims to overcome these limitations by developing a novel hyperspectral imaging scheme based on Bayesian compressed sensing that utilizes prior knowledge about the spectra.

 

Further information: Opens external link in new windowhere

Quantitative MR-based imaging of physical biomarkers

Quantitative MR-based imaging of physical biomarkers

 

Period:06/2019 - 11/2022
Funding:European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR)
Partners:6 European national metrology institutes and research institutes
5 Science and technology institutes

 

The aim of this project is to evaluate emerging and complementary Electric Properties Tomography (EPT) and Magnetic Resonance Fingerprinting (MRF) MR techniques, to develop quantitative Magnetic Resonance Imaging (MRI) analysis for more accurate disease diagnostics. Algorithms for analyzing EPT and MRF output signals will be developed and improved, with performance validated using fully characterized, SI-traceable, ‘phantom’ reference artefacts and monitored components. Diagnosis of high impact clinical conditions with these new techniques (such as cerebrovascular diseases) will be assessed, and results disseminated to end-users such as MRI manufacturers and the medical community.

 

Further information: Opens external link in new windowhere

Mathematical modeling and numerical simulation of multiphase flows in metrology

Mathematical modeling and numerical simulation of multiphase flows in metrology

 

Period:06/2017 - 05/2020
Funding:   European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR)
Partners:4 European national Metrology Institutes 
3 Universities
11 Industrial partners 

 

The aim of the EMPIR project „Multiphase flow reference metrology“ is to explain and reduce the uncertainty in multiphase flow metering in the oil and gas industries. Therefore, a typical multiphase flow measurement set-up consisting of a 16 meter long horizontal pipe followed by a relatively complex measurement unit is examined experimentally and numerically. Within the working group 8.41, a variety of industrially relevant configurations with different oil, water, and gas flow rates are simulated with the commercial CFD code ANSYS Fluent. Depending on the prescribed superficial velocities of the gas and liquid phases, different flow patterns are observed at the end of the inflow section, which have an influence on the accuracy of the Venturi meter. The CFD simulations allow a visualization of the different structures in all parts of the geometry, even in areas that are hardly observable in experiments. Furthermore, the influence of different parameters (like the use of different fluids in the laboratories taking part in the experimental intercomparison of the project) on the pressure measurement in the Venturi tube has been investigated. An advantage of the simulation over the experiment is that it is possible to change only one parameter and keep the others constant. Thus, the influence of the different parameters can be investigated separately.

Statistical verifications in the qualification procedure

Statistical verifications in the qualification procedure

 

Period:04/2019 - 09/2019
Funding:    Forum Netztechnik/Netzbetrieb (FNN) in the Verband der Elektrotechnik Elektronik Informationstechnik e.V. (VDE)

 

Within a scientific collaboration, statistical verification procedures for a qualification procedure in legal metrology are examined. To qualify utility meters for the efficient sampling procedure according to section 35 of the Measures and Verification Ordinance in Germany (see section 4.3 in Opens external link in new windowGM-VA SPV), statistical hypothesis tests are selected and adapted to detect violations of the Normal distribution and of a small limiting failure rate. In addition, sample sizes are recommended for these tests.

 

Further information: Opens external link in new windowSampling procedures in legal metrology

Advancing measurement uncertainty ̶ comprehensive examples for key international standards (17NRM05 EMUE)

Advancing measurement uncertainty ̶ comprehensive examples for key international standards (17NRM05 EMUE)

 

Period:07/2018 - 06/2021
Funding:    European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR
Partners:12 National metrology institutes und designating institutes
2 Science and technology institutes
2 European accreditation bodies
1 Regulator

 

This project provides a comprehensive set of worked examples illustrating how the principles of measurement uncertainty evaluation can support and give added value to normative and related practices.

It aims to promote the harmonised evaluation of measurement uncertainty according to internationally recognised standards and guides across broad disciplines of measurement.

To achieve this objective the project will deliver new or improved adaptable examples of and templates for uncertainty evaluation to the Joint Committee for Guides in Metrology (Opens external link in new windowJCGM) as publishers of the internationally acknowledged Guide to the expression of uncertainty in measurement. Further, the project will provide examples to some ten standardisation committees that are specifically related to the standards they are developing. EUROLAB will disseminate project results to national associations, reaching about 2 000 laboratories and conformity assessment bodies with activities in testing, inspection and certification, with about 100 000 members in all. By these means, the project will strongly disseminate good uncertainty evaluation practice to an extremely wide circle of end-users.

 

Further informationen: Opens external link in new windowhere

Multiphase Flow Reference Metrology

Multiphase Flow Reference Metrology

 

Period:06/2017 - 05/2020
Funding:    European Metrology Programme for Innovation and Research (EMPIR)
Partners:4 European national Metrology Institutes (NEL,CMI,VTT,PTB), 3 Universities, 11 Industrial partners


Europe, and the world, will be dependent for many decades to come on the production of oil and gas for its underpinning energy needs. Multiphase flow measurement is a fundamental enabling metrology in subsea oil and gas production. However, field measurements exhibit high measurement uncertainty, costing industry billions of euros in financial exposure and production inefficiencies. To improve this situation requires a reference measurement capability that is consistent and comparable across different test laboratories that offer this service. This project will address this need by establishing harmonisation of measurements between multiphase flow reference laboratories.

Software-Toolbox for complex models on measurement processes in optics

Software-Toolbox for complex models on measurement processes in optics

 

Period:09/2017 - 08/2020
Funding:    Federal Ministry for Economics Affairs and Energy (Opens external link in new windowBMWi)  
Partner:Opens external link in new windowJCMwave GmbH

The goal of the joint research project is to develop a software toolbox for uncertainty quantification in optical metrology.  By using mathematical methods, the effect of measurement uncertainties on simulation results of a finite-element Maxwell-solver and on inverse problems in optics should be efficiently quantified.  The toolbox can be used to optimize semiconductor devices or for the fast evaluation of indirect optical measurements.

Further informationen: Opens internal link in current windowhere

Determination of the state-of-health of Li-ion batteries

Determination of the state-of-health of Li-ion batteries

 

Period:08/2016 - 07/2019
Funding:    Industry partner
Partner:Industry partner

 

The determination of the state-of-health of batteries used for electromobility is highly relevant, especially in order to indicate the driving range of a charged battery. In a joint cooperation with an industrial partner, a statistical method for determining the state-of-health will be further developed by the departments “Physical Chemistry” and “Mathematical Modelling and Data Analysis”.

Further informationen: Opens internal link in current windowhere

Metrology for multi-modality imaging of impaired tissue perfusion

Metrology for multi-modality imaging of impaired tissue perfusion

 

Period:07/2016 - 06/2019
Funding:    European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR)
Partners:10 European national Metrology Institutes and Research Institutes
1 Industrial partners  ("Collaborators")

 

The aim of this project is to address metrology needs for the health sector by developing a physical standard for quantitative medical imaging applicable to a range of imaging techniques (modalities) and new data analysis techniques for patient care. This will support the reliability and traceability of clinical data and ensures the comparability of diagnostic and treatment information in clinical trials. In addition, the project will investigate metrological approaches for radiation protection to support the health protection of citizens.

Further information: Opens external link in new windowhere

Reference algorithms and metrology on aspherical and freeform optical lenses

Reference algorithms and metrology on aspherical and freeform optical lenses

 

Period:06/2016 - 05/2019
Funding:    European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR)
Partners:11 European national Metrology Institutes and Research Institutes
4 Industrial partners  ("Collaborators")

 

Aspheres and freeform surfaces are components used in a variety of optical systems, from medical imaging to astronomy. They deliver better image quality compared to traditional spherical elements and as a result their use is growing rapidly. However, the ability to develop higher-performance aspheres and freeform surfaces is limited by the precision with which the shape of their surface can be measured. Although modern optical polishing techniques can remove material at the nanometre level, measurement techniques are unable to measure with the same degree of precision. This project will build on the work of the previous EMRP project Opens external link in new windowIND10 Form, which achieved measurements below 100 nanometres, by developing new measurement capabilities within European National Measurement Institutes to routinely measure below 30 nanometres. The capabilities developed will strengthen Europe’s position in global optics, and will be used by industry to develop a new level in optical device performance.

Further information: Opens external link in new windowhere

Standards and software to maximise end user uptake of NMI calibrations of dynamic force, torque and pressure sensors

Standards and software to maximise end user uptake of NMI calibrations of dynamic force, torque and pressure sensors

 

Period:07/2015 - 06/2018
Funding:    European Metrology Programme for Innovation and Research (Opens external link in new windowEMPIR)
Partners:National Physical Laboratory (NPL), Teddington, UK
HBM GmbH (Germany)
Rolls Royce plc (UK)

 

The aim of this project is to maximise uptake by industry end users and the Joint Committee for Guides in Metrology (JCGM) of outputs of EMRP JRP IND09 (Traceable dynamic measurement of mechanical quantities) by providing concrete, specific and directed advice on how to make best use of the results of dynamic calibrations provided by NMIs. 

 

More information can be found on the project website:

Opens external link in new windowhttp://mathmet.org/projects/14SIP08

and the software repository home page:

Opens external link in new windowhttps://github.com/eichstaedtPTB/PyDynamic

Reconstruction of spatially resolved color spectra from continuous line scan camera measurements

Reconstruction of spatially resolved color spectra from continuous line scan camera measurements

 

Period:07/2015 - 06/2018
Funding:    Federal Ministry of Economics and Technology (BMWi)
Partners:Chromasens GmbH

 

Spectral color measurement is a fundamental application in many industrial areas, and it also becomes of increasing importance in automated machine control and quality assessment. Standard procedures employ spot color measurement devices with which a measurement of a complete specimen can be accomplished only with huge efforts. In contrast, line scanning cameras offer the theoretical advantage of spatially resolved measurements, allowing for a measurement of the complete specimen. However, for the wide spread use of such devices the current lack of robust and validated mathematical and statistical procedures for the reconstruction of the color spectra from the line scan camera measurements has to be overcome. An important practical challenge is to account for environmental influences, such as, for instance, the lighting situation or the filters employed.

In this project knowledge and experience of PTB together with practical expertise of the company Chromasens will be employed to derive a suitable algorithm, which based on knowledge about the environmental influences provides a reliable estimate of the spatially resolved color spectra measured by Chromasens' line scan camera.

Further information: Opens internal link in current windowhere

Control of multiscale reaction-diffusion patterns and application to biomembranes and cardiac dynamics

Control of multiscale reaction-diffusion patterns and application to biomembranes and cardiac dynamics

 

Period:01/2015 - 12/2018
Funding:    Projekt B5 des Sonderforschungsbereichs 910 ("Kontrolle selbstorganisierender nichtlinearer Systeme")
DFG (German Research Foundation)
Partners:Institute of Theoretical Physics, Technical University of Berlin

 

Multiscale pattern formation refers either to the simultaneous appearance of competing unstable modes with different critical wavelengths or to the interaction of pattern formation with spatial heterogeneities. This project will focus on control strategies in order to obtain desired or suppress unwanted patterns in multiscale reaction-diffusion systems. We plan (i) to study simple generic models to develop appropriate control methods like time delay and nonlocal coupling and (ii) to consider control of patterns on biomembranes as well as during pathological cardiac dynamics as applications for multiscale systems.

Further information: Opens external link in new windowhere

Sensor Network Metrology for the Determination of Electrical Grid Characteristics

Sensor Network Metrology for the Determination of Electrical Grid Characteristics

 

Period:06/2014 - 05/2017
Funding:    European Metrology Research Programme (EMRP)
Partners:10 European national Metrology Institutes and Research Institutes
7 Industrial partners ("Collaborators")

 

Stromnetze im Mittel- und Niederspannungsbereich sind zunehmend einer bidirektionalen Lastenverteilung ausgesetzt. Dies erfordert auch auf dieser Ebene eine verlässliche Prognose, Überwachung und Schätzung des Netzzustandes. Da jedoch nur auf der Hochspannungsebene eine vollständige Messinfrastruktur vorhanden ist, erfordert die Bestimmung des Netzzustandes verlässliche mathematische Verfahren für unvollständig bekannte Zustandsraummodelle. Die PTB Arbeitsgruppe 8.42 entwickelt und untersucht daher zusammen mit 16europäischen Partnern geeignete mathematische und statistische Verfahren.

Further information: Opens internal link in current windowhere

Multiphase flow metrology in oil and gas production

Multiphase flow metrology in oil and gas production

 

Period:06/2014 - 05/2017
Funding:    European Metrology Research Programme (EMRP)
Partners:6 European national Metrology Institutes and Research Institutes
4 Industrial partners  ("Collaborators")

 

Typical multiphase measurement systems can have an uncertainty on component flow rate of 20% or greater under field conditions. The overall aim of the project is to help establish the infrastructure whereby multiphase flowmeters can be more reliably evaluated and/or verified for their application(s) – thereby enabling developers to advance state-of-the-art in flow measurement.To develop an accurate and validated metrological reference network, using test and calibration facilities for multiphase flow.

Further information: Opens internal link in current windowhere

Chemical regulation of aggregation and pattern formation of gliding bacteria

Chemical regulation of aggregation and pattern formation of gliding bacteria

 

Period:04/2014 - 09/2018
Funding:    DFG (German Research Foundation)
Project C4 within Research Training Group (GRK) 1558 Nonequilibrium Collective Dynamics in Condensed Matter and Biological Systems
Partners:Institute of Theoretical Physics, Technical University of Berlin

 

The multicellular aggregation of microorganisms like bacteria and amoebae is largely controlled by the interplay of physical properties like cell shapte and motility with intracellular processes and the exchange of biochemical signals between the cells. The aim of the project is to develop realistic models for aggregation and pattern formation in myxobacteria at the microscopic (= agent-based models with Langevin dynamics) and macroscopic level (continuum equations for cell densities of reaction-diffusion-advection type). The models shall address basic physical properties (self-propulsion, volume exclusion and nematic alignment) and biochemically regulated internal clocks and the resulting reversal rates of individual cells.

Spatio-temporal pattern formation in reaction-diffusion-advection-mechanics (RDAM) systems

Spatio-temporal pattern formation in reaction-diffusion-advection-mechanics (RDAM) systems

 

Period:04/2014 - 09/2018
Funding:    DFG (German Research Foundation)
Project C3 within Research Training Group (GRK) 1558 Nonequilibrium Collective Dynamics in Condensed Matter and Biological Systems
Partners:Institute of Theoretical Physics, Technical University of Berlin

 

RDAM systems include active fluids where mechanical stress involves an active component that is controlled by one or more chemical regulator species which obey reaction-diffusion-advection equations. The project builds on previous work describing pattern formation in non-moving circular droplets with fixed boundaries. The existing model shall be extended to allow for motion of the droplet. This will be achieved by considering the cytoplasm as a viscoelastic fluid and by introducing moving boundary conditions. Phase-field methods will be applied as effective computational alternative to a model with a sharp interface.  The model aims at the description of the dynamics of moving protoplasmic droplets of Physarum polycephalum and shall be compared to experimental observations in this system.

Multidimensional Reflectometry for Industry

Multidimensional Reflectometry for Industry

 

Period:09/2013 - 08/2016
Funding:    European Metrology Research Programme (EMRP)
Partners:10 European national Metrology Institutes and Research Institutes

 

The proposed JRP will provide validated and reliable optical measurements and methods with traceability to the SI-system wherever it is practicable to do so for the range of multidimensional reflection measurements. The general objective is to meet the demands from industry to describe the overall macroscopic appearances of modern surfaces by developing and improving methods for their measurement which rightly correlates with the visual sensation. In specific, the project deals with the Goniochromatism, Gloss and Fluorescence properties of dedicated artefacts, which will be investigated in the three main vertical workpackages. The horizontal workpackages address these subjects to the Modelling and Data Analysis and the Human Visual Perception, in order to give an irreducible set of calibration schemes and handling methods.

Further information: Opens internal link in current windowhere

Development of methods for characterizing integral quantities from differential optical measurements

Development of methods for characterizing integral quantities from differential optical measurements

 

Period:08/2013 - 07/2016
Funding:    Federal Ministry of Economics and Technology (BMWi)
TechnoTeam Bildverarbeitung GmbH Ilmenau
Partners:PTB department Photometry and Applied Radiometry
PTB working group High-temperature Scale
TechnoTeam Bildverarbeitung GmbH Ilmenau

Optical measurements in industry increasingly employ techniques which enable a full characterization of the measured object by a differential measurement. Examples for this are camera based measurements of the spatial distribution of temperature or luminance. Based on the differential measurement integral quantities can be determined which enable traceability to SI units. This requires a characterization of the accuracy of the integral quantity. Due to the high dimensionality of the differential measurements and also due to possible correlations therein this is currently not feasible for measurements in industry. This project aims at the development of appropriate methods which can be routinely applied to characterize integral quantities.

Further information: Opens internal link in current windowhere

Earlier Projects

Novel mathematical and statistical approaches to uncertainty evaluation

Novel mathematical and statistical approaches to uncertainty evaluation

 

Period:08/2012 - 07/2015
Funding:    European Metrology Research Programme (EMRP)
Partners:10 European national Metrology Institutes and Research Institutes
1 Industrial partner ("Collaborator")

 

The project develops novel approaches to measurement uncertainty evaluation and enable their consistent application, illustrated by appropriate case studies. The dissemination of these methods is ensured by providing input for future revisions of the Guide to the Expression of Uncertainty in Measurement (GUM), its supplements and other relevant documents and by providing algorithms and software. It focuses on three areas where new uncertainty analysis methods are needed: inverse and regression problems, computationally expensive model functions, conformity assessment and reliable decision-making.

In addition, the project emphasizes application of these methods to challenging areas where a strong need for new uncertainty evaluation methods has been identified. These include new analytical technologies for biochemistry and biotechnology (enzyme-linked immunosorbent assays - ELISA, polymerase chain reaction - PCR), transport processes (fluid flow, thermophysical properties of materials), industry and regulation (scatterometry, fire safety engineering, conformance testing for healthcare products).

Further information: Opens external link in new windowhere

Metrology of small structures for the manufacturing of electronic and optical devices

Metrology of small structures for the manufacturing of electronic and optical devices

 

Period:08/2011 - 07/2014
Funding:    European Metrology Research Programme (EMRP)
Partners:8 European national Metrology Institutes and Research Institutes
2 Industrial partners ("Collaborators")

 

Dimensional metrology of small structures is a basic subject important for applications within a wide variety of areas mainly in the semiconductor and optical industries but also in mechanical engineering (e.g. length and angle encoders) as well as in biological and medical industries. Dimensional metrology of high-end laterally structured functional surfaces is a constant challenge due to the progressive minimisation of structures combined with an increasing impact of feature details on the functionality of these surfaces. The development of sophisticated dimensional metrology of structures in the sub micrometer-range is therefore an important condition for the further development of technologies for optics and semiconductor industries.

Scatterometry is a promising measurement technique for dimensional metrology since it is fast, non-destructive and has basically no “resolution limit”. However, so far scatterometry is not capable of performing absolute form measurement. The goal of this project is to overcome this limitation by improving according measurement and data analysis methods. The investigations and results of this project will enable the design, development, characterisation and calibration of a scatterometry reference standard to face the tough specifications demanded nowadays.

Further information: Opens internal link in current windowhere

Traceable dynamic measurement of mechanical quantities

Traceable dynamic measurement of mechanical quantities

 

Period:09/2011 - 08/2014
Funding:    European Metrology Research Programme (EMRP)
Partners:9 European national Metrology Institutes and Research Institutes
4 Industrial partners ("Collaborators")

 

The aim of this project is to establish traceability for the three mechanical quantities force, torque and pressure for measurements under dynamic conditions. The required research carried out in this JRP will provide the foundation for a European infrastructure for traceable dynamic measurements of these mechanical quantities.

The JRP-Partners will establish a metrology infrastructure for traceable dynamic measurements of force, pressure and torque, set up and validate primary calibration methods, develop methods for consistent and reliable evaluation of measurement uncertainty, and provide dynamic traceability of the electrical components of the measurement chain.

Further information: Opens internal link in current windowhere

Optical and tactile metrology for absolute form characterisation

Optical and tactile metrology for absolute form characterisation

 

Period:09/2011 - 08/2014
Funding:    European Metrology Research Programme (EMRP)
Partners:8 European national Metrology Institutes and Research Institutes
4 Industrial partners ("Collaborators")

 

This project addresses the urgent need of the European optics and precision engineering industry and of basic research institutes for a significant improvement of accuracy and spatial resolution of the “absolute” surface form measurement of flats, aspheres and free-form surfaces. Absolute, in this context, refers to the measurement of optical surfaces delivering the full 3D form. Absolute form data are required, e.g. ,for the manufacturing of high-end asphere optics, strongly curved freeform surfaces used for special optics, for the calibration of measuring systems used in industry for in-production metrology, and for synchrotron and astronomical systems.

Further informationen: Opens internal link in current windowhere

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