Transfer of the linear Traceable Multiple Sensor technique for the high-accurate measurement of optical surfaces with high resolution
05/2007 - 04/2010
The linear TMS technique for the highly accurate measurement of optical surfaces with high resolution is transferred to industry. The math-based procedure, developed recently at PTB, allows for the highly accurate optical form measurements with significantly improved lateral resolution and higher dynamic range than present techniques. The method is based on multiple distance and angular measurements and utilizes mathematical modelling to eliminate systematic sensor errors as well as scanning stage errors. The project is carried out jointly with TRIOPTICS GmbH.
- PTB working group Form and Wavefront Metrology
Further information: Form measurement of curved optical surfaces