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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Mask Metrology

Working Group 5.22

Tasks


  • Development of measuring instruments and procedures for the determination of the position of microstructureson 2D-substrates
  • Investigation and improvement of optical and electron-optical measuring procedures for the localization of microstructure edges
  • Calibration of photomasks, microscope scales, line scales and other graduations on planar measurement objects