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Surface Metrology

Department 5.1

Tasks and aims


Traceable measuring techniques for dimensional variables of surfaces are the basis for an accompanying quality assurance in research, development and production. In particular for the field of nano-technology there is an additional strong linkage between dimensional and other physical and chemical properties.
The group Surface Metrology regards it as its goal to develop and to improve measurement devices and instruments for the measurement of small structures on surfaces in the fields of micro system technique, nano-technology and the surface measuring techniques (roughness -, hardness - and layer thickness, etc.) in order to reach smaller uncertainties surely. This includes the development and calibration of standards for the dissemination of dimensional properties to DAkkS and industry too.
The group is involved in the Avogadro project as well as in several national and international projects.


Opens internal link in current windowProfilscanner

Schnelle Oberflächenmessungen (Rauheit, E-Modul, Härte, Ablagerungen) mit Si-Mikrotastern in Einspritzdüsen.

Opens internal link in current windowLichtinduzierte Kraft

Nachweis der theoretisch vorhergesagten Lichtanziehung zischen planparrallelen Platten mit geringem Abstand.

Monoatomare Stufennormale

Verfahrensprozess und Messmöglichkeiten an monoatomaren Stufen auf ansonsten atomar glatten SI-Oberflächen.

Laterale Auflösungsnormale

Geometrie, Herstellung, Messung und Auswerteverfahren lateraler Auflösungsnormale für die Mikroskopie und taktile Messverfahren

Opens internal link in current windowSoftwareentwicklung zur Rauheitskenngrößenbestimmung

Entwicklung von Softwarenormalen zur Bestimmung der Rauheitskenngrößen aus Oberflächenmesswerten.

Informationen und die wichtigsten Veröffentlichungen des Fachbereichs



Opens external link in new windowNanoScale 2016 in Wrocław, Polen
vom 9. bis 11. März 2016

Organisation des Seminars in Zusammenarbeit mit der Technischen Universität Wrocław, Opens external link in new windowFaculty of Microsystem Electronics and Photonics, Prof. Dr. Teodor Pawel Gotszalk und der PTB.
Das Seminar beschäftigte sich mit Themen der quantitativen Mikroskopie, Kalibrierungen im nanoskaligen Bereich sowie mit Messvorgaben und Normen. Die Seminarveranstaltung fand seit 1995 nun zum 11. mal statt. Opens external link in new windowmehr.


Ausgewählte Veröffentlichungen

Opens external link in new windowFinal report on APMP.L-K8: International comparison of surface roughness
Baker, A., Tan, S. L., Leach, R., Jung, L., Wong,  S.Y., Tonmueanwai, A., Naoi, K., Kim, J., Renegar, T B , Chaudhary, K P.,
Metrologia, Technical Supplement 50 (2013) 04003, dx.doi.org/10.1088/0026-1394/50/1A/04003

Opens external link in new windowDevelopment of a traceable profilometer for high-aspect-ratio microstructures metrology.
Xu, M., Kirchhoff, J. & Brand, U. Surf. Topogr. Metrol. Prop. 2  (2014) 024002

Opens external link in new windowCharacterization of a traceable profiler instrument for areal roughness measurement
Thomsen-Schmidt, P., Measurement Science and Technology 22 (2011) 094019

Opens external link in new windowIn-situ nondestructive characterization of the normal spring constant of AFM cantilevers.
Gao, S. & Brand, U.  Meas. Sci. Technol. 25 (2014) 044014

Opens external link in new windowNanoindentation
Michailidis, N.; Bouzakis, K.-D.; Koenders, L.; Herrmann, K.; CIRP encyclopedia of production engineering (2014)

Opens external link in new windowA nanonewton force facility to test Newton’s law of gravity at micro- and submicrometer distances
Nesterov, V., Buetefisch, S., Koenders, L.,  Ann. Phys. (Berlin) 525 (2013) 728–737 DOI 10.1002/andp.201300057

Opens external link in new windowLight-induced attractive force between two metal bodies separated by a subwavelength slit,
Nesterov, V., Frumin, L.,  Meas. Sci. Technol. 22 (2011) 094008

Opens external link in new windowImproved measurement results for the Avogadro constant using a 28Si-enriched crystal
Azuma, Y.; Barat, P.; Bartl, G.; Bettin, H.; Borys, M.; Busch, I.; Cibik, L.; D'Agostino, G.; Fujii, K.; Fujimoto, H.; Hioki, A.; Krumrey, M.; Kuetgens, U.; Kuramoto, N.; Mana, G.; Massa, E.; Meeß, R.; Mizushima, S.; Narukawa, T.; Nicolaus, A.; Pramann, A.; Rabb, S. A.; Rienitz, O.; Sasso, C.; Stock, M.; Vocke Jr, R. D.; Waseda, A.; Wundrack, S.; Zakel, S.; Metrologia (2015)

Opens external link in new windowPositioning errors in coherence scanning interferometers: determination of measurement uncertainties with novel calibration artifacts
Boedecker, S.; Rembe, C.; Krüger-Sehm, R.; Felgner, A.; Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology (2014)    

Opens external link in new windowModelling and simulating scanning force microscopes for estimating measurement uncertainty: a virtual scanning force microscope
Xu, M., Dziomba, T., Koenders, L.,, Measurement Science and Technology 22 (2011) 094004

Opens external link in new windowThe European nanometrology landscape
Leach, R.; Boyd, R.; Burke, T.; Danzebrink, H.-U.; Dirscherl, K.; Dziomba, T.; Gee, M.; Koenders, L.; Morazzani, V.; Pidduck, A.; Roy, D.; Unger, W. E. S.; Yacoot, A.; Nanotechnology 22 (2011)  062001, doi:10.1088/0957-4484/22/6/062001

Opens external link in new windowAspects of scanning force microscope probes and their effects on dimensional measurement
Yacoot, A., Koenders, L., Journal of Physics D: Applied Physics, V41 (2008) 103001