Project

• BMBF (Federal Ministry of Education and Research) 

Scatterometry is an indirect method of measurement for the determination of surface profiles in the micrometer and nanometer range which occur e.g. in photolithographic masks. Within the scope of the BMBF joint project ABBILD, a mathematical  method was developed in cooperation with the Weierstraß Institute of Berlin and  two experimental PTB groups the basic suitability of EUV scatterometry for the determination of profiles was demonstrated.

• PTB Working Group Ultra-high resolution microscopy 

• PTB Working Group EUV Radiometry 

• Research Group Nonlinear Optimization and Inverse Problems, Weierstraß Institute for Applied Analysis and Stochastics

Further information: 

      Inverse problem in scatterometry