Structure > Div. 5 Precision Engineering > 5.5 Scientific Instrumentation > 5.56 Manufacturing Technology > Microelements
Microelements
The increasing miniaturization of components and assemblies require new manufacturing methods.
Responsibilities:
- Development of bonding and connection technologies for miniaturized components and assemblies
- Development of manufacturing machines and methods for micro-mechanical components
- Handling and assembly of very small components and subassemblies, including REM
- Investigation and development of manufacturing and assembly operations, in particular, joining
Equipment:
- Multi-axis machine tool for use in the SEM
- Large Chamber Scanning Electron Microscope with RE-and SE-detector, EDX
- SEM Zeiss DSM-960 with RE, SE and channel plate detector
- Extensive measurement technology with vision, motion and DAQ
- Laminar flow bench for up to class 100 clean room conditions
- Low pressure plasma system with possibility for cleaning, activation and etching
- Sputter coater
Micro-assembly robot in the GK-REM
Rubin tetrahedron-sphere diameter of 110 microns
Kinematics of the patent-pending six-axis robot assembly
Experimental setup for high-precision positioning with increments in the nm range
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