| Working group leader | Dr.-Ing. Hans-Ulrich Danzebrink |
| Development of Scanning Probe Microscope metrology systems Calibration of standards for Scanning Probe Microscope metrology systems | Dr. Gaoliang Dai |
| Interaction probe-sample Development of 3d-standards | Dipl.-Phys. Thorsten Dziomba |
| Calibration of standards for Scanning Probe Microscope | Dipl.-Ing. Frank Pohlenz |
| Self-calibration and error analysis of Scanning Force Microscope Virtual Scanning Force Microscope | Dr. Min Xu |
| Address | Physikalisch-Technische Bundesanstalt AG 5.25 Quantitative Rastersondenmikroskopie Bundesallee 100 38116 Braunschweig |