Physikalisch-Technische Bundesanstalt

• Sensor objective with beam deflection detection
• Sensor objective with piezolever module
• Sensor objective with tuning fork module
• Sensor head for combined scanning probe and interference microscopy
• Assembled Cantilever Probes (ACP)

High resolution probing systems

PTB's development of probing systems based on SPMs (SPM: scanning probe microscope) is aimed at constructing and optimizing these measuring heads for use in dimensional nanometrology. Needless to say that the sensor systems described cannot only be used for metrological applications, but are of general interest for scanning probe microscopy and coordinate measuring techniques.
In addition to the properties important from the viewpoint of metrology such as stability, sensitivity and noise behaviour, different other aspects have been incorporated into device development:

• Combination of the SPM measuring heads with optical microscopes: here, the optical function extends from visualization to quantitative dimensional or analytical methods
• The use of different detection principles: the movement and position of the measuring tip is measured by an external optical procedure or via an intrinsic electrical measuring principle
• The use of different measuring tip materials: in recent developments, special diamond tips are used in addition to silicon and silicon nitride tips

Figure 1: Sketch of a scanning force microscope (SFM) with cantilever probe and beam deflection detection