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Physikalisch-Technische Bundesanstalt

StructureDiv. 5 Precision Engineering5.2 Dimensional Nanometrology > 5.22 Mask Metrology
Mask Metrology
Working Group 5.22

Tasks

 

  • Development of measuring instruments and procedures for the determination of the position of microstructureson 2D-substrates
  • Investigation and improvement of optical and electron-optical measuring procedures for the localization of microstructure edges
  • Calibration of photomasks, microscope scales, line scales and other graduations on planar measurement objects

Contact

Head of Working Group

Dr. Gaoliang Dai
Phone: +49 531 592-5127
Fax: +49 531 592-5205
Email: gaoliang.dai@ptb.de

Secretariat

Christina Müller
Phone: +49 531 592-5201
Fax: +49 531 592-5205
Email: christina.mueller@ptb.de

Address

Physikalisch-Technische Bundesanstalt
Arbeitsgruppe 5.22
Bundesallee 100
38116 Braunschweig
Germany

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