Physikalisch-Technische Bundesanstalt

Tasks

• Development of measuring instruments and procedures for the determination of the position of microstructureson 2D-substrates
• Investigation and improvement of optical and electron-optical measuring procedures for the localization of microstructure edges
• Calibration of photomasks, microscope scales, line scales and other graduations on planar measurement objects

Contact

Head of Working Group		Dr. Gaoliang Dai Phone: +49 531 592-5127 Fax: +49 531 592-5205 Email: gaoliang.dai@ptb.de
Secretariat		Christina Müller Phone: +49 531 592-5201 Fax: +49 531 592-5205 Email: christina.mueller@ptb.de
Address		Physikalisch-Technische Bundesanstalt Arbeitsgruppe 5.22 Bundesallee 100 38116 Braunschweig Germany