Length Graduation
Working Group 5.21
Tasks
Implementation and optimization of the Nanometer Comparator for the one-dimensional Calibration of photo masks, line scales and length measurement systems, like incremental displacement sensors and laser interferometers. The comparator can also be used for fundamental investigations of one-dimensional length measurement systems .
Contact
Head of Working Group: | Dr. Jens Flügge Phone: +49 531 592-5261 Fax: +49 531 592-5205 E-Mail: Jens Flügge | |
| Secretariat | Christina Müller Phone: +49 531 592-5201 Fax: +49 531 592-5205 E-Mail: Christina Müller | |
| Address | Physikalisch-Technische Bundesanstalt Arbeitsgruppe 5.21 Bundesallee 100 38116 Braunschweig Germany |
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