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Physikalisch-Technische Bundesanstalt

StructureDiv. 5 Precision Engineering > 5.2 Dimensional Nanometrology
Dimensional Nanometrology
Department 5.2

Tasks

The main tasks of the department are to develop and to optimize measurement methods, standards and instrumentation in the area of dimensional nanometrology and to disseminate dimensional measurands by calibration of suitable micro- and nanostructured measurement objects. The existing equipment allows to perform high precision measurements on micro- and nanostructured measurement standards, material measures and dimensional measuring systems with uncertainties in the nanometre region. This also holds for angle measuring systems and angle material measures, which can be characterized with uncertainties in the nanoradian region. In addition, the department is involved in several research projects in the area of nanometrology.


Working Groups


Contact

Head of Department

Dr. Jens Flügge
Phone: 0531 592-5200
Email: Jens Flügge

Secretariat

Christina Müller
Phone: 0531 592-5201
Fax: 0531 592-5205
Email: Christina Müller

Address

Physikalisch-Technische Bundesanstalt
Fachbereich 5.2
Bundesallee 100
38116 Braunschweig
Germany

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