Physikalisch-Technische Bundesanstalt

Tasks and aims

A special challenge for the tactile measurement of microsystem surfaces are the interaction forces between sensor and measuring object.  Too large probing forces lead to deformations and scratches, while too small probing forces lead to a lift off of the stylus from the surface. Thus it is important to know the exact probing forces during the measurement. In order to achieve high resolution topography measurements stylus instruments and atomic force microscopes (AFM) are preferably used. In addition AFMs are capable of measuring bonding forces in chemical and biological analysis. So the intention of the working group is to develop measurement methods to precisely measure micro- and nanoforces as well as providing appropriate transfer standards for industry. Furthermore special methods shall be developed to correct the deformation influence at tactile surface measurements.

Main focus of the research:

• Micro- and Nano-force metrology
• Probing Methods for Micro Structures
  • Si-Cantilever Sensors
• Standards
  
  • Micro force setting standarts
  • Depth setting standards from 1µm to 5 mm
• Standards and guidelines

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