Physikalisch-Technische Bundesanstalt

Publications
Measurement and calibration capabilities

Welcome to the surface

What's new?

NanoScale

Last NanoScale (25^th to 26^th april 2013) took place in Paris www.nanoscale.de

Structure of department changed

The structure of the department changed since start of 2013. This  changes are represented on the pages now.

changes are:

Working group 5.11 Nanoforce Metrology for Tactile Sensors

• is named to Hardness and Tactile Probing Methods.
• the section Hardness from old working group 5.12 Hardness and Layer Thickness Measurement technique swaps to this group.
• the section Nanoforce technique leaves and build its own working group called 5.12 Nanoforce standard measuring attachment.

The old working group 5.12 Hardness and Layer Thickness Measurement technique 

• dissolved.
• the section Hardness is going to working group 5.11 Hardness and Tactile Probing Methods
• the section layer thickness measurement attached to workin group 5.13 Layer Thickness and Crystalline Standards.

A new working group 5.12 Nanoforce standard measuring attachment is build

• the aims are nanoforce techniques and a nanoforce standard attachment
• leader is Dr. rer. nat. habil. Vladimir Nesterov.

The working group 5.13 Surface Metrology on Nanostructures

• is named to 5.13 Layer Thickness and Crystalline Standards.
• leadership moves from Dr. rer. nat. Ludger Koenders to Dr. rer. nat. Ingo Busch
• the section layer thickness measurement of the old working group 5.12 Hardness and Layer Thickness Measurement technique turns in this group

The working group 5.14 Roughness Measuring Methods

• is named to 5.14 3D Roughness Metrology.
• leadership takes Dr. rer. nat. Ludger Koenders. Thanks to  Dr.-Ing. Rolf Krüger-Sehm for his well done work for long time. He is still available for advising.

The working group 5.15 Calibration of Roughness Parameters

• keeps as are.

The old pages can be reached by following links for a while:

old 5.11 Nanoforce Metrology for Tactile Sensors

old 5.12 Hardness and Layer Thickness Measurement technique

old 5.13 Surface Metrology on Nanostructures

old 5.14 Roughness Measuring Methods

5.15 Calibration of Roughness Parameters is not changed.

Co-Nanomet

Within the Co-Nanomet project (FW 7) the needs and requirements for an successfully support of the European nanometrology have been developed.

Some of the published documents like
- Introductory Guide to Nanometrology,
- Nanometrology Discussion Papers 2011,
- Critical Dimensions, Scanning Probe Techniques and Thin Film Metrology,
 are available at the web-page of the project coordinator euspen www.euspen.eu/nanometrology

Tasks and aims

Traceable measuring techniques for dimensional variables of surfaces are the basis for an accompanying quality assurance in research, development and production. In particular for the field of nano-technology there is an additional strong linkage between dimensional and other physical and chemical properties.
The group Surface Metrology regards it as its goal to develop and to improve measurement devices and instruments for the measurement of small structures on surfaces in the fields of micro system technique, nano-technology and the surface measuring techniques (roughness -, hardness - and layer thickness, etc.) in order to reach smaller uncertainties surely. This includes the development and calibration of standards for the dissemination of dimensional properties to DAkkS and industry too.
The group is involved in the Avogadro project as well as in several national and international projects.

Working Groups

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