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Physikalisch-Technische Bundesanstalt

StructureDiv. 4 Optics4.2 Imaging and Wave Optics > 4.23 Ultra-high Resolution Microscopy
Ultra-high Resolution Microscopy
Working Group 4.23

Tasks

Investigation and development of ultra-high resolution optical measurement methods for  traceable dimensional measurements of micro- and nanostructures on surfaces with structure sizes down to the sub-100 nm range.

Research and development of optical microscopy methods with the aim of increasing the lateral resolving power beyond the limits of classical microscopy (Abbe limit).

Investigation and modelling of the interactions of nano-scale structures with electromagnetic radiation in terms of applications for ultra-high resolution measurement methods.

Development of dimensional optical measuring techniques for current and future 193nm technologies in particular in semiconductor industry.




Contact

Head of Working Group Dr. Bernd Bodermann
Phone: +49(0)531-592 4222
Fax: +49(0)531-592 69 4222
E-mail: Bernd Bodermann

Address Physikalisch-Technische Bundesanstalt
Arbeitsgruppe 4.23
Bundesallee 100
38116 Braunschweig
Germany

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