- Contact
Tasks
Research and development of microscopic methods and suitable standards for traceable dimensional measurements of micro- and nanostructures.
Main areas of application are measurements and calibrations of structures on photomasks for semiconductor industry and calibration of line width standards and grating structures. A new field of application is the characterization of nanoparticles.
Fields of work
Calibration of linewidths with UV microscopy
Standards for quantitative microscopy
Calibration of grating constants with optical diffraction
Characterization of stochastically nanostructured polymer surfaces
Scanning electron microscopy for the characterization of micro- and nanostructures
Contact
| Head of Working Group | Dr. Egbert Buhr Phone: +49(0)531-592 4200 Fax: +49(0)531-592 4205 E-mail:  Egbert Buhr | |
| Address | Physikalisch-Technische Bundesanstalt Arbeitsgruppe 4.22 Bundesallee 100 38116 Braunschweig Germany |
© Physikalisch-Technische Bundesanstalt, last update: 2012-10-05, Webmaster Abteilung 4
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