Referenzen
Measurement Science and Technology 25(4), 044004 ( 2014) | |
30th European Mask and Lithography Conference, Dresden, Germany, 24-25, June, 2014
30th European Mask and Lithography Conference; Proceedings of SPIE
Band 9231
(2014)
, Seite 92310M-1 - 92310M-11
DOI: 10.1117/12.2065941
[CD-ROM] file name: 9231_16.pdf |
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7th International Workshop on Advanced Optical Imaging and Metrology, FRINGE 2013, Nuertingen, Germany, 08-11, September, 2013
Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology
(2014)
, Seite 695 - 700
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SPIE Photonics Europe, Brussels, Belgium, 14-17, April, 2014
Optical Micro- and Nanometrology V; Proceedings of SPIE
Band 9132
(2014)
, Seite 913208-1 - 913208-9
DOI: 10.1117/12.2052819
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SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Munich, Germany, 10-14, May, 2013
Modeling aspects in optical metrology IV; Proceedings of SPIE
Band 8789
(2013)
, Seite 878904-1 - 878904-9
DOI: 10.1117/12.2022108
[CD-ROM] file name: 8789_3.pdf |
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SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Munich, Germany, May 13, 2013
SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Proc SPIE
Band 8789
(2013)
, Seite 87890U-1-87890U-6
DOI: 10.1117/12.2020761
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SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology IV, Munich, Germany, May 13-14, 2013
Modeling Aspects in Optical Metrology IV; Proceedings of SPIE
Band 8789
(2013)
DOI: 10.1117/12.2020677
[CD-ROM] file name: 8789_29.pdf, 87890T-1 - 87890T-8 |
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113. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO113. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Eindhoven, The Netherlands, 29, May - 02, June, 2007
DGaO-Proceedings
Band 113
(2012)
Online only |