Referenzen
SPIE Conference Optical Metrology: Modeling Aspects in Optical Metrology V, Munich, Germany, 22-25, June 2015
Modeling Aspects in Optical Metrology V; Proceedings of SPIE
Band 9526
(2015)
, Seite 95260U
DOI: 10.1117/12.2185707
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SPIE Metrology, Inspection, and Process Control for Microlithography XXVII, San Diego, Calif., USA, 24-28, February, 2013
Metrology, inspection, and process control for microlithography XXVII; Proceedings of SPIE
Band 8681
aus 1
(2013)
, Seite 868119-1 - 868119-7
DOI: 10.1117/12.2011154
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Optics Express
20(12), 12771 - 12786 (
2012)
DOI: 10.1364/OE.20.012771
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7th EOS Topical Meeting on Diffractive Optics 2010, Koli, Finland, 14-18, February, 2010
EOS Topical Meeting on Diffractive Optics 2010
(2010)
[CD-ROM] file name: Koli Gross Hermann 2483.pdf, 2 S. |
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Sensoren und Messsysteme 2008 : 14. Fachtagung Ludwigsburg; VDI-Berichte
2011, 337 - 346 (
2008)
(VDI-Berichte: 2011) |
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Journal of Physics: Conference Series
135 (
2008)
012071, 8 S. |
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6th International Conference on Inverse Problems in Engineering, Dourdan, France, 15-19, June, 2008
Proceedings of ICIPE 2008
(2008)
, Seite Paper 77
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Modeling Aspects in Optical Metrology, Munich, Germany, 18-19, June, 2007
Modeling aspects in optical metrology : [papers from the SPIE Conference on Optical Metrology, held as part of the 18th International Congress on Photonics in Europe]; Proceedings of SPIE
Band 6617
(2007)
, Seite 661710-1 - 661710-11
DOI: 10.1117/12.726340
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Modeling Aspects in Optical Metrology, Munich, Germany, 18-19, June, 2007
Modeling aspects in optical metrology : [papers from the SPIE Conference on Optical Metrology, held as part of the 18th International Congress on Photonics in Europe]; Proceedings of SPIE
Band 6617
(2007)
, Seite 66170Y-1 - 66170Y-10
DOI: 10.1117/12.728896
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